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2020 | Piezoelectric Response of Polycrystalline Silicon-Doped Hafnium Oxide Thin Films Determined by Rapid Temperature Cycles Mart, Clemens; Kämpfe, Thomas; Hoffmann, Raik; Eßlinger, Sophia; Kirbach, Sven; Kühnel, Kati; Czernohorsky, Malte; Eng, Lukas M.; Weinreich, Wenke | Journal Article |
2020 | Surface Dependent Performance of Ultrathin TiN Films as an Electrically Conducting Li Diffusion Barrier for Li-Ion Based Devices Speulmanns, Jan; Kia, Alireza M.; Kühnel, Kati; Bönhardt, Sascha; Weinreich, Wenke | Journal Article |
2019 | Doping hafnium oxide by in-situ precursor mixing Weinreich, Wenke; Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Czernohorsky, Malte | Presentation |
2019 | Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Journal Article |
2019 | High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates Kühnel, Kati; Czernohorsky, M.; Riedel, Steffen; Mart, Clemens; Weinreich, Wenke | Journal Article |
2018 | CMOS compatible pyroelectric applications enabled by doped HfO2 films on deep-trench structures Mart, Clemens; Weinreich, Wenke; Czernohorsky, Malte; Riedel, Stefan; Zybell, Sabine; Kühnel, Kati | Conference Paper |
2018 | Lithium Detection and Tracking for Solid State Battery Test Stacks Mohammadian Kia, Alireza; Haufe, Nora; Zybell, Sabine; Bönhardt, Sascha; Kühnel, Kati; Speulmanns, Jan K.; Weinreich, Wenke | Poster |
2018 | LPCVD in-situ doped silicon for thermoelectric applications Calvo, Jesús; Drescher, Maximilian; Kühnel, Kati; Sauer, Bodo; Müller, Michael; Schmidt, Christian; Boui, Fatima; Völklein, Friedemann; Wagner-Reetz, Maik | Journal Article, Conference Paper |
2018 | Reliable high-density energy storage in Si-doped HfO2 thin films on 3D-structures Kühnel, Kati; Riedel, Stefan; Mart, Clemens; Weinreich, Wenke | Presentation |
2016 | Catalytic ALD of SiO2 as spacer for an E-Beam direct write self-aligned double patterning process on 300 mm wafers Kühnel, Kati; Riedel, Stefan; Weinreich, Wenke; Thrun, Xaver; Czernohorsky, Malte; Pätzold, Björn; Rudolph, Matthias | Presentation |