Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Glow discharge optical emission spectrometry for quantitative depth profiling of CIGS thin-films
Kodalle, T.; Greiner, D.; Brackmann, V.; Prietzel, K.; Scheu, A.; Bertram, T.; Reyes-Figueroa, P.; Unold, T.; Abou-Ras, D.; Schlatmann, R.; Kaufmann, C.A.; Hoffmann, V.
Journal Article
2016Characterisation of the barrier formation process of self-forming barriers with CuMn, CuTi and CuZr alloys
Franz, M.; Ecke, R.; Kaufmann, C.; Kriz, J.; Schulz, S.E.
Journal Article, Conference Paper
2015Investigation of barrier formation and stability of self-forming barriers with CuMn, CuTi and CuZr alloys
Franz, M.; Ecke, R.; Kaufmann, C.; Kriz, J.; Schulz, S.E.
Conference Paper
2014Flexible Cu(In,Ga)Se2 Thin Film Solar Cells for Space Applications - Recent Results from a German Joint Project (PIPV2)
Kaufmann, C.A.; Greiner, D.; Harndt, S.; Klenk, R.; Brunken, S.; Schlatmann, R.; Nichterwitz, M.; Schock, H.-W.; Unold, T.; Zajac, K.; Brunner, S.; Daume, F.; Scheit, C.; Braun, A.; Rahm, A.; Würz, R.; Kessler, F.; Günthner, M.; Pscherer, M.; Ihlow, S.; Motz, G.; Morgner, H.; Schmidt, R.G.; Lambrecht, A.; Grundmann, J.T.; Spietz, P.; Schülke, P.
Conference Paper
2014The history of micro mirror fabrication at the center of microtechnologies
Kaufmann, C.
Book Article
2014Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride - Technology and piezoelectric properties
Stoeckel, C.; Kaufmann, C.; Hahn, R.; Schulze, R.; Billep, D.; Gessner, T.
Journal Article
2013Analysis of metal-metal contacts in RF MEMS switches
Kurth, S.; Voigt, S.; Haas, S.; Bertz, A.; Kaufmann, C.; Gessner, T.; Akiba, A.; Ikeda, K.
Conference Paper
2013Highly Reliable and Low Voltage Actuated Ohmic RF MEMS Switch with Wafer Level Packaging
Kurth, S.; Nowack, M.; Voigt, S.; Bertz, A.; Froemel, J.; Kaufmann, C.; Gessner, T.; Akiba, A.; Ikeda, K.
Book Article
2013Precise determination of piezoelectric longitudinal charge coefficients for piezoelectric thin films assisted by finite element modeling
Stoeckel, C.; Kaufmann, C.; Schulze, R.; Billep, D.; Gessner, T.
Conference Paper
2013Wafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubes
Shaporin, A.; Hermann, S.; Kaufmann, C.; Schulz, S.E.; Gessner, T.; Voigt, S.; Mehner, J.; Hartmann, S.; Wunderle, B.; Bonitz, J.
Conference Paper
2011HF-MEMS Schalter mit ohmschen Kontakt und lateraler Bewegungsrichtung
Leidich, S.; Kurth, S.; Nowack, M.; Bertz, A.; Froemel, J.; Kaufmann, C.; Gessner, T.
Conference Paper
2011Reliability enhancement of Ohmic RF MEMS switches
Kurth, S.; Leidich, S.; Bertz, A.; Nowack, M.; Frömel, J.; Kaufmann, C.; Faust, W.; Gessner, T.; Akiba, A.; Ikeda, K.
Conference Paper
2010Image based test methodology for laser display scanners
Specht, H.; Kurth, S.; Billep, D.; Kaufmann, C.; Gessner, T.
Conference Paper
2010Micro/nano technologies towards smart systems integration
Gessner, T.; Vogel, M.; Kaufmann, C.; Hiller, K.; Kurth, S.; Nestler, J.; Otto, T.
Conference Paper
2010Technologie zur Integration von Kohlenstoffnanoröhren für Intertialsensoren
Bonitz, J.; Hermann, S.; Kaufmann, C.; Gessner, T.
Conference Paper
2009Deformation measurements of high-speed MEMS with combined two-wavelength single-pulse digital holography and single phase reconstruction using subpicosecond pulses
Hansel, T.; Grunwald, R.; Reimann, K.; Bonitz, J.; Kaufmann, C.; Griebner, U.
Journal Article
2009Performance and reliability test of MEMS optical scanners
Kurth, S.; Kaufmann, C.; Hahn, R.; Specht, H.; Gessner, T.
Journal Article
2009Synthesized femtosecond laser pulse source for two-wavelength contouring with simultaneously recorded digital holograms
Hansel, T.; Steinmeyer, G.; Grunwald, R.; Falldorf, C.; Bonitz, J.; Kaufmann, C.; Kebbel, V.; Griebner, U.
Journal Article
2008Laser Trimming of Micro Mirror Devices
Haenel, J.; Keiper, B.; Bleul, K.; Kaufmann, C.; Bonitz, J.
Journal Article
2008Reliability of MEMS devices in shock and vibration overload situations
Kurth, S.; Shaporin, A.; Hiller, K.; Kaufmann, C.; Gessner, T.
