Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Supraparticles with a Magnetic Fingerprint Readable by Magnetic Particle Spectroscopy: An Alternative beyond Optical Tracers
Müssig, Stephan; Fidler, Florian; Haddad, Daniel; Hiller, Karl‐Heinz; Wintzheimer, Susanne; Mandel, Karl
Journal Article
20183D-Packaging-Technologien zur Herstellung intelligenter medizinischer Implantate
Wuensch, D.; Schroeder, T.; Baum, M.; Hiller, K.; Forke, R.; Wiemer, M.; Weidenmueller, J.; Dogan, O.; Goertz, M.
Conference Paper
2018Entwicklung von Schwingungssensoren auf MEMS-Basis für Condition Monitoring Systeme im Maschinen- und Anlagenbau
Dittrich, C.; Forke, R.; Hiller, K.; Kreutziger, P.; Kuerschner, R.; Meinecke, C.; Reuter, D.; Weidlich, S.; Streit, P.; Hahn, S.
Conference Paper
2018Leitfaden zur Bildverarbeitung in der zerstörungsfreien Prüfung
Aderhold, Jochen; Beran, Philip; Ernst, Jürgen; Getto, Sascha; Goetz, Jürgen; Hanke, Randolf; Hartrumpf, Matthias; Heinrich, Matthias; Hildenbrand, Markus; Hiller, Karl-Heinz; Jonuscheit, Joachim; Jungmann, Christian; König, Niels; Koster, Dirk; Krause, Julius; Lugin, Sergey; Meinlschmidt, Peter; Meyer, Johannes; Movahed, Ali; Mörchel, Philipp; Negara, Christian; Nüßler, Dirk; Oswald, Jan; Rabe, Ute; Rick, Rainer; Salamon, Michael; Schöberl, Michael; Henning, Schulte; Spies, Martin; Szielasko, Klaus; Tschuncky, Ralf; Valeske, Bernd; Waschkies, Thomas
: Sackewitz, Michael
Book
2018Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Komponenten
Hiller, K.; Helke, C.; Seifert, M.; Seiler, J.; Kurth, S.; Meinig, M.; Wecker, J.
Conference Paper
2018Reliability testing of integrated low-temperature PVD PZT films
Monteiro Diniz Reis, D.; Rzepka, S.; Hiller, K.
Journal Article, Conference Paper
20173D packaging technologies for smart medical implants
Schröder, Tim; Wünsch, Dirk; Baum, Mario; Hiller, Karla; Wiemer, Maik; Otto, Thomas; Weidenmüller, Jens; Dogan, Özgü; Utz, Alexander; Görtz, Michael
Conference Paper
2017Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: An example for Match 1:1-, eBeam-, and nanoimprint lithography
Helke, C.; Hiller, K.; Erben, J.W.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T.
Conference Paper
2017Determination of the mesio-distal tooth width via 3D imaging techniques with and without ionizing radiation: CBCT, MSCT, and µCT versus MRI
Detterbeck, Andreas; Hofmeister, Michael; Haddad, Daniel; Weber, Daniel; Schmid, Matthias; Hölzing, Astrid; Zabler, Simon; Hofmann, Elisabeth; Hiller, Karl-Heinz; Jakob, Peter; Engel, Jems; Hiller, Jochen; Hirschfelder, Ursula
Journal Article
2017Determination of the total circulating blood volume using magnetic particle spectroscopy
Weigl, Franziska; Seifert, Annika; Kraupner, Alexander; Jakob, Peter M.; Hiller, Karl-Heinz; Fidler, Florian
Journal Article
2017Development of metal oxide processes for highly conformal thin layers by plasma enhanced atomic layer deposition
Kia, Alireza Mohammadian
: Hiller, Karla (Betreuer); Weinreich, Wenke (Betreuer)
Master Thesis
2017Filling of high aspect ratio (HAR) nanometer-scale silicon trenches by electrochemical deposition of nickel
Hofmann, C.; Kurth, F.; Wiemer, M.; Otto, T.; Hiller, K.
Conference Paper
2017HED-TIE: A wafer-scale approach for fabricating hybrid electronic devices with trench isolated electrodes
Banerjee, S.; Bülz, D.; Solonenko, D.; Reuter, D.; Deibel, C.; Hiller, K.; Zahn, D.R.T.; Salvan, G.
