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| 2012 | Bonding technologies for standard bulk PZT ceramics without the need of after process-polarization especially on thin silicon membranes
Helke, C.; Schueller, M.; Hiller, K.; Schulze, R.; Braeuer, J.; Nestler, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Design and manufacturing of micro synthetic jet actuators
Gebauer, C.; Schueller, M.; Hiller, K.; Schulze, R.; Otto, T.; Gessner, T. | Conference Paper |
| 2012 | Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics
Koehler, D.; Hiller, K.; Forke, R.; Konietzka, S.; Pohle, A.; Billep, D.; Heinz, S.; Lange, A. | Conference Paper |
| 2012 | Fabry-Perot tunable infrared filter based on structured reflectors
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Specht, H.; Meinig, M.; Gessner, T. | Conference Paper |
| 2012 | Spektral abstimmbare IR-Sensoren für die industrielle Prozessmesstechnik und die medizinische Gasanalyse
Ebermann, M.; Neumann, N.; Hiller, K.; Meinig, M. | Journal Article |
| 2012 | Tunable Fabry-Pérot Interferometers for Infrared Spectroscopy
Kurth, S.; Hiller, K.; Meinig, M.; Gessner, T. | Book Article |
| 2011 | Application of sub-wavelength structures in infrared optical filters
Kurth, S.; Seifert, M.; Zajadacz, J.; Ebermann, M.; Hiller, K.; Neumann, N.; Gessner, T. | Conference Paper |
| 2011 | Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
Meinig, M.; Ebermann, M.; Neumann, N.; Kurth, S.; Hiller, K.; Gessner, T. | Conference Paper |
| 2011 | Neuartiger frequenz- und amplitudenabstimmbarer Infrarotfilter
Specht, H.; Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Neumann, N.; Gittler, E.; Gessner, T. | Conference Paper |
| 2011 | Robust design of MEMS structures
Hofmann, K.; Billep, D.; Forke, R.; Hiller, K.; Gessner, T. | Conference Paper |
| 2011 | Tiny MID- and long-wave infrared spectrometer module with a MEMS dual-band Fabry-Pérot filter
Ebermann, M.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.; Neumann, N. | Conference Paper |
| 2011 | Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
Ebermann, M.; Neumann, N.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E. | Conference Paper |
| 2011 | Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Meinig, M.; Kurth, S.; Hiller, K.; Neumann, N.; Ebermann, M.; Gittler, E.; Gessner, T. | Conference Paper |
| 2010 | Challenges of smart system integration
Gessner, T.; Vogel, M.; Hiller, K.; Otto, T.; Bertz, A.; Billep, D. | Conference Paper |
| 2010 | Entwurf und Technologie eines Dualband Fabry-Pérot-Filters für den mittleren Infrarotbereich mit zwei beweglichen Reflektoren
Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Gittler, E.; Gessner, T. | Conference Paper |
| 2010 | Gütebestimmung von MEMS-Strukturen im Zeitbereich mittels Laser Doppler Vibrometer und einem Logarithmierer
Voigt, S.; Tenholte, D.; Franke, D.; Reuter, D.; Hiller, K.; Gessner, T.; Mehner, J. | Conference Paper |
| 2010 | A method for the fabrication of extra-thin silicon substrates
Jia, C.; Hiller, K.; Wiemer, M.; Reuter, D.; Gessner, T. | Conference Paper |
| 2010 | Micro/nano technologies towards smart systems integration
Gessner, T.; Vogel, M.; Kaufmann, C.; Hiller, K.; Kurth, S.; Nestler, J.; Otto, T. | Conference Paper |
| 2010 | Mikro- und Nanotechnologien für Smart Integrated Systems
Gessner, T.; Vogel, M.; Schulz, S.E.; Wiemer, M.; Hiller, K.; Kurth, S. | Journal Article |
| 2010 | Miniaturisiertes Spektrometermodul für den mittleren und langwelligen Infrarotbereich mit mikromechanischem Dual-Band Fabry-Pérot Filter
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S. | Conference Paper |
| 2010 | Nanostrukturierte Breitbandreflektoren und deren Anwendung in abstimmbaren mikromechanischen Infrarot-Filtern
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadazc, J.; Gessner, T. | Conference Paper |
