Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W.
Journal Article
2018MEMS basierte Ultraschallwandler für die Anwendung in flüssigen und gasförmigen Umgebungen und Möglichkeiten der CMOS Integration
Lange, Nicolas; Grafe, Mario; Koch, Sandro; Kaden, Christiane; Schulze, Matthias
Presentation
2018Monolithic integration for photonic applications: MEMS on CMOS and functional BSOI
Kaden, Christiane; Schulze, Matthias
Presentation
2017Customized BSOI wafers integration of additional interconnects into the handle wafer
Kaden, Christiane; Langa, Sergiu
Presentation
2016Prozessanalyse der Tetramethylammoniumhydroxid-Ätzung von Silizium zur Qualitätsverbesserung optischer Gitter
Benter, Sandra
: Schnabel, Hans-Dieter (Betr.); Kaden, Christiane (Betr.)
Bachelor Thesis
2015Wafer level vacuum packaging of micro-mirrors with buried signal lines
Langa, S.; Drabe, C.; Herrmann, A.; Ludewig, T.; Rieck, A.; Flemming, A.; Kaden, C.
Journal Article
2013Wafer level vacuum packaging of micro-mirrors with buried wiring
Langa, Sergiu; Drabe, Christian; Herrmann, Andreas; Ludewig, Thomas; Rieck, Andreas; Flemming, André; Kaden, Christiane
Poster
2010Biogas SOFC µCHP - a simple process concept with high electrical efficiency
Heddrich, M.; Jahn, M.; Kaden, C.; Michaelis, A.
Conference Paper
1995Molecular beam epitaxy growth of lattice-matched AlGaInAs/GaInAs multiple quantum well distributed feedback laser structures with gratings defined by implantation enhanced intermixing
Kunzel, H.; Bottcher, J.; Hase, A.; Hofsass, V.; Kaden, C.; Schweizer, H.
Conference Paper, Journal Article