Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Analysis of design for Hartmann-Shack measurements under usage of Fourier-iteration and Zernike approximation wavefront reconstruction methods
Kabardiadi, Alexander; Greiner, Andreas; Aßmann, Heiko; Baselt, Tobias; Hartmann, Peter
Conference Paper
2015Designing of measurement for fast alternative method for measuring the wavefront of lithography exposure systems
Kabardiadi, Alexander; Baselt, Tobias; Hartmann, Peter
Presentation