| 2010 | Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Auerswald, J.; Knapp, H.F.; Gavillet, J.; Gessner, T. | Conference Paper, Journal Article |
| 2010 | Recent advances in expanding the spectral range of MEMS Fabry-Pérot filters
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S. | Conference Paper |
| 2010 | Smart Integrated Systems - Developments of Fraunhofer ENAS
Vogel, M.; Hiller, K.; Bertz, A.; Wiemer, M.; Gessner, T. | Book Article |
| 2010 | Subwavelength structures for infrared filtering
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadacz, J.; Gessner, T. | Conference Paper |
| 2010 | Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
Neumann, N.; Ebermann, M.; Gittler, E.; Meinig, M.; Kurth, S.; Hiller, K. | Conference Paper |
| 2009 | Coplanar electromagnetic signal coupler for wafer-scale packaging of RF-MEMS devices
Leidich, S.; Voigt, S.; Hiller, K.; Gessner, T. | Journal Article |
| 2009 | Design, operation and performance of a Fabry-Perot based MWIR micro spectrometer
Ebermann, M.; Neumann, N.; Hiller, K.; Kurth, S. | Conference Paper |
| 2009 | Novel MWIR microspectrometer based on a tunable detector
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S. | Conference Paper |
| 2009 | Technologies and MEMS sensor solutions for smart integrated systems
Hiller, K.; Kurth, S.; Bertz, A.; Gessner, T. | Journal Article |
| 2008 | An all-polymer microfluidic system for protein sensing applications with integrated Iow-cost pumps, surface modification and sealing
Nestler, J.; Hiller, K.; Gessner, T.; Gavillet, J.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S.; Beckers, M.-C. | Conference Paper |
| 2008 | Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Doetzel, W.; Mehner, J. | Journal Article |
| 2008 | Fabrication of a low-frequency ultrasonic transducer
Jia, C.; Wiemer, M.; Hiller, K.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Low-cost micro valves based on electrolysis inside hydrogels
Nestler, J.; Hiller, K.; Morschhauser, A.; Schüller, M.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Low-cost, fully integrated liquid handling platform for protein assays
Nestler, J.; Hiller, K.; Morschhauser, A.; Bigot, S.; Griffiths, C.; Auerswald, J.; Gavillet, J.; Nonglaton, G.; Otto, T.; Gessner, T. | Conference Paper |
| 2008 | Micro Actuators based on Structured Water
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T. | Journal Article |
| 2008 | Microfluidic cartridge with integrated pumps and liquid position feedback design for running protein assays
Nestler, J.; Enderlein, T.; Hiller, K.; Otto, T.; Gessner, T.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S. | Conference Paper |
| 2008 | Nanostructured polymer thin films: Application to biosensors
Gavillet, J.; Getin, S.; Quesnel, E.; Martin, S.; Gelapierre, G.; Hiller, K.; Nestler, J.; Gessner, T.; Soechtig, J.; Voirin, G.; Buergi, L.; Auerswald, J.; Knapp, H.F.; Ross, S.; Bigot, S.; Ehrat, M.; Lieb, A.; Beckers, M.-C.; Dresse, D. | Conference Paper |
| 2008 | Reliability of MEMS devices in shock and vibration overload situations
Kurth, S.; Shaporin, A.; Hiller, K.; Kaufmann, C.; Gessner, T. | Conference Paper |
| 2008 | Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Kurth, S.; Hiller, K. | Journal Article |
| 2007 | Acceleration Sensor Arrays
Dienel, M.; Hiller, K.; Gessner, T.; Dötzel, W. | Conference Paper |
| 2007 | Arrays of Sensors with Variable Stiffness
Shaporin, A.V.; Seifert, M.; Hanf, M.; Hiller, K.; Frühauf, J.; Gessner, T.; Dötzel, W. | Conference Paper |
| 2007 | Bonding of glass chip based SPR sensors to thermoplastic microfluidic scaffolds
Auerswald, J.; Niedermann, P.; Dias, F.; Keppner, H.; Bigot, S.; Beckers, M.-C.; Nestler, J.; Hiller, K.; Gessner, T.; Knapp, H.F. | Conference Paper |
| 2007 | Bulksiliziummikromechanik, Entwicklungstendenzen und Beispiele
Wiemer, M; Frömel, J.; Hiller, K.; Reuter, D.; Jia, C. | Conference Paper |
| 2007 | Electrochemical microfluidic pumps based on super absorbing polymers