Conference Paper
2007Hochreflektiver mikromechanischer Scanner für Materialbearbeitung und medizinische Anwendungen
Bonitz, J.; Kaufmann, C.; Gessner, T.; Bundesmann, C.; Eichentopf, I.-M.; Maendl, S.; Neumann, H.
Conference Paper
2007Laser Trimming of MEMS
Bleul, K.; Bonitz, J.; Haenel, J.; Kaufmann, C.; Keiper, B.; Mehner, J.; Petsch, T.
Conference Paper
2007Laser-Display-System auf Basis von MEMS-Scannern
Specht, H.; Kurth, S.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.; Mehner, J.
Conference Paper
2007MEMS based laser display system
Specht, H.; Kurth, S.; Kaufmann, C.; Gessner, T.; Dötzel, W.
Conference Paper
2007Mikromechanische Schaltervorrichtung mit mechanischer Kraftverstärkung
Frömel, J.; Voigt, S.; Kurth, S.; Leidich, S.; Bertz, A.; Kaufmann, C.; Gessner, T.
Patent
2007Mikrospulen und RF-MEMS Varaktoren für die kernmagnetische Resonanzspektroskopie - Applikationen und Technologie
Leidich, S.; Hofmann, L.; Riemer, T.; Kurth, S.; Schubert, I.; Kaufmann, C.; Gessner, T.
Conference Paper
2007Performance and reliability test of MEMS optical scanners
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2007Roughness improvement of the COSi2/Si-interface for an application as buried silicide
Zimmermann, S.; Zhao, Q.T.; Höhnemann, H.; Wiemer, M.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper, Journal Article
2006Different approaches to integrate patterned buried CoSi2 layers in SOI substrates
Zimmermann, S.; Zhao, Q.T.; Höhnemann, H.; Wiemer, M.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper, Journal Article
2006MEMS based micro scanners: Components, technologies and applications
Geßner, T.; Bonitz, J.; Kaufmann, C.; Kurth, S.; Specht, H.
Conference Paper
2006MEMS Vakuumsensor nach dem Reibungsprinzip
Kurth, S.; Tenholte, D.; Hiller, K.; Kaufmann, C.; Gessner, T.; Dötzel, W.
Patent
2006Thermal stability of CoSi2 layers implemented in a silicon-on-insulator substrate
Zhao, Q.T.; Bay, H.L.; Zimmermann, S.; Wiemer, M.; Kaufmann, C.; Trui, B.; Höhnemann, H.; Dudek, V.; Mantl, S.
Journal Article
2005Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications
Zimmermann, S.; Zhao, Q.T.; Trui, B.; Wiemer, M.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper, Journal Article
2005Fabrication of SOI substrates with buried silicide layers for BiCMOS applications
Wiemer, M.; Zimmermann, S.; Zhao, Q.T.; Trui, B.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper
2005A novel 24-kHz resonant scanner for high-resolution laser display
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005Ein resonanter 24 kHz Scanner für hoch auflösende Laserdisplays
Kurth, S.; Kaufmann, C.; Hahn, R.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2004Electrostatic driven scanning micro mirrors applied in spectral sensing devices
Saupe, R.; Otto, T.; Mehner, J.; Kurth, S.; Kaufmann, C.; Geßner, T.
Journal Article
2004Infrared micro mirror spektrometer for gas analysis
Otto, T.; Saupe, R.; Kaufmann, C.; Geßner, T.
Conference Paper
2003Application of low temperature direct bonding in optical devices and integrated systems
Hiller, K.; Kurth, S.; Neumann, N.; Hahn, R.; Kaufmann, C.; Hanf, M.; Heinz, S.; Geßner, T.; Dötzel, W.; Ebest, G.
Conference Paper
2003Interconnect systems in automotive sensors at elevated temperatures
Gottfried, K.; Kaufmann, C.; Gessner, T.
Conference Paper
2001Application of high and low wafer bonding processes for bulk micromachined components
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Gessner, T.
Conference Paper
2000Deformation behavior of micro mirror arrays under optical power
Kurth, S.; Kehr, K.; Kaufmann, C.; Faust, W.; Dötzel, W.; Michel, B.
Conference Paper
2000Micromirrors and micromirror arrays for scanning applications
Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; Dötzel, W.
Conference Paper
2000A resonance method for the determination of Young's modulus and residual stress of thin microstructures
Mehner, J.; Kehr, K.; Schröter, B.; Kaufmann, C.; Dötzel, W.; Gessner, T.
Conference Paper
1999Analogously working micromirror arrays
Kehr, K.; Kurth, S.; Mehner, J.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.
Conference Paper
1999Anwendung von Niedertemperatur-Bondverfahren für die Herstellung von Microscanner-Arrays hoher Frequenz
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.
Conference Paper
1999Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
Hiller, K.; Wiemer, M.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Milekhin, A.; Friedrich, M.; Zahn, D.
Conference Paper
1999Low-temperature approaches for fabrication of high-frequency microscanners
Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Wiemer, M; Schubert, I.
Conference Paper
1999Synchronously working micromirrors for beam steering
Kurth, S.; Kehr, K.; Mehner, J.; Kaufmann, C.; Hahn, R.; Seidel, R.; Dötzel, W.; Gessner, T.
Conference Paper