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| 2020 | 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride
Meinel, K.; Melzer, M.; Stoeckel, C.; Shaporin, A.; Forke, R.; Zimmermann, S.; Hiller, K.; Otto, T.; Kuhn, H. | Journal Article |
| 2020 | Ausgewählte Anwendungsbeispiele der Magnetresonanz in der zerstörungsfreien Materialprüfung
Haddad, D.; Mörchel, P.; Hildenbrand, M.; Hiller, K.-H. | Journal Article |
| 2020 | Co-sputtering of Al1−xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies
Solonenko, D.; Lan, C.; Schmidt, C.; Stoeckel, C.; Hiller, K.; Zahn, D.R.T. | Journal Article |
| 2020 | The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering
Solonenko, D.; Schmidt, C.; Stoeckel, C.; Hiller, K.; Zahn, D.R.T. | Journal Article |
| 2020 | Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride
Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T. | Journal Article |
| 2020 | Tailoring magnetic supraparticles for object identification by magnetic particle spectroscopy
Müssig, Stephan; Fidler, Florian; Haddad, Daniel; Hiller, Karl-Heinz; Wintzheimer, Susanne; Mandel, Karl | Journal Article |
| 2019 | Beschleunigungssensoren mit großer Bandbreite und geringer Leistungsaufnahme für industrielle Anwendungen
Forke, R.; Hiller, K.; Küchler, M.; Hahn, S.; Weidlich, S.; Konietzka, S.; Motl, T.; Praedicow, A.; Otto, T. | Conference Paper |
| 2019 | Design, Modeling, Fabrication, and Verification of New Multifunctional MEMS/NEMS Components
Freitag, M.; Sauppe, M.; Auerswald, C.; Kriebel, D.; Schmidt, H.; Voigt, S.; Arnold, B.; Markert, E.; Hahn, S.; Hiller, K.; Heinkel, U.; Mehner, J. | Journal Article |
| 2019 | Development of a multi-sensor system for condition monitoring and crash detection of machine tools with rotating spindles
Meinecke, C.; Clauss, B.; Albers, J.; Hoeller, H.; Streit, P.; Forke, R.; Weidlich, S.; Dittrich, C.; Stritzke, B.; Schubert, A.; Hiller, K.; Reuter, D. | Conference Paper |
| 2019 | Herstellung von neuartigen Reflektorsystemen und Erarbeitung einer systembezogenen Integrationstechnologie für VIS und IR Fabry-Pérot Interferometer (Dissertation)
Helke, C.
: Hiller, K.; Sinzinger, S. | Dissertation |
| 2019 | Highly Miniaturized MEMS‐Based Test Platforms for Thermo‐Mechanical and Reliability Characterization of Nano‐Functional Elements - Technology and Functional Test Results
Meszmer, P.; Hahn, S.; Hiller, K.; Wunderle, B. | Journal Article |
| 2019 | Integration of plasmonic nanostructures for micro-opto-electromechanical-systems
Heldt, G.; Weiss, A.; Helke, C.; Erben, J.; Kurth, S.; Meinig, M.; Martin, J.; Hiller, K.; Reuter, D.; Otto, T. | Conference Paper |
| 2019 | Low Power High Bandwidth Acceleration Sensor for Industrial Applications
Forke, R.; Hiller, K.; Hahn, S.; Weidlich, S.; Konietzka, S.; Motl, T.; Praedicow, A.; Otto, T. | Conference Paper |
| 2019 | A MEMS IR optical chopper based on subwavelength structures
Kurth, S.; Meinig, M.; Wecker, J.; Seifert, M.; Hiller, K.; Otto, T. | Conference Paper |
| 2019 | Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Filter
Hiller, K.; Helke, C.; Seifert, M.; Seiler, J.; Kurth, S.; Meinig, M.; Otto, T. | Conference Paper |
| 2019 | Nanostructured al SWG Reflectors on thin LP-Si3N4 membranes as (TiO2/SiO2)³ Bragg reflector alternative for VIS Fabry-Pérot Interferometers
Helke, C.; Hiller, K.; Seiler, J.; Erben, J.; Werner, T.; Reuter, D.; Meinig, M.; Kurth, S.; Otto, T. | Conference Paper |
| 2019 | Next Generation of highly miniaturized Bulk-MEMS Fabry-Pérot Filters for infrared Microspectrometers
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Seiler, J.; Helke, C.; Meinig, M.; Kurth, S. | Conference Paper |
| 2019 | Sensoric Micro and Nano Systems. Editorial
Zahn, D.R.T.; Schulz, S.E.; Hiller, K.; Wagner, C.; Reuter, D.; Otto, T. | Journal Article |