Journal Article
2017Implantable hemodynamic controlling system with a highly miniaturized two axis acceleration sensor
Baum, Mario; Wünsch, Dirk; Hiller, Karla; Forke, Roman; Schröder, Tim; Weidlich, Sebastian; Hahn, Susann; Reuter, Danny; Wiemer, Maik; Weidenmüller, Jens; Dogan, Özgü; Görtz, Michael; Otto, Thomas
Conference Paper
2017In vivo T2* weighted MRI visualizes cardiac lesions in murine models of acute and chronic viral myocarditis
Helluy, Xavier; Sauter, Martina; Ye, Yu-Xiang; Lykowsky, Gunthard; Kreutner, Jakob; Yilmaz, Ali; Jahns, Roland; Boivin, Valerie; Kandolf, Reinhard; Jakob, Peter M.; Hiller, Karl-Heinz; Klingel, Karin
Journal Article
2017Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers
Helke, C.; Hiller, K.; Werner, T.; Reuter, D.; Meinig, M.; Kurth, S.; Nowak, C.; Kleinjans, H.; Otto, T.
Conference Paper
2017Light-induced magnetoresistance in solution-processed planar hybrid devices measured under ambient conditions
Banerjee, S.; Bülz, D.; Reuter, D.; Hiller, K.; Zahn, D.R.T.; Salvan, G.
Journal Article
2017Results of multi-mass high precision vibratory MEMS gyroscopes for two types of system approaches
Popova, I.; Lestev, A.; Fedorov, M.; Rakityansky, O.; Ivanov, V.; Semenov, A.; Forke, R.; Shaporin, A.; Hiller, K.; Koehler, D.; Konietzka, S.
Conference Paper
2016A highly miniaturized two-axis acceleration sensor for implantable hemody-namic controlling system
Wünsch, Dirk; Hiller, Karla; Forke, Roman; Baum, Mario; Wiemer, Maik; Geßner, Thomas; Görtz, Michael; Weidenmüller, Jens; Dogan, Özgü
Abstract
2016MEMS tunable Fabry-Pérot filters for infrared microspectrometer applications
Neumann, N.; Ebermann, M.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2016MRI vs. CT for orthodontic applications: Comparison of two MRI protocols and three CT (multislice, cone-beam, industrial) technologies
Detterbeck, Andreas; Weber, Daniel; Haddad, Daniel; Hoelzing, Astrid; Zabler, Simon; Hofmeister, Michael; Hoffmann, Elisabeth; Hiller, Jochen; Engel, Jens; Hiller, Karl-Heinz; Jakob, Peter; Hirschfelder, Ursula
Journal Article
2016Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers
Meinig, M.; Kurth, S.; Seifert, M.; Hiller, K.; Wecker, J.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2016Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: A review
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2016VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy
Helke, C.; Meinig, M.; Seifert, M.; Seiler, J.; Hiller, K.; Kurth, S.; Martin, J.; Gessner, T.
Conference Paper
2015Comparative analysis of multi-mass high precision vibratory MEMS gyroscopes
Popova, I.; Lestev, A.; Fedorov, M.; Rakityansky, O.; Ivanov, V.; Semenov, A.; Hiller, K.; Hahn, S.; Gessner, T.
Conference Paper
2015Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration
Meinig, M.; Kurth, S.; Helke, C.; Seifert, M.; Hiller, K.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2015A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
Ebermann, M.; Neumann, N.; Binder, S.; Meinig, M.; Seifert, M.; Kurth, S.; Hiller, K.
Conference Paper
2015Modulare aktive Probecard zur Systemcharakterisierung von mikro-elektromechanischen Sensoren am Beispiel von Gyroskopen
Weidlich, S.; Forke, R.; Billep, D.; Konietzka, S.; Koehler, D.; Hiller, K.; Gessner, T.
Conference Paper
2015Smart systems integration. Short review and further development of smart systems
Gessner, T.; Vogel, M.; Hiller, K.; Otto, T.; Kurth, S.; Nestler, J.; Köhler, T.
Book Article
2015Stem cell vitality assessment using magnetic particle spectroscopy
Fidler, F.; Steinke, M.; Kraupner, A.; Grüttner, C.; Hiller, K.-H.; Briel, A.; Westphal, F.; Walles, H.; Jakob, P.M.
