Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2005Mikromechanisches HF-Schaltelement sowie Verfahren zur Herstellung
Lisec, T.; Huth, C.
Patent
2005Surface-micromachined capacitive RF switches and varactors
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004Characterization of microelectromechanical (MEMS) HF-switches
Shakhrai, M.V.; Huth, C.; Quenzer, J.; Lisec, T.
Conference Paper
2004Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
Lisec, T.; Huth, C.; Shakhray, M.; Wagner, B.; Combi, C.
Conference Paper
2001Vorrichtung zur Oberflaechenbearbeitung wenigstens eines flaechig ausgebildeten Substrates
Janes, J.; Huth, C.; Pilz, W.
Patent
1997Influence of deposition and etching on high aspect ratio patterning
Hoffmann, P.; Pilz, W.; Janes, J.; Huth, C.; Börnig, K.; Peters, S.
Conference Paper
1995Novel high density plasma tool for large area flat panel display etching
Heinrich, F.; Bänzinger, U.; Jentzsch, A.; Neumann, G.; Huth, C.
Conference Paper
1992Analysis of large-area beam attacks on surfaces and testing of etching reactions
Bänzinger, U.; Hoffmann, P.; Neumann, G.; Scheer, H.-C.; Schneemann, B.; Köhler, U.; Huth, C.; Janes, J.
Journal Article
1992Energy-resolved angular distributions of O+ions at the radio-frequency-powered electrode in reactive ion etching
Huth, C.; Janes, J.
Journal Article
1990Divergence measurements for characterization of the micropatterning quality of broad ion beams
Scheer, H.-C.; Schneemann, B.; Stoll, H.-P.; Huth, C.
Journal Article
1989The problem of scattering in ribe
Pelka, J.; Scheer, H.-C.; Hoffmann, P.; Hoppe, W.; Huth, C.
Journal Article