| 2019 | Supraparticles with a Magnetic Fingerprint Readable by Magnetic Particle Spectroscopy: An Alternative beyond Optical Tracers
Müssig, Stephan; Fidler, Florian; Haddad, Daniel; Hiller, Karl‐Heinz; Wintzheimer, Susanne; Mandel, Karl | Journal Article |
| 2019 | VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)3 Bragg-reflectors on 5mm large LP-Si3N4 membranes
Helke, C.; Hiller, K.; Seiler, J.; Werner, T.; Meinig, M.; Kurth, S.; Otto, T. | Conference Paper |
| 2018 | 3D-Packaging-Technologien zur Herstellung intelligenter medizinischer Implantate
Wuensch, D.; Schroeder, T.; Baum, M.; Hiller, K.; Forke, R.; Wiemer, M.; Weidenmueller, J.; Dogan, O.; Goertz, M. | Conference Paper |
| 2018 | Entwicklung von Schwingungssensoren auf MEMS-Basis für Condition Monitoring Systeme im Maschinen- und Anlagenbau
Dittrich, C.; Forke, R.; Hiller, K.; Kreutziger, P.; Kuerschner, R.; Meinecke, C.; Reuter, D.; Weidlich, S.; Streit, P.; Hahn, S. | Conference Paper |
| 2018 | Integrated Microsystems for Smart Applications
Otto, T.; Kurth, S.; Voigt, S.; Morschhauser, A.; Meinig, M.; Hiller, K.; Martin, J.; Vogel, M. | Journal Article |
| 2018 | Leitfaden zur Bildverarbeitung in der zerstörungsfreien Prüfung
Aderhold, Jochen; Beran, Philip; Ernst, Jürgen; Getto, Sascha; Goetz, Jürgen; Hanke, Randolf; Hartrumpf, Matthias; Heinrich, Matthias; Hildenbrand, Markus; Hiller, Karl-Heinz; Jonuscheit, Joachim; Jungmann, Christian; König, Niels; Koster, Dirk; Krause, Julius; Lugin, Sergey; Meinlschmidt, Peter; Meyer, Johannes; Movahed, Ali; Mörchel, Philipp; Negara, Christian; Nüßler, Dirk; Oswald, Jan; Rabe, Ute; Rick, Rainer; Salamon, Michael; Schöberl, Michael; Henning, Schulte; Spies, Martin; Szielasko, Klaus; Tschuncky, Ralf; Valeske, Bernd; Waschkies, Thomas
: Sackewitz, Michael | Book |
| 2018 | Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Komponenten
Hiller, K.; Helke, C.; Seifert, M.; Seiler, J.; Kurth, S.; Meinig, M.; Wecker, J. | Conference Paper |
| 2018 | Reliability testing of integrated low-temperature PVD PZT films
Monteiro Diniz Reis, D.; Rzepka, S.; Hiller, K. | Journal Article, Conference Paper |
| 2017 | 3D packaging technologies for smart medical implants
Schröder, Tim; Wünsch, Dirk; Baum, Mario; Hiller, Karla; Wiemer, Maik; Otto, Thomas; Weidenmüller, Jens; Dogan, Özgü; Utz, Alexander; Görtz, Michael | Conference Paper |
| 2017 | Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: An example for Match 1:1-, eBeam-, and nanoimprint lithography
Helke, C.; Hiller, K.; Erben, J.W.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T. | Conference Paper |
| 2017 | Determination of the mesio-distal tooth width via 3D imaging techniques with and without ionizing radiation: CBCT, MSCT, and µCT versus MRI
Detterbeck, Andreas; Hofmeister, Michael; Haddad, Daniel; Weber, Daniel; Schmid, Matthias; Hölzing, Astrid; Zabler, Simon; Hofmann, Elisabeth; Hiller, Karl-Heinz; Jakob, Peter; Engel, Jems; Hiller, Jochen; Hirschfelder, Ursula | Journal Article |
| 2017 | Determination of the total circulating blood volume using magnetic particle spectroscopy
Weigl, Franziska; Seifert, Annika; Kraupner, Alexander; Jakob, Peter M.; Hiller, Karl-Heinz; Fidler, Florian | Journal Article |
| 2017 | Development of metal oxide processes for highly conformal thin layers by plasma enhanced atomic layer deposition
Kia, Alireza Mohammadian
: Hiller, Karla (Betreuer); Weinreich, Wenke (Betreuer) | Master Thesis |
| 2017 | Filling of high aspect ratio (HAR) nanometer-scale silicon trenches by electrochemical deposition of nickel
Hofmann, C.; Kurth, F.; Wiemer, M.; Otto, T.; Hiller, K. | Conference Paper |
| 2017 | HED-TIE: A wafer-scale approach for fabricating hybrid electronic devices with trench isolated electrodes
Banerjee, S.; Bülz, D.; Solonenko, D.; Reuter, D.; Deibel, C.; Hiller, K.; Zahn, D.R.T.; Salvan, G. | Journal Article |