Journal Article
2015Subwavelength Grating Reflectors for Fabrication Cost Reduction of Fabry-Perot Infrared Filters
Rupprecht, J.; Kurth, S.; Hiller, K.; Seifert, M.; Besser, J.; Meinig, M.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper, Journal Article
2015TSCuPc/Au hybrid trench devices. A comparative study of solution processed and thermally evaporated molecular channels
Banerjee, S.; Bülz, D.; Reuter, D.; Hiller, K.; Gessner, T.; Salvan, G.; Zahn, D.R.T.
Abstract
2015Yet another tuning fork gyroscope
Forke, R.; Hiller, K.; Hahn, S.; Konietzka, S.; Motl, T.; Köhler, D.; Heinz, S.; Billep, D.; Gessner, T.
Conference Paper
2014Development and Characterization of a High Voltage Amplifier ASIC for MEMS based Piezoelectric Actuator Active Flow Control
Köhler, D.; Seidel, R.; Helke, C.; Hiller, K.; Schüller, M.; Lipowski, M.
Conference Paper
2014Entwicklung eines experimentellen Aufbaus zur Systemcharakterisierung von MEMS Gyroskopen auf Waferlevel
Weidlich, S.; Forke, R.; Konietzka, S.; Hiller, K.; Gessner, T.
Conference Paper
2014High precision vibratory MEMS gyroscope
Billep, D.; Hiller, K.; Hahn, S.; Forke, R.; Köhler, D.; Stöckel, C.; Konietzka, S.; Heinz, S.
Book Article
2014High Voltage Amplifier ASIC for High Capacitive Load MEMS based Piezoelectric Actuators
Köhler, D.; Seidel, R.; Helke, C.; Hiller, K.; Schüller, M.; Lipowski, M.
Conference Paper
2014Organic lateral trench devices fabricated by trench technology
Banerjee, S.; Richter, P.; Buelz, D.; Reuter, D.; Hiller, K.; Gessner, T.; Zahn, D.R.T.; Salvan, G.
Abstract
2014Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2014Smart monitoring systems for a green future
Saupe, R.; Stock, V.; Otto, T.; Kurth, S.; Hiller, K.; Meinig, M.; Neumann, N.; Gessner, T.
Conference Paper
2014Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture
Kurth, S.; Hiller, K.; Meinig, M.; Besser, J.; Seifert, M.; Ebermann, M.; Neumann, N.; Schlachter, F.; Gessner, T.
Conference Paper
2014Technology approaches for tuneable IR Fabry-Perot-Filters applied in gas sensing microspectrometers
Hiller, K.; Meinig, M.; Kurth, S.; Seifert, M.; Helke, C.; Neumann, N.; Ebermann, M.
Book Article
2013Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics
Koehler, D.; Hiller, K.; Forke, R.; Konietzka, S.; Pohle, A.; Billep, D.; Heinz, S.; Lange, A.
Conference Paper
2013Erweiterungen und Anwendungen der BDRIE-Technologie zur Herstellung hermetisch gekapselter Sensoren mit hoher Güte
Hiller, K.; Hahn, S.; Kuechler, M.; Billep, D.; Forke, R.; Koehler, D.; Konietzka, S.; Pohle, A.; Gessner, T.
Conference Paper
2013Laterally stacked organic devices fabricated by trench technology
Reuter, D.; Banerjee, S.; Fronk, M.; Salvan, G.; Hiller, K.; Zahn, D.R.T.; Gessner, T.
Conference Paper
2013Picosecond Laser Micromachining in the context of MEMS/NEMS applications
Enderlein, T.; Helke, C.; Hiller, K.; Nestler, J.; Schueller, M.; Geidel, S.; Otto, T.; Gessner, T.
Conference Paper
2013Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments
Schondelmaier, G.; Hartmann, S.; May, D.; Shaporin, A.; Voigt, S.; Rodriguez, R.D.; Gordan, O.D.; Zahn, D.R.T.; Mehner, J.; Hiller, K.; Wunderle, B.
Conference Paper
2013Smart systems for a better life
Gessner, T.; Vogel, M.; Nestler, J.; Hiller, K.; Kurth, S.; Otto, T.
