Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Optical characterisation of silver mirrors protected with transparent overcoats
Sytchkova, A.; Schwinde, S.; Protopapa, M.L.; Palmisano, M.; Piegari, A.; Schürmann, M.; Kaiser, N.
Conference Paper
2018Special issue on optical coatings
Kaiser, N.; Wang, Z.
Journal Article
2017High-reflective coatings for ground and space based applications
Schürmann, M.; Schwinde, S.; Jobst, P.J.; Stenzel, O.; Wilbrandt, S.; Szeghalmi, A.; Bingel, A.; Munzert, P.; Kaiser, N.
Conference Paper
2017Investigation of SiO2-Al2O3 nanolaminates for protection of silver reflectors
Schwinde, S.; Schürmann, M.; Kaiser, N.; Tünnermann, A.
Journal Article
2017Investigation of the refractive index repeatability for tantalum pentoxide coatings, prepared by physical vapor film deposition techniques
Stenzel, O.; Wilbrandt, S.; Wolf, J.; Schürmann, M.; Kaiser, N.; Ristau, D.; Ehlers, H.; Carstens, F.; Schippel, S.; Mechold, L.; Rauhut, R.; Kennedy, M.; Bischoff, M.; Nowitzki, T.; Zöller, A.; Hagedorn, H.; Reus, H.; Hegemann, T.; Starke, K.; Harhausen, J.; Foest, R.; Schumacher, J.
Journal Article
2017Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications
Müller, R.; Yulin, S.; Naujok, P.; Kaiser, N.; Tünnermann, A.
Journal Article
2017Spiegel zur Reflexion von EUV-Strahlung in Strahlung im Spektralbereich zwischen 6 nm und 10 nm und optische Anordnung mit dem Spiegel
Naujok, Philipp; Yulin, Sergiy; Kaiser, Norbert; Wezyk, Alexander von; Bergmann, Klaus
Patent
2017Spiegel zur Reflexion von EUV-Strahlung mit Spannungskompensation und Verfahren zu dessen Herstellung
Kaiser, Norbert; Murray, Kevin; Naujok, Philipp; Yulin, Sergiy
Patent
2017Thermal stability of B-based multilayer mirrors for next generation lithography
Naujok, P.; Murray, K.; Yulin, S.; Patzig, C.; Kaiser, N.; Tünnermann, A.
Journal Article
2016AZO/Ag/AZO transparent conductive films: Correlation between the structural, electrical, and optical properties and development of an optical model
Bingel, A.; Stenzel, O.; Naujok, P.; Müller, R.; Shestaeva, S.; Steglich, M.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Journal Article
2016Influence of the ZnO:Al dispersion on the performance of ZnO:Al/Ag/ZnO:Al transparent electrodes
Bingel, A.; Steglich, M.; Naujok, P.; Müller, R.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Journal Article
2016Infrared optical constants determination by advanced FTIR techniques
Wilbrandt, S.; Franke, C.; Todorova, V.; Stenzel, O.; Kaiser, N.
Conference Paper
2016Interface characterization in B-based multilayer mirrors for next generation lithography
Naujok, P.; Yulin, S.; Müller, R.; Kaiser, N.; Tünnermann, A.
Journal Article
2016Investigation of SiO2-Al2O3-nanolaminates for protection of silver reflectors
Schwinde, S.; Schürmann, M.; Kaiser, N.; Tünnermann, A.
Conference Paper
2016Investigation of the refractive index reproducibility for tantalum pentoxide coatings, prepared by PVD techniques
Stenzel, O.; Wilbrandt, S.; Schürmann, M.; Kaiser, N.; Wolf, J.; Ristau, D.; Ehlers, H.; Carstens, F.; Schippel, S.; Mechold, L.; Rauhut, R.; Kennedy, M.; Bischoff, M.; Nowitzki, T.; Zöller, A.; Hagedorn, H.; Reus, H.; Hegemann, T.; Starke, K.; Harhausen, J.; Foest, R.; Schumacher, J.
Conference Paper
2016Investigation of vacuum deposited hybrid coatings of protic organic UV absorbers embedded in a silica matrix used for the UV protection of Polycarbonate glazing
Weber, C.; Schulz, U.; Mühlig, C.; Kaiser, N.; Tünnermann, A.
Journal Article
2016Neue optische Oberflächen
Kaiser, Norbert
Journal Article
2016Optische Konstanten von Substraten im NIR/MIR-Spektralbereich: Bestimmung mittels Fourier-Transform-Infrarot-(FTIR-)Spektrometrie
Franke, C.; Stenzel, O.; Wilbrandt, S.; Schürmann, M.; Wolf, J.; Todorova, V.; Doherty, B.; Kaiser, N.
Journal Article
2016Pretreatment of PC as a condition for homogeneous etching of AR-nanostructures
Schulz, U.; Munzert, P.; Reinhard, S.; Rickelt, F.; Knopf, H.; Weber, C.; Kaiser, N.
Conference Paper
2016Vakuumbeschichtungen - Urknall der optischen Technologien
Kaiser, N.
Journal Article
2016Verfahren zur Herstellung eines Reflektorelements und Reflektorelement
Schürmann, Mark; Schwinde, Stefan; Müller, Robert; Kaiser, Norbert
Patent
2015Advanced coatings for next generation lithography
Naujok, Philipp; Yulin, Sergiy A.; Kaiser, Norbert; Tünnermann, Andreas
Conference Paper
2015Anorganisch-organische Hybridschichten für die Entspiegelung optischer Oberflächen
Schulz, Ulrike; Munzert, Peter; Rickelt, Friedrich; Präfke, Christiane; Gratzke, Nancy; Knopf, Heiko; Wolleb, Sabrina; Kaiser, Norbert
Journal Article
2015Broadband antireflection coatings for optical lenses with extreme curvature
Schulz, U.; Rickelt, F.; Munzert, P.; Kaiser, N.
Conference Paper
2015Description of particle induced damage on protected silver coatings
Schwinde, Stefan; Schürmann, Mark; Jobst, Paul Johannes; Kaiser, Norbert; Tünnermann, Andreas
Journal Article
2015Estimation of the composition of coelectron-beam-evaporated thin-mixture films by making use of the Wiener bounds
Franke, Christian; Stenzel, Olaf; Wilbrandt, S.; Wolf, Josephine; Kaiser, Norbert; Tünnermann, A.
Journal Article
2015Gradient index antireflection coatings on glass containing plasma-etched organic layers
Schulz, Ulrike; Rickelt, Friedrich; Ludwig, Henning; Munzert, Peter; Kaiser, Norbert
Journal Article
2015Investigation on the reproducibility of optical constants of TiO2, SiO2, and Al2O3 films, prepared by plasma ion assisted deposition
Stenzel, O.; Harhausen, J.; Gäbler, D.; Wilbrandt, S.; Franke, C.; Foest, R.; Kaiser, N.
Journal Article
2015La/B4C multilayer mirrors with an additional wavelength suppression
Naujok, Philipp; Yulin, Sergiy; Bianco, Anna; Mahne, Nicola; Kaiser, Norbert; Tünnermann, Andreas
Journal Article
2015Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications
Schürmann, Mark; Risse, Stefan; Kämmer, H; Franke, Christian; Schlegel, Ralph; Müller, Sandra; Damm, Christoph; Steinkopf, Ralf; Dreisow, F.; Nolte, Stefan; Eberhardt, Ramona; Kaiser, Norbert
Conference Paper
2015Optical characterization of high index metal oxide films for UV/VIS applications, prepared by Plasma Ion Assisted Deposition
Stenzel, O.; Wilbrandt, S.; Kaiser, N.
Conference Paper
2015Optical systems design: Advances in optical thin films
Kaiser, N.
Journal Article
2015Optisches Element mit einer reflektierenden Beschichtung
Schürmann, Mark; Schwinde, Stefan; Kaiser, Norbert
Patent
2015Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
Pfeiffer, K.; Shestaeva, S.; Bingel, A.; Munzert, P.; Schulz, U.; Kaiser, N.; Tünnermann, A.; Szeghalmi, A.
Conference Paper
2015Plasma-ionengestütztes Beschichtungverfahren und Plasmasonde
Gäbler, Dieter; Kaiser, Norbert; Ohl, Andreas; Köpp, Daniel; Foest, Rüdiger; Harhausen, Jens
Patent
2015Preface to the special issue of selected papers from Frontiers of Optical Coatings 2014
Kaiser, Norbert; MacLeod, Hugh Angus; Liu, Xü,; Wang, Zhanshan
Conference Paper, Journal Article
2015Preparation and characterization of aluminum oxide/aluminum fluoride mixture coatings for applications in the deep ultraviolet spectral range
Franke, C.; Stenzel, O.; Wilbrandt, S.; Kaiser, N.; Tünnermann, A.
Conference Paper
2015Protected and enhanced silver for mirrors: Damage mechanisms and how to prevent them
Schwinde, S.; Schürmann, M.; Kaiser, N.; Tünnermann, A.