| 2017 | Implantable hemodynamic controlling system with a highly miniaturized two axis acceleration sensor
Baum, Mario; Wünsch, Dirk; Hiller, Karla; Forke, Roman; Schröder, Tim; Weidlich, Sebastian; Hahn, Susann; Reuter, Danny; Wiemer, Maik; Weidenmüller, Jens; Dogan, Özgü; Görtz, Michael; Otto, Thomas | Conference Paper |
| 2017 | In vivo T2* weighted MRI visualizes cardiac lesions in murine models of acute and chronic viral myocarditis
Helluy, Xavier; Sauter, Martina; Ye, Yu-Xiang; Lykowsky, Gunthard; Kreutner, Jakob; Yilmaz, Ali; Jahns, Roland; Boivin, Valerie; Kandolf, Reinhard; Jakob, Peter M.; Hiller, Karl-Heinz; Klingel, Karin | Journal Article |
| 2017 | Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers
Helke, C.; Hiller, K.; Werner, T.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T. | Conference Paper |
| 2017 | Light-induced magnetoresistance in solution-processed planar hybrid devices measured under ambient conditions
Banerjee, S.; Bülz, D.; Reuter, D.; Hiller, K.; Zahn, D.R.T.; Salvan, G. | Journal Article |
| 2017 | Results of multi-mass high precision vibratory MEMS gyroscopes for two types of system approaches
Popova, I.; Lestev, A.; Fedorov, M.; Rakityansky, O.; Ivanov, V.; Semenov, A.; Forke, R.; Shaporin, A.; Hiller, K.; Koehler, D.; Konietzka, S. | Conference Paper |
| 2016 | A highly miniaturized two-axis acceleration sensor for implantable hemody-namic controlling system
Wünsch, Dirk; Hiller, Karla; Forke, Roman; Baum, Mario; Wiemer, Maik; Geßner, Thomas; Görtz, Michael; Weidenmüller, Jens; Dogan, Özgü | Abstract |
| 2016 | MEMS tunable Fabry-Pérot filters for infrared microspectrometer applications
Neumann, N.; Ebermann, M.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S. | Conference Paper |
| 2016 | MRI vs. CT for orthodontic applications: Comparison of two MRI protocols and three CT (multislice, cone-beam, industrial) technologies
Detterbeck, Andreas; Weber, Daniel; Haddad, Daniel; Hoelzing, Astrid; Zabler, Simon; Hofmeister, Michael; Hoffmann, Elisabeth; Hiller, Jochen; Engel, Jens; Hiller, Karl-Heinz; Jakob, Peter; Hirschfelder, Ursula | Journal Article |
| 2016 | Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers
Meinig, M.; Kurth, S.; Seifert, M.; Hiller, K.; Wecker, J.; Ebermann, M.; Neumann, N.; Gessner, T. | Conference Paper |
| 2016 | Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: A review
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S. | Conference Paper |
| 2016 | VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy
Helke, C.; Meinig, M.; Seifert, M.; Seiler, J.; Hiller, K.; Kurth, S.; Martin, J.; Gessner, T. | Conference Paper |
| 2015 | Comparative analysis of multi-mass high precision vibratory MEMS gyroscopes
Popova, I.; Lestev, A.; Fedorov, M.; Rakityansky, O.; Ivanov, V.; Semenov, A.; Hiller, K.; Hahn, S.; Gessner, T. | Conference Paper |
| 2015 | Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration
Meinig, M.; Kurth, S.; Helke, C.; Seifert, M.; Hiller, K.; Ebermann, M.; Neumann, N.; Gessner, T. | Conference Paper |
| 2015 | A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
Ebermann, M.; Neumann, N.; Binder, S.; Meinig, M.; Seifert, M.; Kurth, S.; Hiller, K. | Conference Paper |
| 2015 | Modulare aktive Probecard zur Systemcharakterisierung von mikro-elektromechanischen Sensoren am Beispiel von Gyroskopen
Weidlich, S.; Forke, R.; Billep, D.; Konietzka, S.; Koehler, D.; Hiller, K.; Gessner, T. | Conference Paper |
| 2015 | Smart systems integration. Short review and further development of smart systems
Gessner, T.; Vogel, M.; Hiller, K.; Otto, T.; Kurth, S.; Nestler, J.; Köhler, T. | Book Article |
| 2015 | Stem cell vitality assessment using magnetic particle spectroscopy
Fidler, F.; Steinke, M.; Kraupner, A.; Grüttner, C.; Hiller, K.-H.; Briel, A.; Westphal, F.; Walles, H.; Jakob, P.M. | Journal Article |