Conference Paper
2012Bonding technologies for standard bulk PZT ceramics without the need of after process-polarization especially on thin silicon membranes
Helke, C.; Schueller, M.; Hiller, K.; Schulze, R.; Braeuer, J.; Nestler, J.; Otto, T.; Gessner, T.
Conference Paper
2012Design and manufacturing of micro synthetic jet actuators
Gebauer, C.; Schueller, M.; Hiller, K.; Schulze, R.; Otto, T.; Gessner, T.
Conference Paper
2012Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics
Koehler, D.; Hiller, K.; Forke, R.; Konietzka, S.; Pohle, A.; Billep, D.; Heinz, S.; Lange, A.
Conference Paper
2012Fabry-Perot tunable infrared filter based on structured reflectors
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Specht, H.; Meinig, M.; Gessner, T.
Conference Paper
2012Spektral abstimmbare IR-Sensoren für die industrielle Prozessmesstechnik und die medizinische Gasanalyse
Ebermann, M.; Neumann, N.; Hiller, K.; Meinig, M.
Journal Article
2012Tunable Fabry-Pérot Interferometers for Infrared Spectroscopy
Kurth, S.; Hiller, K.; Meinig, M.; Gessner, T.
Book Article
2012Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2011Application of sub-wavelength structures in infrared optical filters
Kurth, S.; Seifert, M.; Zajadacz, J.; Ebermann, M.; Hiller, K.; Neumann, N.; Gessner, T.
Conference Paper
2011Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
Meinig, M.; Ebermann, M.; Neumann, N.; Kurth, S.; Hiller, K.; Gessner, T.
Conference Paper
2011Neuartiger frequenz- und amplitudenabstimmbarer Infrarotfilter
Specht, H.; Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Neumann, N.; Gittler, E.; Gessner, T.
Conference Paper
2011Robust design of MEMS structures
Hofmann, K.; Billep, D.; Forke, R.; Hiller, K.; Gessner, T.
Conference Paper
2011Tiny MID- and long-wave infrared spectrometer module with a MEMS dual-band Fabry-Pérot filter
Ebermann, M.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.; Neumann, N.
Conference Paper
2011Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
Ebermann, M.; Neumann, N.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.
Conference Paper
2011Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Meinig, M.; Kurth, S.; Hiller, K.; Neumann, N.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010Challenges of smart system integration
Gessner, T.; Vogel, M.; Hiller, K.; Otto, T.; Bertz, A.; Billep, D.
Conference Paper
2010Entwurf und Technologie eines Dualband Fabry-Pérot-Filters für den mittleren Infrarotbereich mit zwei beweglichen Reflektoren
Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010Gütebestimmung von MEMS-Strukturen im Zeitbereich mittels Laser Doppler Vibrometer und einem Logarithmierer
Voigt, S.; Tenholte, D.; Franke, D.; Reuter, D.; Hiller, K.; Gessner, T.; Mehner, J.
Conference Paper
2010A method for the fabrication of extra-thin silicon substrates
Jia, C.; Hiller, K.; Wiemer, M.; Reuter, D.; Gessner, T.
Conference Paper
2010Micro/nano technologies towards smart systems integration
Gessner, T.; Vogel, M.; Kaufmann, C.; Hiller, K.; Kurth, S.; Nestler, J.; Otto, T.
Conference Paper
2010Mikro- und Nanotechnologien für Smart Integrated Systems
Gessner, T.; Vogel, M.; Schulz, S.E.; Wiemer, M.; Hiller, K.; Kurth, S.
Journal Article
2010Miniaturisiertes Spektrometermodul für den mittleren und langwelligen Infrarotbereich mit mikromechanischem Dual-Band Fabry-Pérot Filter
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Nanostrukturierte Breitbandreflektoren und deren Anwendung in abstimmbaren mikromechanischen Infrarot-Filtern
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadazc, J.; Gessner, T.
Conference Paper
2010Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Auerswald, J.; Knapp, H.F.; Gavillet, J.; Gessner, T.
Conference Paper, Journal Article
2010Recent advances in expanding the spectral range of MEMS Fabry-Pérot filters
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Smart Integrated Systems - Developments of Fraunhofer ENAS
Vogel, M.; Hiller, K.; Bertz, A.; Wiemer, M.; Gessner, T.