Conference Paper
2015UV-verstärkte Silberschichten
Schwinde, Stefan; Schürmann, Mark; Kaiser, Norbert
Journal Article
2015Verfahren zur Herstellung einer Entspiegelungssschicht auf einer Silikonoberfläche und optisches Element
Schulz, Ulrike; Rickelt, Friedrich; Munzert, Peter; Kaiser, Norbert
Patent
2014Antireflection coating for sapphire with consideration of mechanical properties
Gödeker, Christoph; Schulz, Ulrike; Kaiser, Norbert; Tünnermann, Andreas
Journal Article, Conference Paper
2014Breakthroughs in photonics 2013: Organic nanostructures for antireflection
Schulz, Ulrike; Munzert, Peter; Rickelt, Friedrich; Kaiser, Norbert
Journal Article
2014Breitbandige Entspiegelung optischer Oberflächen mittels doppelter Nanostrukturen
Schulz, Ulrike; Niemann, Anke; Kaiser, Norbert
Journal Article
2014A double nanostructure for wide-angle antireflection on optical polymers
Schulz, Ulrike; Rickelt, Friedrich; Munzert, Peter; Kaiser, Norbert
Journal Article
2014Ex situ characterization of optical coatings by means of spectrophotometry
Wilbrandt, Steffen; Stenzel, Olaf; Kaiser, Norbert
Conference Paper
2014Optical properties of unprotected and protected sputtered silver films: Surface morphology versus UV/VIS reflectance
Jobst, Paul Johannes; Stenzel, Olaf; Modsching, N.; Yulin, Sergiy; Wilbrandt, Steffen; Schürmann, Mark; Gäbler, Dieter; Kaiser, Norbert; Tünnerman, Andreas
Journal Article
2014Optical properties of UV-transparent aluminum oxide / aluminum fluoride mixture films, prepared by plasma-ion assisted evaporation and ion beam sputtering
Stenzel, Olaf; Wilbrandt, Steffen; Du, Shan; Franke, Christian; Kaiser, Norbert; Tünnermann, Andreas; Mende, Mathias; Ehlers, Henrik; Held, Mario
Journal Article
2014Protected and enhanced aluminum mirrors for the VUV
Wilbrandt, Steffen; Stenzel, Olaf; Nakamura, Hiroshi; Wulff-Molder, Dirk; Duparré, Angela; Kaiser, Norbert
Journal Article
2014Verfahren zur Herstellung einer Entspiegelungsschicht
Schulz, Ulrike; Munzert, Peter; Rickelt, Friedrich; Kaiser, Norbert
Patent
2014Verfahren zur Herstellung einer Entspiegelungsschicht auf einem Substrat und Substrat mit einer Entspiegelungsschicht
Schulz, Ulrike; Ludwig, Henning; Kaiser, Norbert; Munzert, Peter
Patent
2014ZnO:Al films prepared by inline DC magnetron sputtering
Bingel, Astrid; Füchsel, Kevin; Kaiser, Norbert; Tünnermann, Andreas
Journal Article
2013Effective optical constants of evaporated silver and copper island ultrathin films
Stenzel, Olaf; Wilbrandt, Steffen; Kaiser, Norbert
Conference Paper
2013Hybrid antireflective coating with plasma-etched nanostructure
Schulz, Ulrike; Munzert, Peter; Rickelt, Friedrich; Kaiser, Norbert
Journal Article, Conference Paper
2013Investigations on nanostructuring of polycarbonate for anti-reflection purposes
Munzert, Peter; Präfke, Christiane; Schulz, Ulrike; Kaiser, Norbert
Conference Paper
2013Lifetime and refurbishment of multilayer LPP collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Kaiser, Norbert; Tünnerman, Andreas; Böwering, Nobert R.; Ershov, Alex I.; Dea, Silvia de; Hoffmann, Kay; Fontaine, Bruno la; Fomenkov, Igor V.; Brandt, David
Conference Paper
2013Multilayer-Spiegel für den EUV-Spektralbereich
Yulin, Sergiy; Nesterenko, Viatcheslav; Kaiser, Norbert
Patent
2013Optische in-situ Prozessverfolgung und -steuerung: Messung des Transmissions- und Reflexionsvermögens wachsender Schichten
Gäbler, Johannes; Stenzel, Olaf; Wilbrandt, Steffen; Kaiser, Norbert
Journal Article
2013Plasmaätzen organischer Schichten für die Entspiegelung optischer Oberflächen
Schulz, Ulrike; Präfke, Christiane; Munzert, Peter; Ludwig, Henning; Rickelt, Friedrich; Kaiser, Norbert
Journal Article
2013Practical optimization of a coating deposition process by application of hybrid monitoring strategies in an industrial production environment
Held, Mario; Wilbrandt, Steffen; Stenzel, Olaf; Kaiser, Norbert; Tünnermann, Andreas
Journal Article
2013Preparation and properties of high refractive index tantalum pentoxide coatings deposited by plasma ion assisted deposition with xenon or argon assistance
Stenzel, Olaf; Wilbrandt, Steffen; Schlegel, Ralph; Böhme, Matthias; Kaiser, Norbert
Journal Article
2013Preparation of UV-VIS high index coating materials with PIAD using xenon as working gas
Wilbrandt, Steffen; Stenzel, Olaf; Schlegel, Ralph; Kaiser, Norbert
Conference Paper
2013Protected and enhanced aluminum mirrors for the VUV
Wilbrandt, Steffen; Stenzel, Olaf; Nakamura, Hiroshi; Kaiser, Norbert
Conference Paper
2013Pulsed DC magnetron sputtering of transparent conductive oxide layers
Bingel, Astrid; Füchsel, Kevin; Kaiser, Norbert; Tünnermann, Andreas
Journal Article
2013Spektralfotometrische Messungen bei 60° Einfallswinkel
Wilbrandt, S.; Böhme, M.; Stenzel, O.; Schlegel, R.; Kaiser, N.
Journal Article
2013Ultraviolet/visible and Fourier transform infrared spectroscopic investigations of organic-inorganic hybrid layers for UV protection
Präfke, Christiane; Schulz, Ulrike; Kaiser, Norbert; Tünnermann, Andreas
Journal Article, Conference Paper
2013Verfahren zur Bestimmung der Feuchtedurchlässigkeit einer Beschichtung
Schulz, Ulrike; Kaiser, Norbert
Patent
2012Adhesion of vacuum deposited optical coatings on PMMA and polycarbonate
Munzert, Peter; Präfke, Christiane; Schulz, Ulrike; Kaiser, Norbert
Journal Article
2012Aluminiumbasierte Reflektoren für das DUV und VUV
Wilbrandt, Steffen; Stenzel, Olaf; Heiße, Hanno; Kaiser, Norbert
Journal Article
2012Antireflective nanostructures for low-index substrates
Schulz, Ulrike; Munzert, Peter; Kaiser, Norbert
Conference Paper
2012Black silicon photovoltaics
Füchsel, K.; Kroll, M.; Käsebier, T.; Otto, M.; Pertsch, T.; Kley, E.-B.; Wehrspohn, R.B.; Kaiser, N.; Tünnermann, A.
Conference Paper
2012Dielektrisch verstärkte Aluminiumspiegel für VUV-Anwendungen
Wilbrandt, Steffen; Stenzel, Olaf; Heiße, Hanno; Kaiser, Norbert
Conference Paper
2012Entspiegelung von Glas durch Kombination von Interferenzschichten mit plasma-geätzten Nanostrukturen
Schulz, Ulrike; Munzert, Peter; Präfke, Christiane; Rickelt, Friedrich; Kaiser, Norbert
Conference Paper
2012Green Photonics auf der OPTATEC 2012
Frank, D.W.; Kaiser, N.
Journal Article
2012Herstellung und Charakterisierung nanostrukturierter ITO-Elektroden
Pulsack, Julian; Füchsel, Kevin; Kaiser, Norbert
Conference Paper
2012Manufacture and characterization of optical coatings with incorporated copper island films
Held, Mario; Stenzel, Olaf; Wilbrandt, Steffen; Kaiser, Norbert; Tünnermann, Andreas
Journal Article
2012Nanostrukturen zur Verbesserung der Lackhaftung auf Kunststoffoberflächen
Munzert, Peter; Präfke, Christiane; Schulz, Ulrike; Kaiser, Norbert
Conference Paper
2012Nanostrukturierte Grenzflächen und dünne Schichten für die Photovoltaik
Füchsel, Kevin; Bingel, Astrid; Blumröder, Ulrike; Schulz, Ulrike; Kaiser, Norbert
Conference Paper
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Optical reflector coatings for astronomical applications from EUV to IR
Schürmann, Mark; Jobst, Paul Johannes; Yulin, Sergiy; Feigl, Torsten; Heiße, Hanno; Wilbrandt, Steffen; Stenzel, Olaf; Gebhardt, Andreas; Risse, Stefan; Kaiser, Norbert
Conference Paper
2012Organische UV-Schutzschichten für die Polycarbonatverglasung
Präfke, Christiane; Schulz, Ulrike; Kaiser, Norbert
Journal Article
2012Plasmaionenquelle für eine Vakuumbeschichtungsanlage
Gäbler, D.; Ohl, A.; Schulz, U.; Kaiser, N.; Steffen, H.
Patent
2012Polierbare Siliziumschichten zur Herstellung ultra-präziser optischer Komponenten
Jobst, Paul Johannes; Schürmann, Mark; Gebhardt, Andreas; Risse, Stefan; Kaiser, Norbert
Conference Paper
2012Preparation and characterization of organic layers for UV protection of polycarbonate
Präfke, C.; Schulz, U.; Kaiser, N.
Journal Article, Conference Paper
2012Simulation der Abscheidung von dielektrischen Schichtsystemen auf große optische Bauteile
Franke, Christian; Schürmann, Mark; Wilbrandt, Steffen; Kaiser, Norbert
Conference Paper
2012Strukturierbare reflexionsgeminderte Chromschichten
Schürmann, Mark; Jobst, Paul-Johannes; Kaiser, Norbert; Luck, Frank-Ulrich; Beier, Bernd; Thaut, Michael
Journal Article
2012Tailoring optical and non-optical properties of interference coating materials through the explicit use of small-scale optical inhomogeneities
Stenzel, Olaf; Schulz, Ulrike; Kaiser, Norbert
Journal Article
2012UV/VIS and FTIR spectroscopic investigations of organic-inorganic hybrid layers for UV protection
Präfke, Christiane; Schulz, Ulrike; Kaiser, Norbert; Tünnermann, Andreas
Conference Paper
2012V2011 Workshop "Beschichtungen für den optischen Gerätebau"
Kaiser, Norbert
Journal Article
2011Absolutmessungen von gerichteter Transmission und Reflexion an Festkörperproben in der GPOB unter Nutzung von VN-Einsätzen und Anwendung auf die optische Charakterisierung dünner Festkörperschichten
Stenzel, O.; Wilbrandt, S.; Kaiser, N.
Conference Paper
2011Antireflective coatings for optical lenses based on plasma-etched melamine
Schulz, U.; Mändl, H.; Nottebohm, R.; Gödeker, C.; Kaiser, N.
Conference Paper
2011Beschichtung großer Substrate für die Präzisionsoptik
Schürmann, M.; Jobst, P.-J.; Müller, T.; Scheler, M.; Kaiser, N.
Journal Article
2011Coatings on transparent plastics for automotive applications
Schulz, U.; Munzert, P.; Präfke, C.; Kaiser, N.
Conference Paper
2011Combined in situ and ex situ optical data analysis of magnesium fluoride coatings deposited by plasma ion assisted deposition
Wilbrandt, S.; Stenzel, O.; Bischoff, M.; Kaiser, N.
Journal Article
2011Combined in-situ and ex-situ optical analysis of fluoride coatings deposited by PIAD
Wilbrandt, S.; Stenzel, O.; Kaiser, N.
Conference Paper
2011Formation of antireflective nanostructures on melamine and N,N´-di (1-naphthyl)-N,N´-diphenyl benzidine (NPB)
Schulz, U.; Präfke, C.; Munzert, P.; Gödeker, C.; Kaiser, N.
Journal Article
2011Improved scratch resistance for antireflective coatings on sapphire
Gödeker, C.; Schulz, U.; Kaiser, N.
Journal Article
2011Mixed oxide coatings for optics
Stenzel, O.; Wilbrandt, S.; Schürmann, M.; Kaiser, N.; Ehlers, H.; Mende, M.; Ristau, D.; Bruns, S.; Vergöhl, M.; Stolze, M.; Held, M.; Niederwald, H.; Koch, T.; Riggers, W.; Burdack, P.; Mark, G.; Schäfer, R.; Mewes, S.; Bischoff, M.; Arntzen, M.; Eisenkrämer, F.; Lappschies, M.; Jakobs, S.; Koch, S.; Baumgarten, B.; Tünnermann, A.
Journal Article
2011Nanostructure effects and the performance of optical interference coatings
Stenzel, O.; Schulz, U.; Kaiser, N.
