Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1997Growth of Sn thin films on CdTe(111)
Zimmermann, H.; Keller, R.C.; Meisen, P.; Seelmann Eggebert, M.
Journal Article
1997Surface cleaning and etching of CdZnTe and CdTe in H2/Ar, CH4/H2/Ar, and CH4/H2/N2/Ar electron cyclotron resonance plasmas
Keller, R.C.; Zimmermann, H.; Seelmann Eggebert, M.; Richter, H.J.
Journal Article
1996Dry etching of Hg(1-x)Cd(x)Te using CH4/H2/Ar/N2 electron cyclotron resonance plasmas
Keller, R.C.; Seelmann Eggebert, M.; Richter, H.J.
Journal Article
1996The effect of CH4/H2 ECR plasma etching on the electrical properties of p-type Hg(1-x)Cd(x)Te
Baars, J.; Keller, R.C.; Richter, H.J.; Seelmann Eggebert, M.
Conference Paper
1996Interface formation between deposited Sn and Hg(0,8)Cd(0,2)Te
Zimmermann, H.; Keller, R.C.; Meisen, P.; Richter, H.J.; Seelmann-Eggebert, M.
Journal Article
1995Addition of N2 as a polymer deposition inhibitor in CH4/H2 electrocyclotron resonance plasma etching of Hg1-xCdxTe
Keller, R.C.; Seelmann-Eggebert, M.; Richter, H.J.
Journal Article