Book Article
2010Subwavelength structures for infrared filtering
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadacz, J.; Gessner, T.
Conference Paper
2010Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
Neumann, N.; Ebermann, M.; Gittler, E.; Meinig, M.; Kurth, S.; Hiller, K.
Conference Paper
2009Coplanar electromagnetic signal coupler for wafer-scale packaging of RF-MEMS devices
Leidich, S.; Voigt, S.; Hiller, K.; Gessner, T.
Journal Article
2009Design, operation and performance of a Fabry-Perot based MWIR micro spectrometer
Ebermann, M.; Neumann, N.; Hiller, K.; Kurth, S.
Conference Paper
2009Novel MWIR microspectrometer based on a tunable detector
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S.
Conference Paper
2009Technologies and MEMS sensor solutions for smart integrated systems
Hiller, K.; Kurth, S.; Bertz, A.; Gessner, T.
Journal Article
2008An all-polymer microfluidic system for protein sensing applications with integrated Iow-cost pumps, surface modification and sealing
Nestler, J.; Hiller, K.; Gessner, T.; Gavillet, J.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S.; Beckers, M.-C.
Conference Paper
2008Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Doetzel, W.; Mehner, J.
Journal Article
2008Fabrication of a low-frequency ultrasonic transducer
Jia, C.; Wiemer, M.; Hiller, K.; Otto, T.; Gessner, T.
Conference Paper
2008Low-cost micro valves based on electrolysis inside hydrogels
Nestler, J.; Hiller, K.; Morschhauser, A.; Schüller, M.; Otto, T.; Gessner, T.
Conference Paper
2008Low-cost, fully integrated liquid handling platform for protein assays
Nestler, J.; Hiller, K.; Morschhauser, A.; Bigot, S.; Griffiths, C.; Auerswald, J.; Gavillet, J.; Nonglaton, G.; Otto, T.; Gessner, T.
Conference Paper
2008Micro Actuators based on Structured Water
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T.
Journal Article
2008Microfluidic cartridge with integrated pumps and liquid position feedback design for running protein assays
Nestler, J.; Enderlein, T.; Hiller, K.; Otto, T.; Gessner, T.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S.
Conference Paper
2008Nanostructured polymer thin films: Application to biosensors
Gavillet, J.; Getin, S.; Quesnel, E.; Martin, S.; Gelapierre, G.; Hiller, K.; Nestler, J.; Gessner, T.; Soechtig, J.; Voirin, G.; Buergi, L.; Auerswald, J.; Knapp, H.F.; Ross, S.; Bigot, S.; Ehrat, M.; Lieb, A.; Beckers, M.-C.; Dresse, D.
Conference Paper
2008Reliability of MEMS devices in shock and vibration overload situations
Kurth, S.; Shaporin, A.; Hiller, K.; Kaufmann, C.; Gessner, T.
Conference Paper
2008Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Kurth, S.; Hiller, K.
Journal Article
2007Acceleration Sensor Arrays
Dienel, M.; Hiller, K.; Gessner, T.; Dötzel, W.
Conference Paper
2007Arrays of Sensors with Variable Stiffness
Shaporin, A.V.; Seifert, M.; Hanf, M.; Hiller, K.; Frühauf, J.; Gessner, T.; Dötzel, W.
Conference Paper
2007Bonding of glass chip based SPR sensors to thermoplastic microfluidic scaffolds
Auerswald, J.; Niedermann, P.; Dias, F.; Keppner, H.; Bigot, S.; Beckers, M.-C.; Nestler, J.; Hiller, K.; Gessner, T.; Knapp, H.F.
Conference Paper
2007Bulksiliziummikromechanik, Entwicklungstendenzen und Beispiele
Wiemer, M; Frömel, J.; Hiller, K.; Reuter, D.; Jia, C.
Conference Paper
2007Electrochemical microfluidic pumps based on super absorbing polymers
Nestler, J.; Morschhauser, A.; Hiller, K.; Bigot, S.; Auerswald, J.; Gavillet, J.; Otto, T.; Gessner, T.
Conference Paper
2007Fully integrated polymer based microfluidic pumps and valves in Lab-on-Chip systems for Point-of-Care use
Nestler, J.; Morschhauser, A.; Hiller, K.; Auerswald, J.; Knapp, H.F.; Otto, T.; Gessner, T.