| 2015 | Subwavelength Grating Reflectors for Fabrication Cost Reduction of Fabry-Perot Infrared Filters
Rupprecht, J.; Kurth, S.; Hiller, K.; Seifert, M.; Besser, J.; Meinig, M.; Ebermann, M.; Neumann, N.; Gessner, T. | Conference Paper, Journal Article |
| 2015 | TSCuPc/Au hybrid trench devices. A comparative study of solution processed and thermally evaporated molecular channels
Banerjee, S.; Bülz, D.; Reuter, D.; Hiller, K.; Gessner, T.; Salvan, G.; Zahn, D.R.T. | Abstract |
| 2015 | Yet another tuning fork gyroscope
Forke, R.; Hiller, K.; Hahn, S.; Konietzka, S.; Motl, T.; Köhler, D.; Heinz, S.; Billep, D.; Gessner, T. | Conference Paper |
| 2014 | Development and Characterization of a High Voltage Amplifier ASIC for MEMS based Piezoelectric Actuator Active Flow Control
Köhler, D.; Seidel, R.; Helke, C.; Hiller, K.; Schüller, M.; Lipowski, M. | Conference Paper |
| 2014 | Entwicklung eines experimentellen Aufbaus zur Systemcharakterisierung von MEMS Gyroskopen auf Waferlevel
Weidlich, S.; Forke, R.; Konietzka, S.; Hiller, K.; Gessner, T. | Conference Paper |
| 2014 | High precision vibratory MEMS gyroscope
Billep, D.; Hiller, K.; Hahn, S.; Forke, R.; Köhler, D.; Stöckel, C.; Konietzka, S.; Heinz, S. | Book Article |
| 2014 | High Voltage Amplifier ASIC for High Capacitive Load MEMS based Piezoelectric Actuators
Köhler, D.; Seidel, R.; Helke, C.; Hiller, K.; Schüller, M.; Lipowski, M. | Conference Paper |
| 2014 | Organic lateral trench devices fabricated by trench technology
Banerjee, S.; Richter, P.; Buelz, D.; Reuter, D.; Hiller, K.; Gessner, T.; Zahn, D.R.T.; Salvan, G. | Abstract |
| 2014 | Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S. | Conference Paper |
| 2014 | Smart monitoring systems for a green future
Saupe, R.; Stock, V.; Otto, T.; Kurth, S.; Hiller, K.; Meinig, M.; Neumann, N.; Gessner, T. | Conference Paper |
| 2014 | Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture
Kurth, S.; Hiller, K.; Meinig, M.; Besser, J.; Seifert, M.; Ebermann, M.; Neumann, N.; Schlachter, F.; Gessner, T. | Conference Paper |
| 2014 | Technology approaches for tuneable IR Fabry-Perot-Filters applied in gas sensing microspectrometers
Hiller, K.; Meinig, M.; Kurth, S.; Seifert, M.; Helke, C.; Neumann, N.; Ebermann, M. | Book Article |
| 2013 | Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics
Koehler, D.; Hiller, K.; Forke, R.; Konietzka, S.; Pohle, A.; Billep, D.; Heinz, S.; Lange, A. | Conference Paper |
| 2013 | Erweiterungen und Anwendungen der BDRIE-Technologie zur Herstellung hermetisch gekapselter Sensoren mit hoher Güte
Hiller, K.; Hahn, S.; Kuechler, M.; Billep, D.; Forke, R.; Koehler, D.; Konietzka, S.; Pohle, A.; Gessner, T. | Conference Paper |
| 2013 | Laterally stacked organic devices fabricated by trench technology
Reuter, D.; Banerjee, S.; Fronk, M.; Salvan, G.; Hiller, K.; Zahn, D.R.T.; Gessner, T. | Conference Paper |
| 2013 | Picosecond Laser Micromachining in the context of MEMS/NEMS applications
Enderlein, T.; Helke, C.; Hiller, K.; Nestler, J.; Schueller, M.; Geidel, S.; Otto, T.; Gessner, T. | Conference Paper |
| 2013 | Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments
Schondelmaier, G.; Hartmann, S.; May, D.; Shaporin, A.; Voigt, S.; Rodriguez, R.D.; Gordan, O.D.; Zahn, D.R.T.; Mehner, J.; Hiller, K.; Wunderle, B. | Conference Paper |
| 2013 | Smart systems for a better life
Gessner, T.; Vogel, M.; Nestler, J.; Hiller, K.; Kurth, S.; Otto, T. | Conference Paper |
| 2012 | Bonding technologies for standard bulk PZT ceramics without the need of after process-polarization especially on thin silicon membranes
Helke, C.; Schueller, M.; Hiller, K.; Schulze, R.; Braeuer, J.; Nestler, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Design and manufacturing of micro synthetic jet actuators