Nestler, J.; Morschhauser, A.; Hiller, K.; Bigot, S.; Auerswald, J.; Gavillet, J.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Fully integrated polymer based microfluidic pumps and valves in Lab-on-Chip systems for Point-of-Care use
Nestler, J.; Morschhauser, A.; Hiller, K.; Auerswald, J.; Knapp, H.F.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Integration aspects of a polymer based SPR biosensor with active micro optical and micro fluidic elements
Hiller, K.; Nestler, J.; Gessner, T.; Gavillet, J.; Getin, S.; Quesnel, E.; Martin, S.; Delapierre, G.; Soechtig, J.; Voirin, G.; Buergi, L.; Auerswald, J.; Knapp, H.F.; Stanley, R.; Bigot, S.; Dimov, S.; Ehrat, M.; Lieb, A.; Beckers, M.-C.; Dresse, D.; Victor-Pujebet, E. | Conference Paper |
| 2007 | Low-Temperature Ti-Si bonding and its application in micro-device fabrication
Jia, C.; Hiller, K.; Wiemer, M.; Otto, T.; Gessner, T. | Conference Paper |
| 2007 | Polymer Lab-on-Chip systems with integrated electrochemical pumps
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Gessner, T. | Conference Paper |
| 2007 | Spektrale Vibrationsmessung mit mikromechanischen kraftgekoppelten Silizium-Schwingern
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Dötzel, W.; Mehner, J. | Conference Paper |
| 2007 | Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S. | Conference Paper |
| 2006 | MEMS Vakuumsensor nach dem Reibungsprinzip
Kurth, S.; Tenholte, D.; Hiller, K.; Kaufmann, C.; Gessner, T.; Dötzel, W. | Patent |
| 2006 | Microfluidic bubble actuators based on hydrogels
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T. | Conference Paper |
| 2006 | Microwave phase shifter with electromagnetic signal coupling in silicon bulk technology
Leidich, S.; Voigt, S.; Kurth, S.; Hiller, K.; Gessner, T. | Journal Article |
| 2006 | Smart Systems Integration - Eine Herausforderung für zukünftige Mikro- und Nanotechnologien
Gessner, T.; Baum, M.; Hiller, K.; Mehner, J.; Wiemer, M.; Otto, T.; Saupe, R.; Nestler, J. | Conference Paper |
| 2005 | Bonding and Deep RIE - A powerful combination for high aspect ratio sensors and actuators
Hiller, K.; Küchler, M.; Billep, D.; Schröter, B.; Dienel, M.; Scheibner, D.; Gessner, T. | Conference Paper |
| 2005 | Micromachined mid-infrared tunable Fabry-Perot filter
Neumann, N.; Hiller, K.; Kurth, S. | Conference Paper |
| 2005 | Mikromechanisches durchstimmbares FabrySPerot-Filter für die IR-Gasanalytik
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S. | Journal Article |
| 2005 | Model building, control design and practical implementation of a high precision, high dynamical MEMS acceleration sensor
Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2005 | Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement
Billep, D.; Hiller, K.; Frömel, J.; Tenholte, D.; Reuter, D.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2004 | MEMS Metallization
Lohmann, C.; Gottfried, K.; Bertz, A.; Reuter, D.; Hiller, K.; Kuhn, M.; Gessner, T. | Conference Paper |
| 2004 | A novel microactuator based on the working principle of a step-by-step switchgear
Schröter, B.; Mehner, J.; Hiller, K.; Geßner, T.; Dötzel, W. | Conference Paper |
| 2003 | Advanced silicon micromachining
Geßner, T.; Bertz, A.; Lohmann, C.; Kurth, S.; Hiller, K. | Journal Article |
| 2003 | Application of low temperature direct bonding in optical devices and integrated systems
Hiller, K.; Kurth, S.; Neumann, N.; Hahn, R.; Kaufmann, C.; Hanf, M.; Heinz, S.; Geßner, T.; Dötzel, W.; Ebest, G. | Conference Paper |
| 2003 | Closed loop control of a tunable infrared filter
Sternberger, A.; Hiller, K.; Geßner, T.; Dötzel, W.; Kurth, S.; Neumann, N.; Heinze, M. | Conference Paper |
| 2003 | An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2003 | Ein mikromechanisches, durchstimmbares Fabry-Perot-Filter für die nichtdispersive Gasanalytik im Spektralbereich (3 5) µm
