Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2014Compact optical position feedback scheme for MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.
Journal Article
2014Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives
Kenda, A.; Kraft, M.; Tortschanoff, A.; Scherf, W.; Sandner, T.; Schenk, H.; Lüttjohann, S.; Simon, A.
Conference Paper
2014Optical design of MOEMS-based micro-mechatronic modules for applications in spectroscopy
Tortschanoff, A.; Kremer, M.; Sandner, T.; Kenda, A.
Conference Paper
2014Optical position detection for MOEMS scanner mirrors with arbitrary trajectories
Tortschanoff, Andreas; Baumgart, Marcus; Holzmann, Dominik; Mayer, Christoph; Sandner, Thilo; Kenda, Andreas
Conference Paper
2014Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Gaumont, E.; Schenk, H.; Kenda, A.
Journal Article
2013Closed-loop control driver for quasi-static MOEMS mirrors
Tortschanoff, Andreas; Holzmann, Dominik; Lenzhofer, Martin; Sandner, Thilo; Kenda, Andreas
Conference Paper
2013Optical position feedback of quasi-static 2D MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.
Conference Paper
2012Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror
Kenda, A.; Sandner, T.; Lüttjohann, S.; Kraft, M.; Tortschanoff, A.; Simon, A.
Conference Paper
2012Design of an optical position detection unit for fast 2D-MOEMS scanners
Tortschanoff, A.; Sandner, Thilo; Kenda, A.
Conference Paper
2012Optical position feedback for electrostatically driven MOEMS scanners
Tortschanoff, Andreas; Baumgart, M.; Frank, Albert; Wildenhain, Michael; Sandner, Thilo; Schenk, Harald; Kenda, Andreas
Conference Paper
2012Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.
Conference Paper
2011Advanced FT-IR high-speed spectrometer showing the feasibility of high performance optical MEMS based mid-IR sensing
Kenda, A.; Kraft, M.; Baumgart, M.; Sandner, T.; Lüttjohann, S.; Simon, A.
Conference Paper, Journal Article
2011Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes
Tortschanoff, A.; Frank, A.; Lenzhofer, M.; Wildenhain, Michael; Sandner, Thilo; Kenda, A.
Conference Paper
2011A compact and portable IR analyzer: Progress of a MOEMS FT-IR system for mid-IR Sensing
Kenda, A.; Lüttjohannb, S.; Sandnerc, T.; Krafta, M.; Tortschanoff, A.; Simon, A.
Conference Paper
2011Enabling mid-IR spectroscopic sensing: MEMS-based high-speed FT-IR compact spectrometers
Kenda, A.; Kraft, M.; Sandner, T.; Lüttjohann, S.; Simon, A.
Conference Paper
2011Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes
Tortschanoff, Andreas; Frank, A.; Wildenhain, Michael; Kenda, Andreas; Sandner, Thilo
Journal Article
2011Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners
Tortschanoff, A.; Frank, A.; Wildenhain, M.; Tetikol, H.S.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2011Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.
Conference Paper
2010Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages
Kenda, A.; Kraft, A.; Tortschanoff, A.; Wagner, C.; Lendl, B.; Sandner, T.; Schenk, H.
Conference Paper
2010MOEMS translatory actuator characterisation, position encoding and closed-loop control
Lenzhofer, M.; Tortschanoff, A.; Frank, A.; Sandner, T.; Schenk, H.; Kraft, M.; Kenda, A.
Journal Article
2010Optical position feedback and phase control of MOEMS-scanner mirrors
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2010Position encoding and phase control of resonant MOEMS-mirrors
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper, Journal Article
2010Position feedback and phase control of resonant MOEMS-mirrors with one and two axes
Tortschanoff, A.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2009Compact High-Speed Spectrometers Based on MEMS Devices with Large Amplitude In-Plane Actuators
Kenda, A.; Frank, A.; Kraft, M.; Tortschanoff, A.; Sandner, T.; Schenk, H.; Scherf, W.
Conference Paper
2009Improved MEMS based FT-IR spectrometer: Position encoding and closed loop control
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Kenda, A.; Sandner, T.; Schenk, H.
Conference Paper
2009Improved MOEMS based ultra rapid Fourier transform infrared spectrometer
Tortschanoff, A.; Kenda, A.; Kraft, M.; Sandner, T.; Schenk, H.; Scherf, W.
Conference Paper
2009MOEMS-Based Scanning Light Barrier
Kenda, A.; Frank, A.; Kraft, M.; Tortschanoff, A.; Sandner, T.; Schenk, H.; Scherf, W.
Conference Paper
2009Position encoding and closed loop control of MOEMS translatory actuators
Lenzhofer, M.; Tortschanoff, A.; Frank, A.; Sandner, T.; Schenk, H.; Kraft, M.; Kenda, A.
Conference Paper
2009Position encoding and phase control of resonant MOEMS-mirrors
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2008MEMS-based compact FT-Spectrometers-A platform for spectroscopic mid-infrared sensors
Kraft, M.; Kenda, A.; Sandner, T.; Schenk, H.
Conference Paper
2008Translatory MEMS actuators for optical path length modulation in miniaturized fourier-transform infrared spectrometers
Sandner, T.; Drabe, C.; Schenk, H.; Kenda, A.; Scherf, W.
Journal Article
2007Einsatz translatorischer MOEMS-Aktoren für FTIR-Spektrometer
Sandner, T.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2007Investigation and characterization of high-efficient NIR-scanning gratings used in NIR-micro-spectrometer
Zimmer, F.; Heberer, A.; Sandner, T.; Grüger, H.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2007Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator
Sandner, T.; Kenda, A.; Drabe, C.; Schenk, H.; Scherf, W.
Conference Paper
2006Application of a micromachined translatory actuator to an optical FTIR spectrometer
Kenda, A.; Drabe, C.; Schenk, H.; Frank, A.; Lenzhofer, M.; Scherf, W.
Conference Paper
2006Development of high-efficient NIR-scanning gratings for spectroscopic applications
Zimmer, F.; Sandner, T.; Grüger, H.; Heberer, A.; Wolter, A.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2006Single-detector micro-electro-mechanical scanning grating spectrometer
Kraft, M.; Kenda, A.; Frank, A.; Scherf, W.; Heberer, A.; Sandner, T.; Schenk, H.; Zimmer, F.
Journal Article
2005New MOEMS based systems appropriate for spectroscopic investigations on agricultural growth and perishable food conditions
Grüger, H.; Schenk, H.; Heberer, A.; Zimmer, F.; Scherff, W.; Kenda, A.; Frank, A.
Conference Paper
2005Optical MEMS for advanced spectrometers
Schenk, H.; Grüger, H.; Zimmer, F.; Scherf, W.; Kenda, A.
Conference Paper
2005Signal processing for a single detector MOEMS based NIR micro spectrometer
Heberer, A.; Grüger, H.; Zimmer, F.; Schenk, H.; Kenda, A.; Frank, A.; Scherf, W.
Conference Paper