Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn
Conference Paper
2007Contrast properties of spatial light modulators for microlithography
Heber, J.; Kunze, D.; Dürr, P.; Rudloff, D.; Wagner, M.; Björnängen, P.; Luberek, J.; Berzinsh, U.; Sandström, T.; Karlin, T.
Conference Paper
2005Mechanical stability of spatial light modulators in microlithography
Dauderstädt, U.; Dürr, P.; Ljungblad, U.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2004Application of spatial light modulators for microlithography
Dauderstädt, U.; Dürr, P.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Operation of spatial light modulators in DUV light
Dauderstädt, U.; Dürr, P.; Krellmann, M.; Karlin, T.; Berzinsh, U.; Leonardsson, L.; Wendrock, H.
Conference Paper