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S. | Paper |
| 2003 | Tunable Fabry-Perot interferometer for 3 - 4.5 mu m wavelength with bulk micromachined reflector carrier
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2003 | Tunable infrared filter based on a Fabry-Perot-Interferometer
Kurth, S.,; Hiller, K.; Dötzel, W.; Geßner, T.; Neumann, N.; Heinze, M. | Conference Paper |
| 2001 | Application of high and low wafer bonding processes for bulk micromachined components
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Gessner, T. | Conference Paper |
| 2001 | Bulk micromachined and wafer bonded resonators for vacuum pressure measurement
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S. | Conference Paper |
| 2001 | Einsatz von Niedertemperaturbondverfahren für die Fertigung von Sensoren
Wiemer, M; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2001 | Einsatzerfahrungen mit einer Multiplex-Ätzanlage für tiefes Siliziumätzen
Küchler, M.; Hiller, K.; Hahn, R.; Bertz, A.; Gessner, T. | Conference Paper |
| 2001 | Implementation of a low temperature wafer bonding process for acceleration sensors
Wiemer, M.; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2001 | Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T. | Conference Paper |
| 2001 | Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S. | Conference Paper |
| 2001 | Silicon oxide in Si-Si bonded wafers
Himcinschi, C.; Milekhin, A.; Friedrich, M.; Hiller, K.; Wiemer, M; Gessner, T.; Schule, S.; Zahn, D.R.T. | Journal Article |
| 2000 | Investigation of bonding behaviour of different borosilicate glasses
Wiemer, M; Hiller, K.; Gessner, T.; Kloss, T.; Schneider, K.; Leipold-Haas, U.; Bagdahn, J.; Petzold, M. | Conference Paper |
| 2000 | Patterning of SOI-materials for fabrication of resonator systems using waferbonding approaches
Wiemer, M.; Hiller, K.; Gessner, T. | Conference Paper |
| 1999 | Advanced silicon bulk micromachining for angular rate sensor
Wiemer, M.; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W. | Conference Paper |
| 1999 | Anwendung von Niedertemperatur-Bondverfahren für die Herstellung von Microscanner-Arrays hoher Frequenz
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W. | Conference Paper |
| 1999 | µCORS - a bulk micromachined gyroscope based on coupled resonators
Breng, U.; Gutmann, W.; Leinfelder, P.; Ryrko, B.; Zimmermann, S.; Billep, D.; Gessner, T.; Hiller, K.; Wiemer, M. | Conference Paper |
| 1999 | Extending speckle pattern interferometry for use on a microscopic scale
Aswendt, P.; Höfling, R.; Hiller, K.; Wiemer, M. | Conference Paper |
| 1999 | Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
Hiller, K.; Wiemer, M.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Milekhin, A.; Friedrich, M.; Zahn, D. | Conference Paper |
| 1999 | Infrared study of the Si surfaces and bonded Si wafers
Milekhin, A.; Friedrich, M.; Wiemer, M; Hiller, K.; Gessner, T.; Zahn, D.R.T. | Journal Article |
| 1999 | Infrared study of the Si surfaces and buried interfaces
Milekhin, A.; Friedrich, M.; Wiemer, M; Hiller, K.; Gessner, T.; Zahn, D.R.T. | Conference Paper |
| 1999 | Kapazitiver Drehratensensor auf der Basis einer Stimmgabel mit gekoppeltem Resonator
Wiemer, M; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W. | Conference Paper |
| 1999 | Low-temperature approaches for fabrication of high-frequency microscanners
Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Wiemer, M; Schubert, I. | Conference Paper |
| 1999 | Optical full-field technique for measuring deflection and strain on micromechanical components
Aswendt, P.; Höfling, R.; Hiller, K. | Conference Paper |
| 1999 | Testing microcomponents by speckle interferometry
Aswendt, P.; Höfling, R.; Hiller, K. | Conference Paper |
| 1995 | Charakterisierung mehrfach gebondeter Wafer für die Sensorik
Wiemer, M.; Hiller, K.; Hopfe, S.; Petzold, M.; Reiche, M.; Geßner, T.; Gösele, U. | Conference Paper |