Conference Paper
2011Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques
Stenzel, O.; Schürmann, M.; Wilbrandt, S.; Kaiser, N.; Tünnermann, A.; Mende, M.; Ehlers, H.; Ristau, D.; Bruns, S.; Vergöhl, M.; Riggers, W.; Bischoff, M.; Held, M.
Conference Paper
2011Optische Schichten als Innovationstreiber
Kaiser, N.
Journal Article
2011Organic small molecule-based optical coatings
Schulz, U.; Präfke, C.; Munzert, P.; Kaiser, N.
Conference Paper
2011Plasma and optical thin film technologies
Stenzel, O.; Wilbrandt, S.; Kaiser, N.; Schmitz, C.; Turowski, M.; Ristau, D.; Awakowicz, P.; Brinkmann, R.P.; Musch, T.; Rolfes, I.; Steffen, H.; Foest, R.; Ohl, A.; Köhler, T.; Dolgonos, G.; Frauenheim, T.
Conference Paper
2011Plasma ion assisted deposition of aluminium oxide and aluminium oxifluoride layers for applications in the ultraviolet spectral range
Stenzel, O.; Gäbler, D.; Wilbrandt, S.; Kaiser, N.; Steffen, H.; Ohl, A.
Journal Article
2011Plasma ion assisted deposition of hafnium dioxide using argon and xenon as process gases
Stenzel, O.; Wilbrandt, S.; Yulin, S.; Kaiser, N.; Held, M.; Tünnermann, A.; Biskupek, J.; Kaiser, U.
Journal Article
2011Plasma-assisted deposition of metal fluoride coatings and modeling the extinction coefficient of as-deposited single layers
Bischoff, M.; Stenzel, O.; Friedrich, K.; Wilbrandt, S.; Gäbler, D.; Mewes, S.; Kaiser, N.
Journal Article
2011Plasma-etched organic layers for antireflection purposes
Schulz, U.; Präfke, C.; Gödeker, C.; Kaiser, N.; Tünnermann, A.
Journal Article
2011Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS
Schürmann, M.; Yulin, S.; Nesterenko, V.; Feigl, T.; Kaiser, N.; Tkachenko, B.; Schürmann, M.C.
Conference Paper
2011Tailored TCOs
Bingel, A.; Füchsel, K.; Kaiser, N.; Tünnermann, A.
Conference Paper
2011Thin film growth on nanostructured polymer webs for anti-reflection purposes
Munzert, P.; Schulz, U.; Kaiser, N.; Schönberger, W.; Fahland, M.
Journal Article, Conference Paper
2011Transparent conductive oxides for nano-SIS solar cells
Füchsel, K.; Bingel, A.; Kaiser, N.; Tünnermann, A.
Conference Paper
2011Ultra-precise optical mirrors with thick amorphous silicon layer
Risse, S.; Gebhardt, A.; Kolbmüller, A.; Steinkopf, R.; Schürmann, M.; Jobst, J.; Kaiser, N.; Eberhardt, R.
Conference Paper
2011Vacuum-deposited UV-protective coatings for bisphenol A polycarbonate
Präfke, C.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Conference Paper
2010All-oxide broadband antireflection coatings by plasma ion assisted deposition: Design, simulation, manufacturing and re-optimization
Wilbrandt, S.; Stenzel, O.; Kaiser, N.
Journal Article
2010Antireflective coating with nanostructured organic top-layer
Schulz, U.; Kaiser, N.
Conference Paper
2010Antireflexschichtsystem und Verfahren zu dessen Herstellung
Schulz, U.; Präfke, C.; Kaiser, N.
Patent
2010Beschichtungen für die EUV-Lithografie
Feigl, T.; Perske, M.; Pauer, H.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Schröder, S.; Trost, M.; Duparré, A.; Kaiser, N.
Conference Paper
2010Combined in-situ and ex-situ optical analysis of fluoride coatings deposited by PIAD
Wilbrandt, S.; Stenzel, O.; Kaiser, N.
Conference Paper
2010Computational manufacturing of optical interference coatings: Method, simulation results, and comparison with experiment
Friedrich, K.; Wilbrandt, S.; Stenzel, O.; Kaiser, N.; Hoffmann, K.H.
Journal Article
2010Hochstabile Antireflexschichten auf Saphir
Gödeker, C.; Schulz, U.; Kaiser, N.
Conference Paper
2010Improved resistance for antireflective coatings on sapphire
Gödecker, C.; Schulz, U.; Kaiser, N.
Conference Paper
2010A journey from ancient China bronze mirrors to picometer shaped interference coatings
Kaiser, N.; Bischoff, M.; Feigl, T.; Schulz, U.; Yulin, S.
Journal Article
2010Kollektorbeschichtungen für die EUV-Lithographie
Perske, M.; Pauer, H.; Yulin, S.; Trost, M.; Schröder, S.; Duparre, A.; Feigl, T.; Kaiser, N.
Journal Article
2010Laterally graded Mo/Si multilayer for a 5 steradian EUV collector
Perske, M.; Pauer, H.; Yulin, S.; Nesterenko, V.; Schürmann, M.; Feigl, T.; Kaiser, N.
Conference Paper
2010Multi-technique study of carbon contamination and cleaning of Mo/Si multilayer optics exposed to pulsed EUV radiation
Schürmann, M.; Yulin, S.; Nesterenko, V.; Feigl, T.; Kaiser, N.; Tkachenko, B.; Schürmann, M.C.
Conference Paper
2010Nanoscale coatings
Kaiser, N.; Bischoff, M.; Feigl, T.; Schulz, U.; Stenzel, O.
Conference Paper
2010Nanostructured SIS solar cells
Füchsel, K.; Schulz, U.; Kaiser, N.; Käsebier, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2010Optical properties of evaporated organic thin films
Schulz, U.; Präfke, C.; Holz, M.; Kaiser, N.
Conference Paper
2010Optimierte Präparationsstrategien breitbandiger oxidischer AR-Systeme
Wilbrandt, S.; Stenzel, O.; Kaiser, N.
Conference Paper
2010Organic layer for UV protection of polycarbonate
Präfke, C.; Schulz, U.; Kaiser, N.
Conference Paper
2010Organische Schichten für den UV-Schutz von Polycarbonat
Präfke, C.; Schulz, U.; Kaiser, N.
Conference Paper
2010Oxidische Mischschichten für UV-Anwendungen
Stenzel, O.; Wilbrandt, S.; Schürmann, M.; Kaiser, N.
Conference Paper
2010Plasma assisted deposition of metal fluoride coatings
Bischoff, M.; Gäbler, D.; Kaiser, N.
Conference Paper
2010Plasma assisted deposition of metal fluoride coatings
Bischoff, M.; Gäbler, D.; Kaiser, N.
Conference Paper
2010Plasma processes for modifying the optical properties of polymers
Schulz, U.; Munzert, P.; Bollwahn, N.; Kaiser, N.
Journal Article
2010Plasma surface modification of PMMA for optical applications
Schulz, U.; Munzert, P.; Kaiser, N.
Journal Article
2010Plasma und Optische Technologien (PluTO)
Kaiser, N.; Awakowicz, P.; Brinkmann, R.; Frauenheim, T.; Musch, T.; Ohl, A.; Ristau, D.; Rolfes, I.; Stenzel, O.
Abstract
2010Scattering of roughened TCO films - Modeling and measurement
Schröder, S.; Duparre, A.; Füchsel, K.; Kaiser, N.; Harvey, J.E.; Tünnermann, A.
Conference Paper
2010Tailored nanocomposite coatings for optics
Stenzel, O.; Wilbrandt, S.; Schürmann, M.; Kaiser, N.
Conference Paper
2010Transparent leitfähige Schichten für SIS Solarzellen
Füchsel, K.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Conference Paper
2010Ultra-precise optical components with machinable silicon layer
Schürmann, M.; Jobst, P.-J.; Kaiser, N.; Kolbmüller, A.; Müller, S.; Gebhardt, A.; Risse, S.; Eberhardt, R.
Conference Paper
2010Ultrapräzise optische Komponenten mit bearbeitbarer Siliziumschicht
Schürmann, M.; Jobst, P.-J.; Kaiser, N.; Kolbmüller, A.; Müller, S.; Gebhardt, A.; Risse, S.; Eberhardt, R.
Conference Paper
2010Urknall der optischen Technologien vor 70 Jahren!
Kaiser, N.
Journal Article
2010UV-absorbierendes Schichtsystem und Verfahren zu dessen Herstellung
Schulz, U.; Präfke, C.; Kaiser, N.
Patent
2009The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity
Stenzel, O.; Wilbrandt, S.; Kaiser, N.; Vinnichenko, M.; Munnik, F.; Kolitsch, A.; Chuvilin, A.; Kaiser, U.; Ebert, J.; Jakobs, S.; Kaless, A.; Wuethrich, S.; Treichel, O.; Wunderlich, B.; Bitzer, M.; Grössl, M.
Journal Article
2009Creating anti-reflective nanostructures on polymers by initial layer deposition before plasma etching
Wendling, I.; Munzert, P.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Journal Article, Conference Paper
2009Hocheffektive Entspiegelung von Kunststoffoptiken durch Plasmaätzen
Munzert, P.; Schulz, U.; Kaiser, N.
Conference Paper
2009Long term tests of resonator optics in ArF excimer lasers
Beermann, N.; Blaschke, H.; Ehlers, H.; Ristau, D.; Wulff-Molder, D.; Jukresch, S.; Matern, A.; Bischoff, M.; Gäbler, D.; Kaiser, N.
Conference Paper
2009Onset of the optical damage in CaF2 optics caused by deep-UV lasers
Bauer, M.; Bischoff, M.; Hülsenbusch, T.; Matern, A.; Stark, R.W.; Kaiser, N.
Journal Article
2009Realistische Modellierung der NIR/VIS/UV- optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells
Stenzel, O.; Wilbrandt, S.; Friedrich, K.; Kaiser, N.
Journal Article
2009Steuerung der Benetzungseigenschaften von transparenten Polymeren durch Antireflexstrukturen und dünne Schichten
Schulz, U.; Kaiser, N.
Journal Article
2009Verfahren zur Messung der optischen Eigenschaften einer bewegten Probe in einer Beschichtungsanlage
Wilbrandt, S.; Stenzel, O.; Kaiser, N.
Patent
2008All-optical in-situ analysis of PIAD deposition processes
Wilbrandt, S.; Stenzel, O.; Kaiser, N.
Conference Paper
2008Altes und Neues über Dünnschicht Stahlteiler
Schürmann, M.; Kaiser, N.
Journal Article
2008Antireflection coating with UV-protective properties for polycarbonate
Schulz, U.; Lau, K.; Kaiser, N.
Journal Article
2008Anwendungsaspekte des Plasmas in den Optischen Technologien
Kaiser, N.; Weltmann, K.D.; Oehr, C.
