Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Multi‐Level Switching and Reversible Current Driven Domain‐Wall Motion in Single CoFeB/MgO/CoFeB‐Based Perpendicular Magnetic Tunnel Junctions
Lv, H.; Fidalgo, J.; Silva, A.V.; Leitao, D.C.; Kämpfe, T.; Langer, J.; Wrona, J.; Ocker, B.; Freitas, P.P.; Cardoso, S.
Journal Article
2020240-GHz reflectometer with integrated transducer for dielectric spectroscopy in a 130-nm SiGe BiCMOS technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D.
Conference Paper
2020Back-End-of-Line Compatible Low-Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation
Lehninger, D.; Olivo, R.; Ali, T.; Lederer, M.; Kämpfe, T.; Mart, C.; Biedermann, K.; Kühnel, K.; Roy, L.; Kalkani, M.; Seidel, K.
Journal Article
2020Efficient FeFET crossbar accelerator for binary neural networks
Soliman, T.; Olivo, R.; Kirchner, T.; Parra, C. de la; Lederer, M.; Kämpfe, T.; Guntoro, A.; Wehn, N.
Conference Paper
2020The electrocaloric effect in doped hafnium oxide: Comparison of direct and indirect measurements
Mart, C.; Kämpfe, T.; Czernohorsky, M.; Eßlinger, S.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.
Journal Article
2020FeFET: A versatile CMOS compatible device with game-changing potential
Beyer, S.; Dünkel, S.; Trentzsch, M.; Müller, J.; Hellmich, A.; Utess, D.; Paul, J.; Kleimaier, D.; Pellerin, J.; Müller, S.; Ocker, J.; Benoist, A.; Zhou, H.; Mennenga, M.; Schuster, M.; Tassan, F.; Noack, M.; Pourkeramati, A.; Müller, F.; Lederer, M.; Ali, T.; Hoffmann, R.; Kämpfe, T.; Seidel, K.; Mulaosmanovic, H.; Breyer, E.T.; Mikolajick, T.; Slesazeck, S.
Conference Paper
2020Impact of Ferroelectric Wakeup on Reliability of Laminate based Si-doped Hafnium Oxide (HSO) FeFET Memory Cells
Ali, T.; Kühnel, K.; Czernohorsky, M.; Rudolph, M.; Pätzold, B.; Olivo, R.; Lehninger, D.; Mertens, K.; Müller, F.; Lederer, M.; Hoffmann, R.; Mart, C.; Kalkani, M.N.; Steinke, P.; Kämpfe, T.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M.
Conference Paper
2020Piezoelectric Response of Polycrystalline Silicon-Doped Hafnium Oxide Thin Films Determined by Rapid Temperature Cycles
Mart, Clemens; Kämpfe, Thomas; Hoffmann, Raik; Eßlinger, Sophia; Kirbach, Sven; Kühnel, Kati; Czernohorsky, Malte; Eng, Lukas M.; Weinreich, Wenke
Journal Article
2020Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films
Mukundan, V.; Consiglio, S.; Triyoso, D.H.; Tapily, K.; Schujman, S.; Mart, C.; Kämpfe, T.; Weinreich, W.; Jordan-Sweet, J.; Clark, R.D.; Leusink, G.J.; Diebold, A.C.
Journal Article
2020Spannungskontrollierbarer Kondensator mit ferroelektrischer Schicht und Verfahren zum Herstellen des spannungskontrollierbaren Kondensators mit ferroelektrischer Schicht
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad
Patent
2020Spannungskontrollierbarer Kondensator und Verfahren zum Herstellen eines spannungskontrollierbaren Kondensators
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad
Patent
2020Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
Lederer, M.; Kämpfe, T.; Vogel, N.; Utess, D.; Volkmann, B.; Ali, T.; Olivo, R.; Müller, J.; Beyer, S.; Trentzsch, M.; Seidel, K.; Eng, L.M.
Journal Article
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: Pyroelectricity and Reliability
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lehninger, D.; Olivo, R.; Lederer, M.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Journal Article
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: A Temperature-Modulated Operation
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lederer, M.; Olivo, R.; Lehninger, D.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Journal Article
2020Tunable non-volatile memory by conductive ferroelectric domain walls in lithium niobate thin films
Kämpfe, T.; Wang, B.; Haußmann, A.; Chen, L.-Q.; Eng, L.M.
Journal Article
2020W-Band Noise Characterization with Back-Gate Effects for Advanced 22nm FDSOI mm-Wave MOSFETs
Le, Q.H.; Huynh, D.K.; Wang, D.; Zhao, Z.; Lehmann, S.; Kämpfe, T.; Rudolph, M.
Conference Paper
2019The annealing effect on memory state stability and interlayer coupling in perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Fidalgo, João; Leitão, Diana C.; Silva, Ana V.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Assessment of conduction mechanisms through MgO ultrathin barriers in CoFeB/MgO/CoFeB perpendicular magnetic tunnel junctions
Lv, Hua; Fidalgo, João; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Characterisation of ferroelectric thin films with scanning probe microscope methods
Norouzi Kalkani, Mahsa
: Kämpfe, Thomas (Betreuer); Ecke, Ramona (Betreuer); Schulz, Stefan E. (Gutachter)
Master Thesis
2019Doping hafnium oxide by in-situ precursor mixing
Weinreich, Wenke; Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Czernohorsky, Malte
Presentation
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W.
