Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2005Application of a microplant for the sulfonation of toluene with gaseous sulfur trioxide
Jähnisch, K.; Steinfeldt, N.; Dingerdissen, U.; Müller, A.; Horn, B.; Cominos, V.; Hessel, V.; Bazzanella, A.; Großer, V.; Hillmann, V.; Rinke, G.; Kraut, M.
Conference Paper
2005Fluidic bus system for chemical process engineering in the laboratory and for small-scale production
Müller, A.; Cominos, V.; Hessel, V.; Horn, B.; Schürer, J.; Ziogas, A.; Jähnisch, K.; Hillmann, V.; Großer, V.; Jam, K.A.; Bazzanella, A.; Rinke, G.; Kraut, M.
Journal Article
2004Modular 3D Packages in PCB Technology
Schindler-Saefkow, F.; Amiri Jam, K.; Hillmann, V.; Großer, V.
Book Article
2000Automated optical measurements under vacuum
Hillmann, V.; Großer, V.; Gentzsch, S.; Bloch, H.; Michel, B.
Conference Paper
2000Evaluation and testing of microsystems using optical methods
Großer, V.; Bombach, C.; Gentzsch, S.; Hillmann, V.; Sommer, J.-P.; Michel, B.
Conference Paper
2000Mechatronic solutions for modular MEMS
Amiri Jam, K.; Hillmann, V.; Braun, T.; Becker, K.-F.; Ansorge, F.; Großer, V.; Reichl, H.
Conference Paper
1999Correlation analysis at grey scale patterns in an in-situ measuring module for microsystem technology
Dost, M.; Rümmler, N.; Kieselstein, E.; Erb, R.; Hillmann, V.; Großer, V.
Book Article
1997Laseroptical in-situ-measurements for microfabrication techniques
Hillmann, V.; Bombach, C.; Großer, V.; Krüger, A.
Conference Paper
1996Microfabrication techniques for microsystems - mu m Fab - and first practical experience
Grosser, V.; Hillmann, V.; Reichl, H.; Grimme, R.
Conference Paper
1996Mikrofabrikationstechniken für modulare Mikrosysteme
Großer, V.; Reichl, H.; Hillmann, V.
Book Article
1996Modular System for Laser Microfabrication
Grimme, R.; Hillmann, V.; Jürss, M.; Otschik, P.; Poßner, T.
Conference Paper
1995Mikrofabrikationstechniken für die Mikrosytemtechnik
Großer, V.; Hillmann, V.; Reichl, H.
Conference Paper