Journal Article
2008Atomic layer deposition process with TiF4 as a precursor for depositing metal fluoride thin films
Pilvi, T.; Ritala, M.; Leskelä, M.; Bischoff, M.; Kaiser, U.; Kaiser, N.
Journal Article
2008Die Bedeutung dünner Schichten für die optischen Technologien
Kaiser, N.
Journal Article
2008Coating technologies
Kaiser, N.
Book Article
2008Core-collapse supernovae in low-metallicity environments and future all-sky transient surveys
Young, D.R.; Smartt, S.J.; Mattila, S.; Tanvir, N.R.; Bersier, D.; Chambers, K.C.; Kaiser, N.; Tonry, J.L.
Journal Article
2008Development of a hybrid monitoring strategy to the deposition of chirped mirrors by plasma-ion assisted electron evaporation
Stenzel, O.; Wilbrandt, S.; Kaiser, N.; Fasold, D.
Conference Paper
2008Effect of anomalous transmittance in EUV multilayer optics
Kozhevnikov, I.; Yulin, S.; Feigl, T.; Kaiser, N.
Journal Article
2008Enhanced reflectivity and stability of high-temperature LPP collector mirrors
Feigl, T.; Yulin, S.; Perske, M.; Pauer, H.; Schürmann, M.; Kaiser, N.; Böwering, N.R.; Khodykin, O.V.; Fomenkov, I.V.; Brandt, D.C.
Conference Paper
2008Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A.
Journal Article
2008High glucose-induced antiangiogenic environment impairs beta cells and microcapillary endothelial cells interactions
Cohen, G.; Kaiser, N.; Sasson, S.
Journal Article
2008High-performance EUV multilayer optics
Kaiser, N.; Yulin, S.; Perske, M.; Feigl, T.
Conference Paper
2008Hochreflektierende EUV/Röntgen-Mehrschichtspiegel
Yulin, S.; Feigl, T.; Benoit, N.; Perske, M.; Taracheva, E.; Schröder, S.; Nesterenko, V.; Kaiser, N.
Journal Article
2008A hybrid in situ monitoring strategy for optical coating deposition: Application to the preparation of chirped dielectric mirrors
Stenzel, O.; Wilbrandt, S.; Fasold, D.; Kaiser, N.
Journal Article
2008In situ optical characterization and reengineering of interference coatings
Wilbrandt, S.; Stenzel, O.; Kaiser, N.; Trubetskov, M.K.; Tikhonravov, A.V.
Journal Article
2008Insertion of an EYFP-pp71 (UL82) coding sequence into the human cytomegalovirus genome results in a recombinant virus with enhanced viral growth
Tavalai, N.; Kraiger, M.; Kaiser, N.; Stramminger, T.
Journal Article
2008Investigation in the degradation of CaF2 outcouplers in excimer lasers operating at 193 nm
Blaschke, H.; Beermann, N.; Ehlers, H.; Ristau, D.; Bischoff, M.; Gäbler, D.; Kaiser, N.; Matern, A.; Wulff-Molder, D.
Conference Paper
2008Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation
Füchsel, K.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Journal Article
2008Metal fluoride coatings prepared by ion-assisted deposition
Bischoff, M.; Sode, M.; Gäbler, D.; Bernitzki, H.; Zaczek, C.; Kaiser, N.; Tünnermann, A.
Conference Paper
2008Metal layer beamsplitters with one dielectric achromatisation layer
Schürmann, M.; Stöckl, W.; Kaiser, N.
Conference Paper
2008Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.; Fang, M.; Chandhok, M.
Conference Paper
2008Multifunktionale optische Polymeroberflächen durch Anwendung von Plasmatechnologien
Schulz, U.; Kaiser, N.
Book Article
2008New plasma processes for antireflective structures on plastics
Schulz, U.; Munzert, P.; Leitel, R.; Bollwahn, N.; Wendling, I.; Kaiser, N.; Tünnermann, A.
Conference Paper
2008Novel TMA telescope based on ultra precise metal mirrors
Risse, S.; Gebhardt, A.; Damm, C.; Peschel, T.; Stöckl, W.; Feigl, T.; Kirschstein, S.; Eberhardt, R.; Kaiser, N.; Tünnermann, A.
Conference Paper
2008Old rules useful to the designer of optical coatings
Kaiser, N.
Journal Article
2008Optical and structural properties of LaF3 thin films
Bischoff, M.; Gäbler, D.; Kaiser, N.; Chuvilin, A.; Kaiser, U.; Tünnermann, A.
Journal Article
2008Optical Society of America's 2007 Topical Meeting on Optical Interference Coatings. Overview
Kaiser, N.; Stolz, C.J.
Journal Article
2008Plasma etching and coating techniques to achieve antireflection properties in combination with additional surface functions on plastic optics
Schulz, U.; Wendling, I.; Munzert, P.; Kaiser, N.
Conference Paper
2008Reflexionsminderndes Interferenzschichtsystem und Verfahren zu dessen Herstellung
Schulz, U.; Munzert, P.; Kaiser, N.
Patent
2008Schichtsystem zur Beheizung optischer Oberflaechen und gleichzeitiger Reflexminderung
Schulz, U.; Fuechsel, K.; Kaiser, N.; Scherg, G.; Scherschlicht, R.
Patent
2008Stochastic subwavelength structures on poly(methyl methacrylate) surfaces for antireflection generated by plasma treatment
Leitel, R.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Journal Article
2008Structural and electrical properties of low temperature deposited ITO films
Füchsel, K.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Conference Paper
2008Structure and stressed state of molybdenum layers in Mo/Si multilayers
Pinegyn, V.; Zubarev, E.N.; Kondratenko, V.V.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N.
Journal Article
2008The structure of Mo/Si multilayers prepared in the conditions of ionic assistance
Zubarev, E.N.; Kondratenko, V.V.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N.
Journal Article
2008Verfahren zur Herstellung einer optischen Wellenleiterschicht
Bollwahn, N.; Schulz, U.; Munzert, P.; Kaiser, N.
Patent
200710. Topical meeting Optical Interference Coatings (OIC)
Ristau, D.; Kaiser, N.
Journal Article
2007Alte Faustregeln für das Design optischer Schichtsysteme
Kaiser, N.
Journal Article
2007Antireflection coating AR-hard with UV-protective properties for polycarbonate
Schulz, U.; Lau, K.; Kaiser, N.
Conference Paper
2007Antireflection of transparent polymers by advanced plasma etching procedures
Schulz, U.; Munzert, P.; Leitel, R.; Wendling, I.; Kaiser, N.; Tünnermann, A.
Journal Article
2007Broadband antireflective structures on PMMA by plasma treatment
Leitel, R.; Kaless, A.; Schulz, U.; Kaiser, N.
Journal Article
2007Comparison of thermal shifts in resonant grating waveguide structures and multilayer stacks
Leitel, R.; Stenzel, O.; Kaiser, N.; Tünnermann, A.
Conference Paper
2007EUV multilayer optics at the Fraunhofer IOF
Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A.
Conference Paper
2007Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra
Wilbrandt, S.; Stenzel, O.; Kaiser, N.
Journal Article
2007Halogenlampe
Scheler, M.; Stoeckl, W.; Uhlig, H.; Kaiser, N.
Patent
2007High-performance multilayer coatings for 106 nm
Taracheva, E.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2007Hochreflektierende Beschichtungen auf Kunstoffoptiken
Munzert, P.; Schulz, U.; Kaiser, N.
Journal Article
2007Kratzfeste entspiegelte Oberfläche mit Antifog-Eigenschaften
Scherg, G.-P.; Stolz, C.; Goetz, B.; Fuechsel, G.; Kaiser, N.; Schulz, U.
Patent
2007Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation
Füchsel, K.; Schulz, U.; Kaiser, N.
Conference Paper
2007Method for the vacuum deposition of optical coatings on polymethyl methacrylate
Munzert, P.; Schulz, U.; Kaiser, N.
Journal Article
2007On-line re-engineeering of interference coatings
Wilbrandt, S.; Stenzel, O.; Kaiser, N.; Trubetskov, M.K.; Tikhonravov, A.V.
Conference Paper
2007Optical and structural properties of LaF3 thin films
Bischoff, M.; Gäbler, D.; Kaiser, N.; Tünnermann, A.
Conference Paper
2007Optisches Element mit einer Antibeschlagsschicht und Verfahren zu dessen Herstellung
Schulz, U.; Munzert, P.; Wendling, I.; Kaiser, N.
Patent
2007Optisches System zur Verringerung der Reflexion optischer transparenter Substrate
Schulz, U.; Kaiser, N.; Schallenberg, U.B.
Patent
2007Spiegel mit einer Silberschicht
Kaiser, N.; Uhlig, H.; Stoeckl, W.; Scheler, M.; Risse, S.; Feigl, T.
Patent
2007Stochastic subwavelength structures on polymer surfaces for antireflection purposes
Leitel, R.; Wendling, I.; Munzert, P.; Schulz, U.; Kaiser, N.; Tünnermann, A.
Conference Paper
2007The structure, diffusion and phase formation in Mo/Si multilayers with stressed Mo layers
Zubarev, E.N.; Zhurba, A.V.; Kondratenko, V.V.; Pinegyn, V.I.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N.
Journal Article
2007Study of a novel ALD process for depositing MgF2 thin films
Pilvi, T.; Hatanpaa, T.; Puukilainen, E.; Arstila, K.; Bischoff, M.; Kaiser, U.; Kaiser, N.; Leskela, M.; Ritala, M.
Journal Article
2007Thermisch stabiler Multilayer-Spiegel fuer den EUV-Spektralbereich
Benoit, N.; Feigl, T.; Yulin, S.; Kaiser, N.
Patent
2007Verfahren zur Herstellung einer reflexionsmindernden Schicht und optisches Element mit einer reflexionsmindernden Schicht
Schulz, U.; Kaiser, N.; Rose, K.; Munzert, P.; Bollwahn, N.
Patent
2006Antireflection of polymer optics by coating and nanostructuring procedures
Schulz, U.; Kaiser, N.
Journal Article
2006Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating
Janicki, V.; Gäbler, D.; Wilbrandt, S.; Leitel, R.; Stenzel, O.; Kaiser, N.; Lappschies, M.; Görtz, B.; Ristau, D.; Rickers, C.; Vergöhl, M.
Journal Article
2006Design and deposition of vacuum-ultraviolet narrow-bandpass filters for analytical chemistry applications
Yang, M.; Gatto, A.; Kaiser, N.
Journal Article
2006Design and fabrication of selective thin film absorbers on the basis of silver island films
Heger, P.; Stenzel, O.; Kaiser, N.
Journal Article
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation
2006EUV multilayer mirrors with enhanced stability
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2006EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Conference Paper, Journal Article
2006High-performance coatings for micromechanical mirrors
Gatto, A.; Yang, M.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Schenk, H.; Lakner, H.; Heber, J.
