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| 2001 | Application of finite-element method and spice simulation for design optimization of oven-controlled crystal-oscillators
Hillerich, B.; Nagler, O. | Journal Article |
| 2001 | Vorrichtung zum Erfassen einer Dehnung und/oder einer Stauchung eines Koerpers
Hillerich, B.; Feil, M.; Seitz, S. | Patent |
| 2000 | Elektrostatisch durchstimmbare Kapazitaet und Verfahren zum Herstellen derselben
Schiele, I.; Engelke, O.; Hillerich, B. | Patent |
| 2000 | Long-time stability of photoluminescence in porous silicon
Fischer, M.; Hillerich, B.; Kozlowski, F. | Journal Article |
| 2000 | Mikromechanische Transmissionsmesszelle
Woias, P.; Hillerich, B. | Patent |
| 1999 | Auswerteschaltung zur Ermittlung komplexer Impedanzen, Vorrichtung zur Messung komplexer Impedanzen und Verwendung der Vorrichtung
Hillerich, B.; Leidl, A.; Haerle, T. | Patent |
| 1999 | Comparison of lateral and vertical switches for application as microrelay
Schiele, I.; Hillerich, B. | Journal Article |
| 1999 | Flow-through system for capillary enzyme immunoassays
Yacoub-George, E.; Meixner, L.; Baumann, M.; Koch, S.; Drost, S.; Hillerich, B.; Wolf, H. | Conference Paper |
| 1999 | A novel flow sensor with high time resolution based on differential pressure principle
Richter, M.; Wackerle, L.; Woias, P.; Hillerich, B. | Conference Paper |
| 1999 | Self-aligned positioning of microoptical components by precision prismatic grooves impressed into metals
Rode, M.; Hillerich, B. | Journal Article |
| 1999 | Sensorelement und Vorrichtung zur Messung komplexer Impedanzen sowie Verwendung der Vorrichtung
Hillerich, B.; Haerle, T.; Leidl, A. | Patent |
| 1999 | A silicon micropump with a high bubble tolerance and self-priming capability
Woias, P.; Linnemann, R.; Richter, M.; Leistner, A.; Hillerich, B. | Conference Paper |
| 1999 | Vorrichtung und Verfahren zur Ermittlung der Tragfaehigkeit von Schmieroelen
Hillerich, B.; Mueller, R. | Patent |
| 1999 | Vorrichtung zur Erfassung von diffus emittiertem Licht
Hillerich, B.; Wörmann, W. | Patent |
| 1998 | Application of bioactive layers for chemical sensors and analysis systems
Drost, S.; Hauck, S.; Yacoub-George, E.; Wolf, H.; Koch, S.; Kößlinger, C.; Hillerich, B.; Hieber, K. | Conference Paper |
| 1998 | Comparison of lateral and vertical switches for application as microrelay
Schiele, I.; Vogel, S.; Hillerich, B.; Kozlowski, F. | Conference Paper |
| 1998 | Directly heated quartz crystal microbalance with an integrated dielectric sensor
Roth, M.; Dera, T.; Hillerich, B.; Drost, A.; Hartinger, R.; Wendler, F.; Endres, H.-E. | Conference Paper |
| 1998 | Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F. | Conference Paper |
| 1998 | Novel microstructuring technologies in silicon
Hillerich, B.; Pradel, H.; Schaber, U.; Vogel, S. | Conference Paper |
| 1998 | On the static and dynamic behaviour of an electrostatically movable plate actuator
Kluge, S.; Klink, G.; Biller, M.; Hillerich, B.; Woias, P. | Conference Paper |
| 1998 | Precision embossing of grooves in metallic substrates for self-aligned positioning of microoptical components
Hillerich, B.; Rode, M. | Conference Paper |
| 1998 | SAW transducers for gas detection with an integrated heating element
Leidl, A.; Zweimüller, T.; Hartinger, R.; Roth, M.; Endres, H.-E.; Hillerich, B. | Conference Paper |
| 1998 | SIA-optical immunosensor
Yacoub-George, E.; Drost, S.; Hillerich, B.; Wolf, H.; Koch, S.; Meixner, L.; Baumann, M. | Conference Paper |
| 1998 | Surface-micromachined electrostatic microrelay
Schiele, I.; Huber, J.; Hillerich, B.; Kozlowski, F. | Conference Paper |
| 1998 | Wafer bonding with an adhesive coating
Klink, G.; Hillerich, B. | Conference Paper |
| 1997 | Directly heated quartz crystal microbalance with an integrated dielectric sensor
Roth, M.; Dera, T.; Hillerich, B.; Drost, A.; Hartinger, R.; Wendler, F.; Endres, H.-E. | Conference Paper |
| 1997 | Efficient design and optimization of a silicon capacitive accelerometer by integrating commercial simulation tools
Trost, M.; Nagler, O.; Lindmair, N.; Hillerich, B.; Kozlowski, F. | Conference Paper |
| 1997 | Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F. | Conference Paper |
| 1997 | Kapazitive Abstandsregelung für das Schweißen mit ND: YAG-Lasern an dreidimensionalen Geometrien
Hillerich, B.; Spörl, G.; Overmeyer, L.; Schumacher, J. | Journal Article |
| 1997 | Micromechanical relay with electrostatic actuation
Schiele, I.; Hillerich, B.; Kozlowski, F.; Evers, C. | Conference Paper |
| 1997 | Mikropumpe für Flüssigkeiten und Gase
Linnemann, R.; Richter, M.; Kluge, S.; Woias, P.; Hillerich, B. | Journal Article |
| 1997 | Porous silicon as a novel microstructure technology
Pradel, H.; Mayer, U.; Hillerich, B.; Kozlowski, F. | Conference Paper |
| 1997 | Prozeßdiagnostik beim Laserstrahlschweißen durch kapazitive Abstandssensorik
Hillerich, B.; Schumacher, J.; Alvensleben, F. von | Journal Article |
| 1997 | Surface-micromachined electrostatic microrelay
Schiele, I.; Hillerich, B.; Evers, C.; Kozlowski, F. | Conference Paper |
| 1996 | 980 nm/1480 nm-pumped Erbium-doped fiber amplifier optimized for AM video distribution systems
Hillerich, B.; Holz, M. | Journal Article |
| 1996 | Dynamikmeßverfahren für Abstandssensoren
Schoch, M.; Hatwig, A.; Hillerich, B. | Journal Article |