Presentation
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Kämpfe, Thomas; Müller, Johannes; Pätzold, Björn; Rudolph, Matthias; Czernohorsky, Malte; Weinreich, Wenke
Presentation
2019Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films
Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Conference Paper
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2019Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO2) Thin Films on Area-Enhanced Substrates
Hanrahan, Brendan; Mart, Clemens; Kämpfe, Thomas; Czernohorsky, M.; Weinreich, Wenke; Smith, A.
Journal Article
2019Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung
Mart, Clemens; Polakowski, Patrick; Kämpfe, Thomas; Weinreich, Wenke
Patent
2019Study of sub-volume activation in CoFeB/MgO memory devices near spin reorientation transition
Fidalgo, João; Lv, Hua; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Cardoso, Susana
Poster
2019Theory and Experiment of Antiferroelectric (AFE) Si-Doped Hafnium Oxide (HSO) Enhanced Floating-Gate Memory
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Eng, L.M.; Seidel, K.; Müller, J.
Journal Article
2018Barrier breakdown mechanism in nano-scale perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Leitao, Diana C.; Hou, Zhiwei; Freitas, Paulo P.; Cardoso, Susana; Kämpfe, Thomas; Müller, Johannes; Langer, Juergen; Wrona, Jerzy
Journal Article
2018Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Czernohorsky, Malte; Zybell, Sabine; Kämpfe, Thomas; Weinreich, Wenke
Journal Article
2018High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J.
Journal Article
2018Layer thickness scaling and wake-up effect of pyroelectric response in Si-doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2018Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Thrun, X.; Hanisch, N.; Steinke, P.; Calvo, J.; Müller, J.
Journal Article
2018Tuning parameters and their impact on ferroelectric hafnium oxide
Polakowski, Patrick; Büttner, Teresa; Ali, Tarek Nadi Ismail; Riedel, Stefan; Kämpfe, Thomas; Seidel, Konrad; Müller, Johannes; Pätzold, Björn
Presentation
2018Wake-up effect of pyroelectric response in doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Abstract
2011Design and fabrication of a highly off-axis binary multi-phase-level computer-generated hologram based on an effective medium approach
Freese, W.; Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2011Optimized electron beam writing strategy for fabricating computer-generated holograms based on an effective medium approach
Freese, W.; Kämpfe, T.; Rockstroh, W.; Kley, E.-B.; Tünnermann, A.
Journal Article
2010Design of binary subwavelength multiphase level computer generated holograms
Freese, W.; Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Journal Article
2010Multi-phase-level diffractive elements realized by binary effective medium patterns
Freese, W.; Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2009Farbbilderzeugung mittels computergenerierter Hologramme
Kämpfe, T.
Dissertation
2009Large-scale application of binary subwavelength structures
Kley, E.-B.; Freese, W.; Kämpfe, T.; Tünnermann, A.; Zeitner, U.D.; Michaelis, D.; Erdmann, M.
Conference Paper
2009Pixeliertes, diffraktives optisches Element mit zwei Hoehenstufen zur Erzeugung einer Phasenverteilung mit beliebigem Phasenhub
Zeitner, U.; Michaelis, D.; Kley, E.; Kaempfe, T.; Freese, W.
Patent
2008Comparison of different simulation methods for multiplane computer generated holograms
Kämpfe, T.; Hudelist, F.; Waddie, A.J.; Taghizadeh, M.R.; Kley, E.-B.; Tünnermann, A.
Conference Paper
2008Designing multiplane computer-generated holograms with consideration of the pixel shape and the illumination wave
Kämpfe, T.; Kley, E.-B.; Tünnermann, A.
Journal Article
2008Highly-dispersive dielectric transmission gratings with 100% diffraction efficiency
Clausnitzer, T.; Kämpfe, T.; Kley, E.B.; Tünnermann, A.; Tishchenko, A.V.; Parriaux, O.
Journal Article
2008Reflection-reduced encapsulated transmission grating
Clausnitzer, T.; Kaempfe, T.; Brueckner, F.; Heinze, R.; Kley, E.B.; Tünnermann, A.
Journal Article
2007Investigation of the polarization-dependent diffraction of deep dielectric rectangular transmission gratings illuminated in Littrow mounting
Clausnitzer, T.; Kämpfe, T.; Kley, E.B.; Tünnermann, A.; Tishchenko, A.; Parriaux, O.
Journal Article
2006Dielektrisches Pinhole zur Ortsfrequenzfilterung von Laserstrahlen
Kley, E.B.; Kaempfe, T.; Tuennermann, A.
Patent
2006Verschlossene, binäre Transmissionsgitter
Kley, E.B.; Kämpfe, T.; Clausnitzer, T.; Tünnermann, A.
Patent