Journal Article
2006High-temperature LPP collector mirror
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.; Böwering, N.; Ershov, A.; Khodykin, O.; Viatella, J.; Bruzzone, K.; Fomenkov, I.; Myers, D.; Brandt, D.
Conference Paper
2006Highly reflecting aluminium-protected optical coatings for the vacuum-ultraviolet spectral range
Yang, M.; Gatto, A.; Kaiser, N.
Journal Article
2006Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2006Im EUV-Spektralbereich reflektierender Spiegel
Feigl, T.; Kaiser, N.; Kuhlmann, T.; Yulin, S.
Patent
2006In-situ broadband monitoring of heterogeneous optical coatings
Wilbrandt, S.; Kaiser, N.; Stenzel, O.
Journal Article, Conference Paper
2006Interface-engineered EUV multilayer mirrors
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2006Neue Entwicklungen auf dem Gebiet optischer Schichten
Kaiser, N.
Journal Article
2006New optimization algorithm for the synthesis of rugate optical coatings
Tikhonravov, A.V.; Trubetskov, M.K.; Amotchkina, T.V.; Kokarev, M.A.; Kaiser, N.; Stenzel, O.; Wilbrandt, S.; Gäbler, D.
Journal Article
2006Optical and non-optical characterization of Nb2O5-SiO2 compositional gradient index layers and rugate structures
Leitel, R.; Stenzel, O.; Wilbrandt, S.; Gäbler, D.; Kaiser, N.; Janicki, V.
Journal Article
2006Optical thin films with high reflectance, low thickness and low stress for the spectral range from vacuum UV to near IR
Yang, M.; Gatto, A.; Kaiser, N.
Journal Article
2006Schwarzschild-objective-based EUV micro exposure tool
Zeitner, U.; Feigl, T.; Benkenstein, T.; Damm, C.; Peschel, T.; Kaiser, N.; Tünnermann, A.
Conference Paper
2006Storage ring free-electron lasing at 176 nm-dielectric mirror development for vacuum ultraviolet free-electron lasers
Günster, S.; Ristau, D.; Gatto, A.; Kaiser, N.; Trovo, M.; Danailov, M.
Journal Article
2006Theoretical treatment of thermal shifts in resonant grating waveguide
Leitel, R.; Kaiser, N.; Stenzel, O.; Heger, P.
Journal Article
2006Toward resistant vacuum-ultraviolet coatings for free-electron lasers down to 150 nm
Gatto, A.; Yang, M.; Kaiser, N.; Günster, S.; Ristau, D.; Trovo, M.; Danailov, M.
Journal Article
2006Transmissionsfilter fuer den EUV-Spektralbereich
Kozhevnikov, I.; Kaiser, N.; Yulin, S.; Feigl, T.
Patent
2006Vacuum coating of plastic optics
Schulz, U.; Kaiser, N.
Journal Article
2006Verfahren zur Herstellung einer Nanostruktur an einer Kunststoffoberflaeche
Munzert, P.; Schulz, U.; Scheler, M.; Kaiser, N.
Patent
2006Verfahren zur Herstellung eines strahlungsabsorbierenden optischen Elements und strahlungsabsorbierendes optisches Element
Scheler, M.; Kaless, A.; Munzert, P.; Schulz, U.; Kaiser, N.
Patent
2005Aluminum-enhanced optical coatings for the VUV spectral range
Yang, M.; Gatto, A.; Kaiser, N.
Conference Paper
2005Compact source and beam delivery system for EUV radiation using a Schwarzschild objective
Mann, K.; Barkusky, F.; Bayer, A.; Peth, C.; Töttger, H.; Feigl, T.; Kaiser, N.
Conference Paper
2005Comparison of gradient index and classical designs of a narrow band notch filter
Janicki, V.; Lappschies, M.; Görtz, B.; Schallenberg, U.; Stenzel, O.; Kaiser, N.
Conference Paper
2005Deposition of broadband antireflection coatings on plastic substrates by evaporation and reactive pulse magnetron sputtering
Weber, J.; Schulz, U.; Kaiser, N.; Bartzsch, H.; Frach, P.
Conference Paper
2005Deposition of robust multilayer mirror coatings for storage ring FEL lasing at 176 nm
Günster, S.; Ristau, D.; Trovo, M.; Danailov, M.; Gatto, A.; Kaiser, N.; Sarto, F.; Piegari, A.
Conference Paper
2005Design und Herstellung selektiver Dünnschichtabsorber auf Silberinselbasis
Heger, P.; Stenzel, O.; Kaiser, N.
Journal Article
2005EUV/soft x-ray multilayer optics
Yulin, S.; Feigl, T.; Benoit, N.; Kaiser, N.
Conference Paper
2005Formation and direct writing of color centers in LiF using a laser-induced extreme ultraviolet plasma in combination with a Schwarzschild objective
Barkusky, F.; Peth, C.; Mann, K.; Feigl, T.; Kaiser, N.
Journal Article
2005High-performnace Cr/Sc multilayers for the soft X-ray range
Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2005High-temperature multilayers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.
Conference Paper
2005Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Gatto, A.; Yang, M.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005A hybrid algorithm for reengineering the refractive index profile for inhomogeneous coatings from optical in-situ broadband monitoring data
Wilbrandt, S.; Stenzel, O.; Gäbler, D.; Kaiser, N.
Journal Article
2005Hybrid optical coating design for omnidirectional antireflection purposes
Janicki, V.; Wilbrandt, S.; Stenzel, O.; Gäbler, D.; Kaiser, N.; Tikhonravov, A.; Trubetskov, M.; Amotchkina, T.
Journal Article
2005Imaging properties of different optics for EUV radiation
Bayer, A.; Barkusky, F.; Peth, C.; Töttger, H.; Mann, K.; Feigl, T.; Kaiser, N.
Conference Paper
2005Interface-engineered multilayer mirrors
Yulin, S.; Bernoit, N.; Feigl, T.; Kaiser, N.
Conference Paper
2005Lanthanide tri-fluorides: A survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV - VUV - spectral range
Uhlig, H.; Thielsch, R.; Heber, J.; Kaiser, N.
Conference Paper
2005Mechanische Eigenschaften von Antireflexschichten AR-hard auf Kunststoffen
Schulz, U.; Lau, K.; Kaiser, N.
Conference Paper
2005Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Braun, S.; Foltyn, T.; Leson, A.; Gatto, A.; Yang, M.; Kaiser, N.
Conference Paper
2005Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Journal Article
2005NANO-motheye antireflection pattern by plasma treatment of polymers
Kaless, A.; Schulz, U.; Munzert, P.; Kaiser, N.
Conference Paper, Journal Article
2005Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components
Schröder, S.; Uhlig, H.; Duparre, A.; Kaiser, N.
Conference Paper
2005New challenges for VUV-XUV radiation resistant coatings
Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2005New optimization algorithm for the synthesis of rugate optical coatings
Tikhonravov, A.; Trubetskov, M.; Amotchkina, T.; Kokarev, M.; Kaiser, N.; Stenzel, O.; Wilbrandt, S.; Gäbler, D.
Conference Paper
2005Novel optical coating concepts based on nanostructured thin solid films
Stenzel, O.; Heger, P.; Bischoff, M.; Wilbrandt, S.; Kaiser, N.
Conference Paper
2005Oberflächenmodifizierung von PMMA durch Ionenätzen
Schulz, U.; Kaless, A.; Leitel, R.; Kaiser, N.
Conference Paper
2005Optical coating and nanostructuring on plastics
Schulz, U.; Munzert, P.; Kaless, A.; Kaiser, N.
Journal Article
2005Optical coating on transparent plastics
Schulz, U.; Munzert, P.; Kaiser, N.
Journal Article
2005Optical coatings - trends and challenges for the present and the future
Kaiser, N.
Journal Article
2005Optical coatings for excimer laser applications
Kaiser, N.; Lauth, H.; Bernitzki, H.
Book Article
2005Optical coatings: Trends and challenges
Kaiser, N.; Feigl, T.; Stenzel, O.; Schulz, U.; Yang, M.
Journal Article
2005Optical properties of stochastic subwavelength surface structures
Leitel, R.; Kaless, A.; Petschulat, J.; Schulz, U.; Stenzel, O.; Kaiser, N.
Conference Paper
2005Optical, structural, and mechanical properties of gadolinium trifluoride thin films grown on amorphous substrates
Thielsch, R.; Heber, J.; Uhlig, H.; Kaiser, N.
Conference Paper
2005Organically modified SiO2 coatings on polycarbonate
Lau, K.; Schulz, U.; Kaiser, N.
Conference Paper
2005Procedures to reduce reflection on polymer surfaces
Schulz, U.; Munzert, P.; Kaless, A.; Kaiser, N.; Lau, K.
Conference Paper
2005Properties chirped mirrors manufactured by plasma assisted electron beam evaporation
Bischoff, M.; Stenzel, O.; Gäbler, D.; Kaiser, N.
Conference Paper
2005Properties of chirped mirrors manufactured by plasma ion assisted electron beam evaporation
Bischoff, M.; Stenzel, O.; Gäbler, D.; Kaiser, N.
Conference Paper
2005Radiation stability of EUV Mo/Si multilayer mirrors
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2005Re-engineering of inhomogeneous coatings based on in-situ optical broadband monitoring data
Wilbrandt, S.; Stenzel, O.; Gäbler, D.; Kaiser, N.
Conference Paper
2005Reflektierende Schichtenfolge mit Barriereschichten
Yulin, S.; Kaiser, N.; Feigl, T.
Patent
2005Research and development of VUV optical coatings for micro mirrors applications
Yang, M.; Gatto, A.; Kaiser, N.
Journal Article
2005Schichtsysteme für optische Anwendungen
Kaiser, N.; Feigl, T.; Stenzel, O.; Schulz, U.
Book Article
2005Self-organized antireflective nanostructures on PMMA by ion etching
Kaless, A.; Schulz, U.; Kaiser, N.
Conference Paper
2005VUV optical coatings for the next-generation micro-mechanical mirrors
Yang, M.; Gatto, A.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Heber, J.; Schenk, H.; Lakner, H.
Conference Paper
2005VUV spectrophotometry for photomasks characterization at 193 nm
Yang, M.; Leiterer, J.; Gatto, A.; Kaiser, N.; Höllein, I.; Teuber, S.; Bubke, K.
Conference Paper
2004Antireflection of acrylic by low-pressure plasma treatment
Schulz, U.; Kaless, A.; Kaiser, N.
Conference Paper
2004AR-hard broadband antireflective coatings generated by a controlled needle-optimization technique
Schulz, U.; Kaiser, N.; Schallenberg, U.
Conference Paper
2004Coatings for the next generation micro mechanical mirrors
Gatto, A.; Yang, M.; Kaiser, N.
Conference Paper
2004Development of mechanical stress in fluoride multilayers for UV applications
Thielsch, R.; Heber, J.; Uhlig, H.; Kaiser, N.
Conference Paper
2004Enhanced reflectivity and stability of Sc/Si multilayers
Yulin, S.; Schäfers, S.; Feigl, T.; Kaiser, N.