Gebauer, C.; Schueller, M.; Hiller, K.; Schulze, R.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics
Koehler, D.; Hiller, K.; Forke, R.; Konietzka, S.; Pohle, A.; Billep, D.; Heinz, S.; Lange, A. | Conference Paper |
| 2012 | Fabry-Perot tunable infrared filter based on structured reflectors
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Specht, H.; Meinig, M.; Gessner, T. | Conference Paper |
| 2012 | Spektral abstimmbare IR-Sensoren für die industrielle Prozessmesstechnik und die medizinische Gasanalyse
Ebermann, M.; Neumann, N.; Hiller, K.; Meinig, M. | Journal Article |
| 2012 | Tunable Fabry-Pérot Interferometers for Infrared Spectroscopy
Kurth, S.; Hiller, K.; Meinig, M.; Gessner, T. | Book Article |
| 2012 | Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S. | Conference Paper |
| 2011 | Application of sub-wavelength structures in infrared optical filters
Kurth, S.; Seifert, M.; Zajadacz, J.; Ebermann, M.; Hiller, K.; Neumann, N.; Gessner, T. | Conference Paper |
| 2011 | Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
Meinig, M.; Ebermann, M.; Neumann, N.; Kurth, S.; Hiller, K.; Gessner, T. | Conference Paper |
| 2011 | Neuartiger frequenz- und amplitudenabstimmbarer Infrarotfilter
Specht, H.; Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Neumann, N.; Gittler, E.; Gessner, T. | Conference Paper |
| 2011 | Robust design of MEMS structures
Hofmann, K.; Billep, D.; Forke, R.; Hiller, K.; Gessner, T. | Conference Paper |
| 2011 | Tiny MID- and long-wave infrared spectrometer module with a MEMS dual-band Fabry-Pérot filter
Ebermann, M.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.; Neumann, N. | Conference Paper |
| 2011 | Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
Ebermann, M.; Neumann, N.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E. | Conference Paper |
| 2011 | Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Meinig, M.; Kurth, S.; Hiller, K.; Neumann, N.; Ebermann, M.; Gittler, E.; Gessner, T. | Conference Paper |
| 2010 | Challenges of smart system integration
Gessner, T.; Vogel, M.; Hiller, K.; Otto, T.; Bertz, A.; Billep, D. | Conference Paper |
| 2010 | Entwurf und Technologie eines Dualband Fabry-Pérot-Filters für den mittleren Infrarotbereich mit zwei beweglichen Reflektoren
Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Gittler, E.; Gessner, T. | Conference Paper |
| 2010 | Gütebestimmung von MEMS-Strukturen im Zeitbereich mittels Laser Doppler Vibrometer und einem Logarithmierer
Voigt, S.; Tenholte, D.; Franke, D.; Reuter, D.; Hiller, K.; Gessner, T.; Mehner, J. | Conference Paper |
| 2010 | A method for the fabrication of extra-thin silicon substrates
Jia, C.; Hiller, K.; Wiemer, M.; Reuter, D.; Gessner, T. | Conference Paper |
| 2010 | Micro/nano technologies towards smart systems integration
Gessner, T.; Vogel, M.; Kaufmann, C.; Hiller, K.; Kurth, S.; Nestler, J.; Otto, T. | Conference Paper |
| 2010 | Mikro- und Nanotechnologien für Smart Integrated Systems
Gessner, T.; Vogel, M.; Schulz, S.E.; Wiemer, M.; Hiller, K.; Kurth, S. | Journal Article |
| 2010 | Miniaturisiertes Spektrometermodul für den mittleren und langwelligen Infrarotbereich mit mikromechanischem Dual-Band Fabry-Pérot Filter
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S. | Conference Paper |
| 2010 | Nanostrukturierte Breitbandreflektoren und deren Anwendung in abstimmbaren mikromechanischen Infrarot-Filtern
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadacz, J.; Gessner, T. | Conference Paper |
| 2010 | Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Auerswald, J.; Knapp, H.F.; Gavillet, J.; Gessner, T. | Conference Paper, Journal Article |
| 2010 | Recent advances in expanding the spectral range of MEMS Fabry-Pérot filters
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S. | Conference Paper |
