Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Surface roughness evolution and growth mechanism of carbon films from hyperthermal species
Lifshitz, Y.; Edrei, R.; Hoffman, A.; Grossman, E.; Lempert, G.D.; Berthold, J.; Schultrich, B.; Jäger, H.-U.
Conference Paper, Journal Article
1995Point defect-based modeling of diffusion and electrical activation of ion implanted boron in crystalline silicon
Jäger, H.-U.
Journal Article
1993An explanation of transient-enhanced diffusion and electrical activation of boron in crystalline silicon during postimplantation annealing
Jäger, H.-U.
Journal Article
1993Simulation of high-dose ion implantation-induced transient diffusion and of electrical activation of boron in crystalline silicon
Jäger, H.-U.
Conference Paper
1992An explanation of transient enhanced diffusion and electrical activation of boron in crystalline silicon during post-implantation annealing
Jäger, H.-U.
Conference Paper