Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Control of plasma process instabilities during thin silicon film deposition
Hrunski, D.; Grählert, W.; Beese, H.; Kilper, T.; Gordijn, A.; Appenzeller, W.
Journal Article
2009Oxygen and nitrogen impurities in microcrystalline silicon deposited under optimized conditions: Influence on material properties and solar cell performance
Kilper, T.; Beyer, W.; Bräuer, G.; Bronger, T.; Carius, R.; Donker, M.N. van den; Hrunski, D.; Lambertz, A.; Merdzhanova, T.; Mück, A.; Rech, B.; Reetz, W.; Schmitz, R.; Zastrow, U.; Gordijn, A.
Journal Article
2008Analysis and minimisation of plasma process instabilities in thin film deposition
Hrunski, D.; Gordijn, A.; Stickelmann, U.; Kilper, T.; Appenzeller, W.; Grählert, W.; Beese, H.
Journal Article