| 2010 | Smart Integrated Systems - Developments of Fraunhofer ENAS
Vogel, M.; Hiller, K.; Bertz, A.; Wiemer, M.; Gessner, T. | Book Article |
| 2010 | Subwavelength structures for infrared filtering
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadacz, J.; Gessner, T. | Conference Paper |
| 2010 | Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
Neumann, N.; Ebermann, M.; Gittler, E.; Meinig, M.; Kurth, S.; Hiller, K. | Conference Paper |
| 2009 | Coplanar electromagnetic signal coupler for wafer-scale packaging of RF-MEMS devices
Leidich, S.; Voigt, S.; Hiller, K.; Gessner, T. | Journal Article |
| 2009 | Design, operation and performance of a Fabry-Perot based MWIR micro spectrometer
Ebermann, M.; Neumann, N.; Hiller, K.; Kurth, S. | Conference Paper |
| 2009 | Novel MWIR microspectrometer based on a tunable detector
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S. | Conference Paper |
| 2009 | Technologies and MEMS sensor solutions for smart integrated systems
Hiller, K.; Kurth, S.; Bertz, A.; Gessner, T. | Journal Article |
| 2008 | An all-polymer microfluidic system for protein sensing applications with integrated Iow-cost pumps, surface modification and sealing
Nestler, J.; Hiller, K.; Gessner, T.; Gavillet, J.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S.; Beckers, M.-C. | Conference Paper |
| 2008 | Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Doetzel, W.; Mehner, J. | Journal Article |
| 2008 | Fabrication of a low-frequency ultrasonic transducer
Jia, C.; Wiemer, M.; Hiller, K.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Low-cost micro valves based on electrolysis inside hydrogels
Nestler, J.; Hiller, K.; Morschhauser, A.; Schüller, M.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Low-cost, fully integrated liquid handling platform for protein assays
Nestler, J.; Hiller, K.; Morschhauser, A.; Bigot, S.; Griffiths, C.; Auerswald, J.; Gavillet, J.; Nonglaton, G.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Micro Actuators based on Structured Water
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T. | Journal Article |
| 2008 | Microfluidic cartridge with integrated pumps and liquid position feedback design for running protein assays
Nestler, J.; Enderlein, T.; Hiller, K.; Otto, T.; Gessner, T.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S. | Conference Paper |
| 2008 | Nanostructured polymer thin films: Application to biosensors
Gavillet, J.; Getin, S.; Quesnel, E.; Martin, S.; Gelapierre, G.; Hiller, K.; Nestler, J.; Gessner, T.; Soechtig, J.; Voirin, G.; Buergi, L.; Auerswald, J.; Knapp, H.F.; Ross, S.; Bigot, S.; Ehrat, M.; Lieb, A.; Beckers, M.-C.; Dresse, D. | Conference Paper |
| 2008 | Reliability of MEMS devices in shock and vibration overload situations
Kurth, S.; Shaporin, A.; Hiller, K.; Kaufmann, C.; Gessner, T. | Conference Paper |
| 2008 | Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Kurth, S.; Hiller, K. | Journal Article |
| 2007 | Acceleration Sensor Arrays
Dienel, M.; Hiller, K.; Gessner, T.; Dötzel, W. | Conference Paper |
| 2007 | Arrays of Sensors with Variable Stiffness
Shaporin, A.V.; Seifert, M.; Hanf, M.; Hiller, K.; Frühauf, J.; Gessner, T.; Dötzel, W. | Conference Paper |
| 2007 | Bonding of glass chip based SPR sensors to thermoplastic microfluidic scaffolds
Auerswald, J.; Niedermann, P.; Dias, F.; Keppner, H.; Bigot, S.; Beckers, M.-C.; Nestler, J.; Hiller, K.; Gessner, T.; Knapp, H.F. | Conference Paper |
| 2007 | Bulksiliziummikromechanik, Entwicklungstendenzen und Beispiele
Wiemer, M.; Frömel, J.; Hiller, K.; Reuter, D.; Jia, C. | Conference Paper |
| 2007 | Electrochemical microfluidic pumps based on super absorbing polymers
Nestler, J.; Morschhauser, A.; Hiller, K.; Bigot, S.; Auerswald, J.; Gavillet, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Fully integrated polymer based microfluidic pumps and valves in Lab-on-Chip systems for Point-of-Care use