Conference Paper
2004EUV and soft X-ray multilayer optics
Kaiser, N.; Yulin, S.; Feigl, T.; Bernitzki, H.; Lauth, H.
Conference Paper
2004High efficiency beam splitters with antireflection coating
Elfström, H.; Clausnitzer, T.; Walter, S.; Kaiser, N.; Kley, E.-B.
Conference Paper
2004High-performance Cr/Sc multilayers for the soft X-ray range
Yulin, S.; Schäfers, F.; Feigl, T.; Kaiser, N.
Conference Paper
2004In-situ broadband monitoring and characterization of optical coatings
Wilbrandt, S.; Leitel, R.; Gäbler, D.; Stenzel, O.; Kaiser, N.
Conference Paper
2004In-situ broadband monitoring of optical coatings
Kaiser, N.; Wilbrandt, S.; Stenzel, O.
Conference Paper
2004Ion-assisted deposition processes: Industrial network IntIon
Ehlers, H.; Becker, K.-J.; Beckmann, R.; Beermann, N.; Brauneck, U.; Fuhrberg, P.; Gäbler, D.; Jakobs, S.; Kaiser, N.; Kennedy, M.; König, F.; Laux, S.; Müller, J.C.; Rau, B.; Riggers, W.; Ristau, D.; Schäfer, D.; Stenzel, O.
Conference Paper
2004Laterally heterogeneous optical films as design tools for reflectors and absorbers
Stenzel, O.; Kaiser, N.
Conference Paper
2004Mechanische Eigenschaften von Antireflexschichten AR-hard auf Kunststoffen
Schulz, U.; Lau, K.; Bräutigam, T.; Kaiser, N.
Conference Paper
2004Metal island films for optics
Heger, P.; Stenzel, O.; Kaiser, N.
Conference Paper
2004Multicycle AR coatings: A theoretical approach
Schallenberg, U.B.; Schulz, U.; Kaiser, N.
Conference Paper
2004Narrow bandpass filters for the VUV spectral region
Yang, M.; Gatto, A.; Kaiser, N.
Conference Paper
2004Non-optical characterization of gradient index layers and rugate filters
Stenzel, O.; Wilbrandt, S.; Leitel, R.; Gäbler, D.; Kaiser, N.
Conference Paper
2004Optical coating on polymers
Schulz, U.; Kaiser, N.
Journal Article
2004Optische Schichten für transparente Kunststoffe
Schulz, U.; Munzert, P.; Kaiser, N.
Journal Article
2004PVD coating for optical applications on temperature-resistant thermoplastics
Munzert, P.; Schulz, U.; Kaiser, N.
Conference Paper
2004Radiation resistance of single and multilayer coatings against synchrotron radiation
Guenster, S.; Blaschke, H.; Ristau, D.; Danailov, M.; Trovo, M.; Gatto, A.; Kaiser, N.; Sarto, F.; Flori, D.; Menchini, F.
Conference Paper
2004Reflektierendes Element fuer freie Elektronen Laserstrahlung, Verfahren zu seiner Herstellung uns seine Verwendung
Gatto, A.; Kaiser, N.; Thielsch, R.
Patent
2004Refractive indices fo SiO2 and Nb2O5 mixture films
Stenzel, O.; Gäbler, D.; Kaiser, N.; Tikhonravov, A.V.; Trubetskov, M.K.; Kokarev, M.A.; Amotchikina, T.V.
Conference Paper
2004SiO2 coatings on polycarbonate evaporated from pure and alumina-containing silica granules
Lau, K.; Schulz, U.; Kaiser, N.; Fiz, M.; König, F.
Conference Paper
2004Surface investigation of VUV-optical components after exposure to high-energy synchrotron radiation
Guenster, S.; Blaschke, H.; Starke, K.; Ristau, D.; Danailov, M.; Diviacco, B.; Gatto, A.; Kaiser, N.; Sarto, F.; Masetti, E.
Conference Paper
2004Trends in optical coatings
Kaiser, N.
Journal Article
2004Vakuumbeschichtung von Kunststoffen für optische Anwendungen
Schulz, U.; Munzert, P.; Kaiser, N.
Journal Article
2004Verbundbauteil und Verfahren zur Herstellung eines Verbundbauteiles
Stoeckl, W.; Feigl, T.; Banse, H.; Eberhardt, R.; Kaiser, N.
Patent
2004Verfahren und Werkzeug zur Herstellung transparenter optischer Elemente aus polymeren Werkstoffen
Schulz, U.; Munzert, P.; Kaiser, N.; Hofmann, W.; Bitzer, M.; Gebhardt, M.
Patent
2004Verfahren zur Reduzierung der Grenzflaechenreflexion von Kunststoffsubstraten sowie derart modifiziertes Substrat und dessen Verwendung
Schulz, U.; Kaiser, N.; Munzert, P.; Scheler, M.; Uhlig, H.
Patent
2004Vorrichtung und Verfahren zum Messen und zur Bestimmung von Ladungstraegerstroemen und davon ableitbaren Groessen in ionen- und plasmagestuetzten Prozessen
Kaiser, N.; Pulker, H.; Strauss, G.; Staerz, R.
Patent
2003At-wavelength metrology on Sc-based multilayers for the VUV and water window
Schäfers, F.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2003Bauelement mit ultrapraeziser Oberflaeche und Verfahren zu seiner Herstellung
Gaebler, D.; Kaiser, N.
Patent
2003Deep UV laser induced fluorescence in fluoride thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2003Luminescence of UV thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.; Lewis, K.L.; Soileau, M.J.; Stolz, C.J.
Conference Paper
2003Metallisches Fluorid in Pulver- oder Granulatform, Verfahren zu seiner Herstellung und den Nachweis der Reinheit
Heber, J.; Kaiser, N.; Muehlig, C.; Triebel, W.
Patent
2003Monochromatorspiegel fuer den EUV-Spektralbereich
Feigl, T.; Kaiser, N.; Kuhlmann, T.; Yulin, S.
Patent
2003The optical response of silver island films
Stenzel, O.; Heger, P.; Kaiser, N.
Conference Paper
2003Optisches Element, Verfahren zu seiner Herstellung und zur Bestimmung seiner optischen Eigenschaften
Heber, J.; Kaiser, N.; Muehlig, C.; Triebel, W.
Patent
2003Optisches Schichtsystem und Verfahren zur haftfesten Beschichtung mit einem optischen Schichtsystem
Kaiser, N.; Munzert, P.; Scheler, M.; Schulz, U.
Patent
2003Radiation resistance of optical materials against synchrotron radiation
Günster, S.; Blaschke, H.; Ristau, D.; Gatto, A.; Heber, J.; Kaiser, N.; Diviacco, B.; Marsi, M.; Trovo, M.; Sarto, F.; Scaglione, S.; Masetti, E.
Conference Paper
2003Reflexionsmindernde Beschichtung aus einem Wechselschichtsystem unterschiedlicher Schichtmaterialien mit jeweils niedrigerem und hoeherem Brechungsindex
Schulz, U.; Kaiser, N.; Schallenberg, U.
Patent
2003Some fundamentals of optical thin film growth
Kaiser, N.
Book Article
2003Spectral reflectance tuning of EUV mirrors for metrology applications
Yulin, S.A.; Kuhlmann, T.; Feigl, T.; Kaiser, N.
Conference Paper
2003Spectrophotometry in the vacuum-UV
Heber, J.; Gatto, A.; Kaiser, N.
Conference Paper
2003Symmetrical periods for antireflection coating of plastic optics
Schulz, U.; Schallenberg, U.B.; Kaiser, N.
Journal Article
2003Synchrotron-radiation-induced damages in optical materials
Gatto, A.; Kaiser, N.; Günster, S.; Ristau, D.; Sarto, F.; Trovo, M.; Danailov, M.
Conference Paper
2003Thermal stress in antireflective coatings on polymer substrates
Schulz, U.; Kaiser, N.
Conference Paper
2003Transparent thermoplastic polymers in plasma-assisted coating processes
Munzert, P.; Schulz, U.; Kaiser, N.
Conference Paper, Journal Article
2003The UV European FEL at ELETTRA. Towards compatibility of storage ring operation for FEL and synchrotron radiation
Ninno, G. de; Trovo, M.; Danailov, M.; Marsi, M.; Karantzoulis, E.; Diviacco, B.; Walker, R.P.; Bartolini, R.; Dattoli, G.; Giannessi, L.; Mezi, L.; Couprie, M.E.; Gatto, A.; Kaiser, N.; Günster, S.; Ristau, D.
Conference Paper, Journal Article
2003Verfahren zur Herstellung eines thermisch stabilen Schichtsystems zur Reflexion von Strahlung im extremen ultravioletten Spektralbereich (EUV)
Yulin, S.; Feigl, T.; Kaiser, N.
Patent
2002193 nm laser induced fluorescence in fluoride thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002193 nm laser induced luminescence in oxide thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002Antireflection coating design for plastic optics
Schulz, U.; Schallenberg, U.B.; Kaiser, N.
Journal Article
2002Chromium-scandium multilayer mirrors for the nitrogen K(alpha) line in the water window region
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N.; Gorelik, T.; Kaiser, U.; Richter, W.
Journal Article
2002A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition
Thielsch, R.; Gatto, A.; Heber, J.; Kaiser, N.
Journal Article
2002Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Journal Article
2002Deep UV laser induced luminescence in oxide thin films
Heber, J.; Muhlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002Design and fabrication of broadband EUV multilayer mirrors
Kuhlmann, T.; Yulin, S.A.; Feigl, T.; Kaiser, N.; Bernitzki, H.; Lauth, H.
Conference Paper
2002EUV multilayer mirrors with tailored spectral reflectivity
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2002High-performance 6-inch EUV mask blanks produced under real production conditions by ion-beam sputter deposition
Becker, H.W.; Sobel, F.; Aschke, L.; Renno, M.; Krieger, J.; Buttgereit, U.; Hess, G.; Lenzen, F.; Knapp, K.; Yulin, S.A.; Feigl, T.; Kuhlmann, T.; Kaiser, N.
Conference Paper
2002High-performance deep-ultraviolet optics for free-electron lasers
Gatto, A.; Thielsch, R.; Heber, J.; Kaiser, N.; Ristau, D.; Günster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.; Garzella, D.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Amra, C.
Journal Article
2002High-performance UV/VUV optics for the storage ring FEL at ELETTRA
Gatto, A.; Heber, J.; Kaiser, N.; Ristau, D.; Gunster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.P.
Journal Article
2002High-reflectivity HfO2/SiO2 ultraviolet mirrors
Torchio, P.; Gatto, A.; Alvisi, M.; Albrand, G.; Kaiser, N.; Amra, C.
Journal Article
2002Hochtransparente Thermoplaste in plasmagestützten PVD-Beschichtungsprozessen
Munzert, P.; Schulz, U.; Kaiser, N.