Conference Paper
2007Integration aspects of a polymer based SPR biosensor with active micro optical and micro fluidic elements
Hiller, K.; Nestler, J.; Gessner, T.; Gavillet, J.; Getin, S.; Quesnel, E.; Martin, S.; Delapierre, G.; Soechtig, J.; Voirin, G.; Buergi, L.; Auerswald, J.; Knapp, H.F.; Stanley, R.; Bigot, S.; Dimov, S.; Ehrat, M.; Lieb, A.; Beckers, M.-C.; Dresse, D.; Victor-Pujebet, E.
Conference Paper
2007Low-Temperature Ti-Si bonding and its application in micro-device fabrication
Jia, C.; Hiller, K.; Wiemer, M.; Otto, T.; Gessner, T.
Conference Paper
2007Polymer Lab-on-Chip systems with integrated electrochemical pumps
Nestler, J.; Morschhauser, A.; Hiller, K.; Otto, T.; Bigot, S.; Gessner, T.
Conference Paper
2007Spektrale Vibrationsmessung mit mikromechanischen kraftgekoppelten Silizium-Schwingern
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Dötzel, W.; Mehner, J.
Conference Paper
2007Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S.
Conference Paper
2006MEMS Vakuumsensor nach dem Reibungsprinzip
Kurth, S.; Tenholte, D.; Hiller, K.; Kaufmann, C.; Gessner, T.; Dötzel, W.
Patent
2006Microfluidic bubble actuators based on hydrogels
Nestler, J.; Hiller, K.; Otto, T.; Gessner, T.
Conference Paper
2006Microwave phase shifter with electromagnetic signal coupling in silicon bulk technology
Leidich, S.; Voigt, S.; Kurth, S.; Hiller, K.; Gessner, T.
Journal Article
2006Smart Systems Integration - Eine Herausforderung für zukünftige Mikro- und Nanotechnologien
Gessner, T.; Baum, M.; Hiller, K.; Mehner, J.; Wiemer, M.; Otto, T.; Saupe, R.; Nestler, J.
Conference Paper
2005Bonding and Deep RIE - A powerful combination for high aspect ratio sensors and actuators
Hiller, K.; Küchler, M.; Billep, D.; Schröter, B.; Dienel, M.; Scheibner, D.; Gessner, T.
Conference Paper
2005Micromachined mid-infrared tunable Fabry-Perot filter
Neumann, N.; Hiller, K.; Kurth, S.
Conference Paper
2005Mikromechanisches durchstimmbares Fabry–Perot-Filter für die IR-Gasanalytik
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S.
Journal Article
2005Model building, control design and practical implementation of a high precision, high dynamical MEMS acceleration sensor
Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.
Conference Paper
2005Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement
Billep, D.; Hiller, K.; Frömel, J.; Tenholte, D.; Reuter, D.; Dötzel, W.; Gessner, T.
Conference Paper
2004MEMS Metallization
Lohmann, C.; Gottfried, K.; Bertz, A.; Reuter, D.; Hiller, K.; Kuhn, M.; Gessner, T.
Conference Paper
2004A novel microactuator based on the working principle of a step-by-step switchgear
Schröter, B.; Mehner, J.; Hiller, K.; Geßner, T.; Dötzel, W.
Conference Paper
2003Advanced silicon micromachining
Geßner, T.; Bertz, A.; Lohmann, C.; Kurth, S.; Hiller, K.
Journal Article
2003Application of low temperature direct bonding in optical devices and integrated systems
Hiller, K.; Kurth, S.; Neumann, N.; Hahn, R.; Kaufmann, C.; Hanf, M.; Heinz, S.; Geßner, T.; Dötzel, W.; Ebest, G.
Conference Paper
2003Closed loop control of a tunable infrared filter
Sternberger, A.; Hiller, K.; Geßner, T.; Dötzel, W.; Kurth, S.; Neumann, N.; Heinze, M.
Conference Paper
2003An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T.
Conference Paper
2003Ein mikromechanisches, durchstimmbares Fabry-Perot-Filter für die nichtdispersive Gasanalytik im Spektralbereich (3 5) µm
Neumann, N.; Heinze, M.; Stegbauer, H.-J.; Hiller, K.; Kurth, S.