Nestler, J.; Morschhauser, A.; Hiller, K.; Auerswald, J.; Knapp, H.F.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Integration aspects of a polymer based SPR biosensor with active micro optical and micro fluidic elements
Hiller, K.; Nestler, J.; Gessner, T.; Gavillet, J.; Getin, S.; Quesnel, E.; Martin, S.; Delapierre, G.; Soechtig, J.; Voirin, G.; Buergi, L.; Auerswald, J.; Knapp, H.F.; Stanley, R.; Bigot, S.; Dimov, S.; Ehrat, M.; Lieb, A.; Beckers, M.-C.; Dresse, D.; Victor-Pujebet, E. | Conference Paper |
| 2007 | Low-Temperature Ti-Si bonding and its application in micro-device fabrication
Jia, C.; Hiller, K.; Wiemer, M.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Polymer Lab-on-Chip systems with integrated electrochemical pumps
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Gessner, T. | Conference Paper |
| 2007 | Spektrale Vibrationsmessung mit mikromechanischen kraftgekoppelten Silizium-Schwingern
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Dötzel, W.; Mehner, J. | Conference Paper |
| 2007 | Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S. | Conference Paper |
| 2006 | MEMS Vakuumsensor nach dem Reibungsprinzip
Kurth, S.; Tenholte, D.; Hiller, K.; Kaufmann, C.; Gessner, T.; Dötzel, W. | Patent |
| 2006 | Microfluidic bubble actuators based on hydrogels
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T. | Conference Paper |
| 2006 | Microwave phase shifter with electromagnetic signal coupling in silicon bulk technology
Leidich, S.; Voigt, S.; Kurth, S.; Hiller, K.; Gessner, T. | Journal Article |
| 2006 | Smart Systems Integration - Eine Herausforderung für zukünftige Mikro- und Nanotechnologien
Gessner, T.; Baum, M.; Hiller, K.; Mehner, J.; Wiemer, M.; Otto, T.; Saupe, R.; Nestler, J. | Conference Paper |
| 2005 | Bonding and Deep RIE - A powerful combination for high aspect ratio sensors and actuators
Hiller, K.; Küchler, M.; Billep, D.; Schröter, B.; Dienel, M.; Scheibner, D.; Gessner, T. | Conference Paper |
| 2005 | Micromachined mid-infrared tunable Fabry-Perot filter
Neumann, N.; Hiller, K.; Kurth, S. | Conference Paper |
| 2005 | Mikromechanisches durchstimmbares Fabry–Perot-Filter für die IR-Gasanalytik
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S. | Journal Article |
| 2005 | Model building, control design and practical implementation of a high precision, high dynamical MEMS acceleration sensor
Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2005 | Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement
Billep, D.; Hiller, K.; Frömel, J.; Tenholte, D.; Reuter, D.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2004 | MEMS Metallization
Lohmann, C.; Gottfried, K.; Bertz, A.; Reuter, D.; Hiller, K.; Kuhn, M.; Gessner, T. | Conference Paper |
| 2004 | A novel microactuator based on the working principle of a step-by-step switchgear
Schröter, B.; Mehner, J.; Hiller, K.; Geßner, T.; Dötzel, W. | Conference Paper |
| 2003 | Advanced silicon micromachining
Geßner, T.; Bertz, A.; Lohmann, C.; Kurth, S.; Hiller, K. | Journal Article |
| 2003 | Application of low temperature direct bonding in optical devices and integrated systems
Hiller, K.; Kurth, S.; Neumann, N.; Hahn, R.; Kaufmann, C.; Hanf, M.; Heinz, S.; Geßner, T.; Dötzel, W.; Ebest, G. | Conference Paper |
| 2003 | Closed loop control of a tunable infrared filter
Sternberger, A.; Hiller, K.; Geßner, T.; Dötzel, W.; Kurth, S.; Neumann, N.; Heinze, M. | Conference Paper |
| 2003 | An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2003 | Ein mikromechanisches, durchstimmbares Fabry-Perot-Filter für die nichtdispersive Gasanalytik im Spektralbereich (3 5) µm
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S. | Presentation |
