Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Role of defect relaxation for trap-assisted tunneling in high-K thin films
Jegert, G.; Popescu, D.; Lugli, P.; Häufel, M.J.; Weinreich, W.; Kersch, A.
Journal Article
2011Monte Carlo simulation of leakage currents in TiN/ZrO2/TiN capacitors
Jegert, G.; Kersch, A.; Weinreich, W.; Lugli, P.
Journal Article
2011Ultimate scaling of TiN/ZrO2/TiN capacitors: Leakage currents and limitations due to electrode roughness
Jegert, G.; Kersch, A.; Weinreich, W.; Lugli, P.
Journal Article
2010Modeling of leakage currents in high-k dielectrics: Three-dimensional approach via kinetic Monte Carlo
Jegert, G.; Kersch, A.; Weinreich, W.; Schröder, U.; Lugli, P.
Journal Article
2010Reliability of Al2O3-doped ZrO2 high-k dielectrics in three-dimensional stacked metal-insulator-metal capacitors
Zhou, D.; Schroeder, U.; Xu, J.; Weinreich, W.; Heitmann, J.; Jegert, G.; Kerber, M.; Knebel, S.; Erben, E.; Mikolajick, T.
Journal Article
2009Detailed correlation of electrical and breakdown characteristics to the structural properties of ALD grown HfO2- and ZrO2-based capacitor dielectrics
Schroeder, U.; Weinreich, W.; Erben, E.; Mueller, J.; Wilde, L.; Heitmann, J.; Agaiby, R.; Zhou, D.; Jegert, G.; Kersch, A.
Conference Paper
2009Impact of interface variations on J-V and C-V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1-x)AlxO2 films
Weinreich, W.; Reiche, R.; Lemberger, M.; Jegert, G.; Müller, J.; Wilde, L.; Teichert, S.; Heitmann, J.; Erben, E.; Oberbeck, L.; Schröder, U.; Bauer, A.J.; Ryssel, H.
Conference Paper, Journal Article