Conference Paper
2002Interlayer transition zones in Mo/Si superlattices
Yulin, S.; Feigl, T.; Kuhlmann, T.; Kaiser, N.; Fedorenko, A.I.; Kondratenko, V.V.; Poltseva, O.V.; Sevryukova, V.A.; Zolotaryov, A.Y.; Zubarev, E, N.
Journal Article
2002Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region
Thielsch, R.; Gatto, A.; Kaiser, N.
Journal Article
2002Multiscale degradations of storage ring FEL optics
Gatto, A.; Feigl, T.; Kaiser, N.; Garzella, D.; Ninno, G. de; Couprie, M.E.; Marsi, M.; Trovo, M.; Walker, R.; Grewe, M.; Wille, K.; Paoloni, S.; Reita, V.; Roger, J.P.; Boccara, C; Torchio, P.; Albrand, G.; Amra, C.
Journal Article
2002Operation and performance of a free electron laser oscillator down to 190 nm
Marsi, M.; Trovo, M.; Walker, R.P.; Giannessi, L.; Dattoli, G.; Gatto, A.; Kaiser, N.; Gunster, S.; Ristau, D.; Couprie, M.E.; Garzella, D.; Clarke, J.A.; Poole, M.W.
Journal Article
2002Operation of the european storage ring FEL at ELETTRA down to 190 nm
Trovo, M.; Clarke, J.A.; Couprie, M.E.; Dattoli, G.; Garzella, D.; Gatto, A.; Giannessi, L.; Gunster, S.; Kaiser, N.; Marsi, M.; Poole, M.W.; Ristau, D.; Walker, R.P.
Journal Article
2002Optics developments in the VUV-soft X-ray spectral region
Feigl, T.; Heber, J.; Gatto, A.; Kaiser, N.
Journal Article
2002Review of the fundamentals of thin-film growth
Kaiser, N.
Journal Article
2002Thermal stability of Cr/Sc multilayers for the soft x-ray range
Yulin, S.; Kuhlmann, T.; Feigl, T.; Kaiser, N.
Conference Paper
2002UV/VUV free electron laser oscillators and applications in materials science
Marsi, M.; Locatelli, A.; Trovo, M.; Walker, R.P.; Couprie, M.E.; Garzella, D.; Nahon, L.; Nutarelli, D.; Renault, E.; Gatto, A.; Kaiser, N.; Giannessi, L.; Günster, S.; Ristau, D.; Poole, M.W.; Taleb-Ibrahimi, A.
Journal Article
2002Verfahren zur Herstellung eigenspannungsfreier reflektierender optischer Schichtsysteme auf Substraten
Yulin, S.; Feigl, T.; Kuhlmann, T.; Kaiser, N.
Patent
2002Verfahren zur Modifizierung von Polymethylmethacrylat- Substratoberflaechen
Schulz, U.; Kaiser, N.; Stoeckl, W.
Patent
2001Absorption limited performance of SiO2/Al2O3 multi-layer coatings at 193nm - a systematic study
Thielsch, R.; Heber, J.; Kaiser, N.; Apel, O.; Mann, K.; Ristau, D.; Blaschke, H.; Arens, W.
Conference Paper
2001Achromatic damage investigations on mirrors for UV-free electron lasers
Gatto, A.; Kaiser, N.; Thielsch, R.; Garzella, D.; Hirsch, M.; Nutarelli, D.; Ninno, G. de; Renault, E.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Albrand, G.; Amra,C.; Marsi, M.; Trovo, M.; Walker, R.; Grewe, M.; Roger, J.P.; Boccara, C
Conference Paper
2001Beschichtung von Kunststoffen auf Cycloolefinbasis für optische Anwendungen
Munzert, P.; Schulz, U.; Kaiser, N.
Conference Paper
2001Blocking improved narrow-band filters for the UV-B region
Uhlig, H.; Kaiser, N.
Journal Article
2001Completion of the first phase of development of the european UV/VUV free-electron laser at ELETTRA
Marsi, M.; Roux, R.; Trovo, M.; Walker, R.; Couprie, M.E.; Garzella, D.; Clarke, J.A.; Poole, M.W.; Wille, K.; Dattoli, G.; Giannessi, L.; Eriksson, M.; Werin, S.; Gatto, A.; Kaiser, N.; Günster, A.; Ristau, D.
Journal Article
2001Cr/Sc multilayer mirrors for the nitrogen K(alpha)-line in the water window
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2001Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Conference Paper
2001Damage resistant and low-stress Si-based multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Conference Paper
2001Design optischer Schichtsysteme
Kaiser, N.
Journal Article
2001Heat resistance of EUV multilayer mirrors for long-time applications
Feigl, T.; Lauth, H.; Yulin, S.; Kaiser, N.
Journal Article
2001High-performance DUV optics for Free Electron Lasers
Gatto, A.; Thielsch, R.; Heber, J.; Kaiser, N.; Ristau, D.; Günster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.; Garzella, D.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Amra, C.
Conference Paper
2001High-reflectivity dense UV mirrors
Torchio, P.; Gatto, A.; Alvisi, M.; Albrand, G.; Kaiser, N.; Amra, C.
Conference Paper
2001Mechanical stress and thermal-elastic properties of oxide coatings for use in the DUV spectral region
Thielsch, R.; Gatto, A.; Kaiser, N.
Conference Paper
2001New Applications for Optical Coatings
Kaiser, N.
Book Article
2001New coatings protect surfaces of plastic optics
Schulz, U.; Kaiser, N.
Journal Article
2001Optical Coatings for Ultraviolet Radiation
Kaiser, N.
Book Article
2001Review of fundamentals of thin film growth
Kaiser, N.
Conference Paper
2001Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion
Schulz, U.; Munzert, P.; Kaiser, N.
Journal Article
2001Thermoplastics in plasma assisted coating processes
Schulz, U.; Munzert, P.; Kaiser, N.
Conference Paper
2001Verfahren zur Herstellung eines Duennschichtsystems
Feigl, T.; Yulin, S.; Stoeckl, W.; Kaiser, N.
Patent
2000Abrasion resistant antireflection coating for plastics
Schulz, U.; Schallenberg, U.; Kaiser, N.
Conference Paper
2000Advances in optical interference coatings
Kaiser, N.
Conference Paper
2000Comparative study of the UV-optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion assisted deposition and plasma-ion-assisted deposition
Thielsch, R.; Gatto, A.; Heber, J.; Martin, S.; Kaiser, N.
Conference Paper
2000Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by reactive evaporation, IAD, and PIAD
Thielsch, R.; Feigl, T.; Kaiser, N.; Martin, S.; Scaglione, S.; Sarto, F.; Alvisi, M.; Rizzo, A.
Conference Paper
2000Critical issues on the assessment of laser induced damage thresholds of fluoride multilayer coatings at 193 nm
Thielsch, R.; Heber, J.; Kaiser, N.; Martin, S.; Welsch, E.
Conference Paper
2000Magnetron sputtered EUV mirrors with high thermal stability
Feigl, T.; Yulin, S.; Kaiser, N.; Thielsch, R.
Conference Paper
2000Manufacturing technologies for miniaturized interference filters
Frank, M.; Kaiser, N.
Journal Article
2000Pulsed top-hat beam thermal lens: a simple and sensitive tool for in situ measurement on ultraviolet dielectric components
Li, B.C.; Martin, S.; Welsch, E.; Thielsch, R.; Heber, J.; Kaiser, N.
Conference Paper
2000PVD Coating of plastics for optical applications
Schulz, U.; Munzert, P.; Kaiser, N.
Conference Paper
2000Si-based multilayers with high thermal stability
Kaiser, N.; Yulin, S.; Feigl, T.
Conference Paper
2000Towards resistant UV mirrors at 200 nm for free electron lasers: Manufacture, characterizations, and degradation tests
Gatto, A.; Thielsch, R.; Kaiser, N.; Hirsch, M.; Garzella, D.; Nutarelli, D.; Ninno, G. de; Renault, E.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Albrand, G.; Amra, C.; Marsi, M.; Trovo, M.
Conference Paper
1999Analytically design of multicycle broadband AR coatings
Schallenberg, U.; Jakobs, S.; Kaiser, N.
Conference Paper
1999ArF radiation resistance of optical coatings on CaF2 in relation to the surface finish of the substrate
Thielsch, R.; Heber, J.; Duparre, A.; Kaiser, N.; Mann, K.R.; Eva, E.
Conference Paper
1999Beschichtung von Kunststoffen für die Optik und Optoelektronik
Schulz, U.; Kaiser, N.
Journal Article
1999Broadband antireflection coatings deposited with ion-assisted evaporation
Laux, S.; Kaiser, N.; Niederwald, H.S.; Mertin, M.; Ehlers, H.; Ristau, D.
Conference Paper
1999Changes in optical interference coatings exposed to 193-nm excimer laser radiation
Heber, J.; Thielsch, R.; Blaschke, H.; Kaiser, N.; Leinhos, U.; Görtler, A.
Conference Paper
1999Current status of radiation resistance of dielectric mirrors in the DUV
Bernitzki, H.; Lauth, H.; Thielsch, R.; Blaschke, H.; Kaiser, N.; Mann, K.R.
Conference Paper
1999Design and fabrication of miniaturized dielectric interference coatings
Frank, M.; Kaiser, N.; Schallenberg, U.
Conference Paper
1999High-speed industrial color and position sensors
Frank, M.; Kaiser, N.; Buss, W.; Eberhardt, R.; Fritzsch, U.; Kriegel, B.; Mollenhauer, O.; Röder, R.; Woldt, G.
Conference Paper
1999Influence of thermal substrate properties on the damage threshold of UV coatings
Blaschke, H.; Martin, S.; Morak, A.; Königsdörfer, C.; Roth, M.; Bincheng, L.; Welsch, E.; Thielsch, R.; Kaiser, N.
Conference Paper
1999Interferenzschichtoptik für den ultravioletten Spektralbereich
Ullmann, J.; Lauth, H.; Bernitzki, H.; Ristau, D.; Arens, W.; Thielsch, R.; Kaiser, N.
Journal Article
1999Ion-assisted deposition of oxide materials at room temperature by use of different ion sources
Niederwald, H.S.; Laux, S.; Kennedy, M.; Schallenberg, U.; Duparre, A.; Kaiser, N.; Ristau, D.
Journal Article
1999Laser resistivity and causes of damage in coating materials for 193 nm by photothermal methods
Blaschke, H.; Thielsch, R.; Heber, J.; Kaiser, N.; Martin, S.; Welsch, E.
Conference Paper
1999Mechanical stress in fluoride coatings
Ullmann, J.; Keck, H.G.; Thielsch, R.; Uhlig, H.; Kaiser, N.
Conference Paper
1999Microstructure and radiation interactions of optical interference coatings for 193 nm applications
Heber, J.; Thielsch, R.; Blaschke, H.; Kaiser, N.; Leinhos, U.; Görtler, A.
Conference Paper
1999Plasma pre-treatment and coating of PMMA Fresnel lenses
Schulz, U.; Jänchen, H.; Kaiser, N.