Presentation
2003Tunable Fabry-Perot interferometer for 3 - 4.5 mu m wavelength with bulk micromachined reflector carrier
Kurth, S.; Hiller, K.; Neumann, N.; Heinze, M.; Dötzel, W.; Gessner, T.
Conference Paper
2003Tunable infrared filter based on a Fabry-Perot-Interferometer
Kurth, S.,; Hiller, K.; Dötzel, W.; Geßner, T.; Neumann, N.; Heinze, M.
Conference Paper
2001Application of high and low wafer bonding processes for bulk micromachined components
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Gessner, T.
Conference Paper
2001Bulk micromachined and wafer bonded resonators for vacuum pressure measurement
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.
Conference Paper
2001Einsatz von Niedertemperaturbondverfahren für die Fertigung von Sensoren
Wiemer, M; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M.
Conference Paper
2001Einsatzerfahrungen mit einer Multiplex-Ätzanlage für tiefes Siliziumätzen
Küchler, M.; Hiller, K.; Hahn, R.; Bertz, A.; Gessner, T.
Conference Paper
2001Implementation of a low temperature wafer bonding process for acceleration sensors
Wiemer, M.; Otto, T.; Gessner, T.; Hiller, K.; Kapser, K.; Seidel, H.; Bagdahn, J.; Petzold, M.
Conference Paper
2001Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.
Conference Paper
2001Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.
Conference Paper
2001Silicon oxide in Si-Si bonded wafers
Himcinschi, C.; Milekhin, A.; Friedrich, M.; Hiller, K.; Wiemer, M; Gessner, T.; Schule, S.; Zahn, D.R.T.
Journal Article
2000Investigation of bonding behaviour of different borosilicate glasses
Wiemer, M; Hiller, K.; Gessner, T.; Kloss, T.; Schneider, K.; Leipold-Haas, U.; Bagdahn, J.; Petzold, M.
Conference Paper
2000Patterning of SOI-materials for fabrication of resonator systems using waferbonding approaches
Wiemer, M.; Hiller, K.; Gessner, T.
Conference Paper
1999Advanced silicon bulk micromachining for angular rate sensor
Wiemer, M.; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W.
Conference Paper
1999Anwendung von Niedertemperatur-Bondverfahren für die Herstellung von Microscanner-Arrays hoher Frequenz
Wiemer, M.; Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.
Conference Paper
1999µCORS - a bulk micromachined gyroscope based on coupled resonators
Breng, U.; Gutmann, W.; Leinfelder, P.; Ryrko, B.; Zimmermann, S.; Billep, D.; Gessner, T.; Hiller, K.; Wiemer, M.
Conference Paper
1999Extending speckle pattern interferometry for use on a microscopic scale
Aswendt, P.; Höfling, R.; Hiller, K.; Wiemer, M.
Conference Paper
1999Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
Hiller, K.; Wiemer, M.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Milekhin, A.; Friedrich, M.; Zahn, D.
Conference Paper
1999Infrared study of the Si surfaces and bonded Si wafers
Milekhin, A.; Friedrich, M.; Wiemer, M; Hiller, K.; Gessner, T.; Zahn, D.R.T.
Journal Article
1999Infrared study of the Si surfaces and buried interfaces
Milekhin, A.; Friedrich, M.; Wiemer, M; Hiller, K.; Gessner, T.; Zahn, D.R.T.
Conference Paper
1999Kapazitiver Drehratensensor auf der Basis einer Stimmgabel mit gekoppeltem Resonator
Wiemer, M; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W.
Conference Paper
1999Low-temperature approaches for fabrication of high-frequency microscanners
Hiller, K.; Hahn, R.; Kaufmann, C.; Kurth, S.; Kehr, K.; Gessner, T.; Dötzel, W.; Wiemer, M; Schubert, I.
Conference Paper
1999Optical full-field technique for measuring deflection and strain on micromechanical components
Aswendt, P.; Höfling, R.; Hiller, K.
Conference Paper
1999Testing microcomponents by speckle interferometry
Aswendt, P.; Höfling, R.; Hiller, K.
Conference Paper
1995Charakterisierung mehrfach gebondeter Wafer für die Sensorik
Wiemer, M.; Hiller, K.; Hopfe, S.; Petzold, M.; Reiche, M.; Geßner, T.; Gösele, U.
Conference Paper