| 2003 | Tunable Fabry-Perot interferometer for 3 - 4.5 mu m wavelength with bulk micromachined reflector carrier
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2003 | Tunable infrared filter based on a Fabry-Perot-Interferometer
Kurth, S.,; Hiller, K.; Dötzel, W.; Geßner, T.; Neumann, N.; Heinze, M. | Conference Paper |
| 2001 | Application of high and low wafer bonding processes for bulk micromachined components
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Gessner, T. | Conference Paper |
| 2001 | Bulk micromachined and wafer bonded resonators for vacuum pressure measurement
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S. | Conference Paper |
| 2001 | Einsatz von Niedertemperaturbondverfahren für die Fertigung von Sensoren
Wiemer, M.; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2001 | Einsatzerfahrungen mit einer Multiplex-Ätzanlage für tiefes Siliziumätzen
Küchler, M.; Hiller, K.; Hahn, R.; Bertz, A.; Gessner, T. | Conference Paper |
| 2001 | Implementation of a low temperature wafer bonding process for acceleration sensors
Wiemer, M.; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2001 | Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2001 | Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S. | Conference Paper |
| 2001 | Silicon oxide in Si-Si bonded wafers
Himcinschi, C.; Milekhin, A.; Friedrich, M.; Hiller, K.; Wiemer, M.; Gessner, T.; Schule, S.; Zahn, D.R.T. | Journal Article |
| 2000 | Investigation of bonding behaviour of different borosilicate glasses
Wiemer, M.; Hiller, K.; Gessner, T.; Kloss, T.; Schneider, K.; Leipold-Haas, U.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2000 | Patterning of SOI-materials for fabrication of resonator systems using waferbonding approaches
Wiemer, M.; Hiller, K.; Gessner, T. | Conference Paper |
| 1999 | Advanced silicon bulk micromachining for angular rate sensor
Wiemer, M.; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W. | Conference Paper |
| 1999 | Anwendung von Niedertemperatur-Bondverfahren für die Herstellung von Microscanner-Arrays hoher Frequenz
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W. | Conference Paper |
| 1999 | µCORS - a bulk micromachined gyroscope based on coupled resonators
Breng, U.; Gutmann, W.; Leinfelder, P.; Ryrko, B.; Zimmermann, S.; Billep, D.; Gessner, T.; Hiller, K.; Wiemer, M. | Conference Paper |
| 1999 | Extending speckle pattern interferometry for use on a microscopic scale
Aswendt, P.; Höfling, R.; Hiller, K.; Wiemer, M. | Conference Paper |
| 1999 | Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
Hiller, K.; Wiemer, M.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Milekhin, A.; Friedrich, M.; Zahn, D. | Conference Paper |
| 1999 | Infrared study of the Si surfaces and bonded Si wafers
Milekhin, A.; Friedrich, M.; Wiemer, M.; Hiller, K.; Gessner, T.; Zahn, D.R.T. | Journal Article |
| 1999 | Infrared study of the Si surfaces and buried interfaces
Milekhin, A.; Friedrich, M.; Wiemer, M.; Hiller, K.; Gessner, T.; Zahn, D.R.T. | Conference Paper |
| 1999 | Kapazitiver Drehratensensor auf der Basis einer Stimmgabel mit gekoppeltem Resonator
Wiemer, M.; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W. | Conference Paper |
| 1999 | Low-temperature approaches for fabrication of high-frequency microscanners
Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Wiemer, M.; Schubert, I. | Conference Paper |
| 1999 | Optical full-field technique for measuring deflection and strain on micromechanical components
Aswendt, P.; Höfling, R.; Hiller, K. | Conference Paper |
| 1999 | Testing microcomponents by speckle interferometry
Aswendt, P.; Höfling, R.; Hiller, K. | Conference Paper |
| 1995 | Charakterisierung mehrfach gebondeter Wafer für die Sensorik
Wiemer, M.; Hiller, K.; Hopfe, S.; Petzold, M.; Reiche, M.; Geßner, T.; Gösele, U. | Conference Paper |