Conference Paper
1999Structural and mechanical properties of evaporated pure and mixed MgF2-BaF2 thin films
Thielsch, R.; Pommies, M.; Heber, J.; Kaiser, N.; Ullmann, J.
Conference Paper
1999Verfahren zur Beschichtung von Oberflaechen
Laux, S.; Schulz, U.; Kaiser, N.
Patent
1998248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy
Kaiser, N.; Czigany, Z.; Adamik, M.
Journal Article
1998AFM helps engineer low-scatter thin films
Duparre, A.; Kaiser, N.
Journal Article
1998Dielectric micro-filter arrays for local resolving color sensors
Frank, M.; Schallenberg, U.B.; Kaiser, N.; Buß, W.
Conference Paper
1998Dielectric micro-filters for locally resolving color sensors
Frank, M.; Schallenberg, U.B.; Kaiser, N.; Buß, W.
Journal Article
1998Electrical and optical properties of indium tin oxide thin films deposited with plasma ion-assistance
Laux, S.; Kaiser, N.; Zöllner, A.; Götzelmann, R.; Lauth, H.; Bernitzki, H.
Conference Paper
1998Ion assisted deposition of optical coatings on cold substrates. A comparison of processes using different ion sources
Schallenberg, U.; Laux, D.; Duparre, A.; Kaiser, N.; Kennedy, V.M.; Ristau, D.
Conference Paper
1998Multispectral dielectric microfilter arrays for local resolving color sensors
Frank, M.; Schallenberg, U.B.; Kaiser, N.
Journal Article
1998Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral region
Thielsch, R.; Heber, J.; Jakobs, S.; Kaiser, N.; Duparre, A.; Ullmann, J.
Conference Paper
1998Plasma surface modification and coating of PMMA
Schulz, U.; Zöllner, A.; Kaiser, N.
Conference Paper
1998Scatter investigation of UV-films. Facing the trend towards shorter wavelength
Duparre, A.; Kaiser, N.
Conference Paper
1998Surface finish and optical quality of CaF2 for UV-lithography applications
Duparre, A.; Tielsch, R.; Kaiser, N.; Jakobs, S.; Mann, K.; Eva, E.
Conference Paper
1997248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy
Kaiser, N.; Czigany, Z.; Adamik, M.
Conference Paper
1997Characterization of SiO2 protective coatings on polycarbonate
Jakobs, S.; Schulz, U.; Duparre, A.; Kaiser, N.
Journal Article
1997Damage-resistant thin-film plate polarizer
Schallenberg, U.B.; Kaiser, N.
Conference Paper
1997Dielectric microfilter arrays for multispectral measuring devices
Frank, M.; Schallenberg, U.; Kaiser, N.; Buss, W.
Conference Paper
1997IAD of oxide coatings at low temperature: a comparison of processes based on different ion sources
Niederwald, H.S.; Kaiser, N.; Schallenberg, U.B.; Duparre, A.; Ristau, D.; Kennedy, M.
Conference Paper
1997Influence of substrate cleaning on LIDT of 355 nm HR coatings
Kaiser, N.; Schallenberg, U.B.; Dijon, J.; Garrec, P.
Conference Paper
1997Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
Duparre, A.; Jakobs, S.; Kaiser, N.
Conference Paper
1997Investigation of the absorption induced damage in ultraviolet dielectric thin films
Welsch, E.; Ettrich, K.; Blaschke, H.; Schäfer, D.; Kaiser, N.; Thomsen-Schmidt, P.
Journal Article
1997Kaltlichtreflektor
Kaiser, N.; Anton, B.; Jakob, A.
Patent
1997Micropatterned multilayer dielectric filters with two spectral characteristics
Frank, M.; Schallenberg, U.B.; Kaiser, N.
Journal Article
1997Near-infrared spectroscopy for monitoring water permeability of optical coatings on plastics
Schulz, U.; Kaiser, N.
Conference Paper
1997Properties of SiO2 and Al2O3 films for use in UV-optical coatings
Thielsch, R.; Duparre, A.; Schulz, U.; Kaiser, N.
Conference Paper
1996248 nm laser interaction studies on LaF3/MgF2 optical coatings by mass spectroscopy and x-ray photoelectron spectroscopy
Kaiser, N.; Bodemann, A.; Raupach, L.; Weißbrodt, P.; Hacker, E.
Conference Paper
1996Comparison between 355 nm and 1064 nm damage of high grade dielectric mirror coatings
Kaiser, N.; Bodemann, A.; Kozlowski, M.; Pierce, E.; Stolz, C.
Conference Paper
1996Determination of the refractive indices of highly biaxialanisotropic coatings using guided modes
Kaiser, N.; Jänchen, H.; Endelema, D.; Flory, F.
Journal Article
1996Excimer laser interaction with dielectric thin films
Kaiser, N.; Welsch, E.; Ettrich, K.; Blaschke, H.
Journal Article
1996Influence of the number of double layers on the damage threshold of Al2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm
Kaiser, N.; Schallenberg, U.B.; Eva, E.; Mann, K.; Henking, R.; Ristau, D.
Conference Paper
1996Interaction of UV-laser-radiation with dielectric thin films
Kaiser, N.; Welsch, E.; Ettrich, K.; Blaschke, H.; Schäfer, D.; Thomsen-Schmidt, P.
Journal Article
1996Interference coatings for the ultraviolet spectral region
Kaiser, N.
Journal Article
1996Laser conditioning of LaF3/MgF2 dielectric coatings at 248 nm
Kaiser, N.; Eva, E.; Mann, K.; Henking, R.; Ristau, D.; Anton, B.; Weißbrodt, P.; Mademann, D.; Raupach, L.; Hacker, E.
Journal Article
1996Microstructured multilayer dielectric coatings with binary optical functions
Frank, M.; Schallenberg, U.B.; Kaiser, N.
Conference Paper
1996Optical coatings for UV photolithography systems
Kaiser, N.; Bauer, H.H.; Heller, M.
Conference Paper
1996Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films
Kaiser, N.; Zuber, A.; Jänchen, H.
Journal Article
1996Shift-free narrowband filters for the UV-B region
Kaiser, N.; Uhlig, H.; Schallenberg, U.B.
Conference Paper
1996SiO2 protective coatings on plastic optics deposited with plasma-IAD
Schulz, U.; Jakobs, S.; Kaiser, N.
Conference Paper
1996Thin-film plate polarizer with Fabry-Perot filter design
Kaiser, N.; Schallenberg, U.B.
Conference Paper
1996Verdampferschiffchen fuer den Einsatz in der PVD-Beschichtungstechnik
Anton, B.; Stoeckl, W.; Kaiser, N.
Patent
1995Formation of surface defects on polymer lenses depending on moisture absorption
Schulz, U.; Jakobs, S.; Anton, B.; Kaiser, N.
Conference Paper
1995High damage threshold Al2O3/SiO2 dielectric coatings for excimer lasers
Kaiser, N.; Schallenberg, U.; Uhlig, H.; Anton, B.; Kaiser, U.; Mann, K.; Eva, E.
Journal Article
1995Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers
Kaiser, N.; Anton, B.; Jänchen, H.; Mann, K.; Eva, E.; Fischer, C.; Henking, R.; Ristau, D.; Weißbrodt, P.; Mademann, D.; Raupach, L.; Hacker, E.
Conference Paper
1995A new insight into defect-induced laser damage in UV multilayer coatings
Kaiser, N.; Reichling, M.; Bodemann, A.
Conference Paper
1995Variable-angle spectroscopic ellipsometry for deep UV characterization of dielectric coatings
Zuber, A.; Kaiser, N.; Stehle, J.L.
Journal Article
1994C-adsorption behaviour of thin fluoride films
Kaiser, N.; Kaiser, U.
Journal Article
1994Charakterisierung der Rauheit optischer Funktionsflächen - Methodenvergleich
Neubert, J.; Duparre, A.; Kaiser, N.; Notni, G.; Gerold, F.; Risse, S.
Conference Paper
1994Graded reflectance mirror design with unconventional profile for excimer laser
Kaiser, N.; Schallenberg, U.; Uhlig, H.
Journal Article
1994Micrometer resolved inspection of defects and laser damage sites in UV high-reflecting coatings by photothermal displacement microscopy
Kaiser, N.; Bodemann, A.; Reichling, M.; Welsch, E.
Journal Article
1994Morphology investigations by atomic force microscopy of thin films and substrates for excimer laser mirrors
Kaiser, N.; Duparre, A.; Jakobs, S.
Conference Paper
1994Photothermal microscopy of defects and laser damage morphology in Al2O3/SiO2 dielectric mirror coatings for 248 nm
Kaiser, N.; Reichling, M.; Bodemann, A.; Welsch, E.
Conference Paper
1994Photothermische Mikroskopie zeigt verborgene Defekte in UV-Hochleistungsoptiken
Reichling, M.; Kaiser, N.; Bodemann, A.
Journal Article
1994Resistance of coated optics to UV laser irradiation
Kaiser, N.
Conference Paper
1994Roughness and scattering measurements on thin films for UV/VIS applications
Duparre, A.; Kiesel, A.; Kaiser, N.; Truckenbrodt, H.; Schuhmann, U.
Conference Paper
1994Variable-angle spectroscopic ellipsometry for deep UV characterization of dielectric coatings
Kaiser, N.; Zuber, A.; Stehle, J.L.
Conference Paper
1994Very high damage threshold Al2O3/SiO2 dielectric coatings for excimer lasers
Kaiser, N.; Uhlig, H.; Schallenberg, U.B.; Anton, B.; Kaiser, U.; Mann, K.; Eva, E.
Conference Paper
1993Evaluation of thin MgF2 films by spectroscopic ellipsometry
Kaiser, N.; Zuber, A.; Kaiser, U.
Journal Article
1993Investigation of inhomogenities and impurities in fluoride coatings for high power excimer lasers
Kaiser, N.; Kaiser, U.; Weißbrodt, P.; Mademann, D.; Hacker, E.
Conference Paper
1993Investigation of thin fluoride films for optical applications by surface analytical methods and electron microscopy
Kaiser, N.; Kaiser, U.; Weißbrodt, P.; Mademann, D.; Hacker, E.; Raupach, L.
Journal Article
1993Marketing potential of optical coatings
Kaiser, N.
Journal Article
1993Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and automatic force microscopy
Duparre, A.; Kaiser, N.; Truckenbrodt, H.; Berger, M.; Köhler, A.
Conference Paper
1993Narrowband interference filters for use in UV-B spectra region
Kaiser, N.; Uhlig, H.
Conference Paper
1992Structure of thin fluoride films deposited on amorphous substrates
Kaiser, N.; Kaiser, U.; Weißbrodt, P.; Mademann, U.; Hacker, E.; Müller, H.
Journal Article
1990Transparent wärmegedämmte Reihenhäuser Düsseldorf/Hellerhof
Kaiser, N.; Voss, K.
Conference Paper