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2016 | Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy Puthankovilakam, K.; Scharf, T.; Kim, M.S.; Naqavi, A.; Herzig, H.P.; Weichelt, T.; Zeitner, U.; Vogler, U.; Voelkel, R. | Journal Article |
2016 | Micro-structuring of glassy carbon for precision glass molding of binary diffractive optical elements Prater, K.; Dukwen, J.; Scharf, T.; Herzig, H.P.; Plöger, S.; Hermerschmidt, A. | Journal Article |
2016 | Precision glass molding of high-resolution diffractive optical elements Prater, K.; Dukwen, J.; Scharf, T.; Herzig, H.P.; Plöger, S.; Hermerschmidt, A. | Conference Paper |
2015 | Intensity and phase fields behind Phase Shifting Masks studied with High Resolution Interference Microscopy Puthankovilakam, K.; Scharf, T.; Herzig, H.P.; Weichelt, T.; Zeitner, U.; Vogler, U.; Voelkel, R. | Conference Paper |
2015 | Multilevel micro-structuring of glassy carbon for precision glass molding of diffractive optical elements Prater, K.; Dukwen, J.; Scharf, T.; Herzig, H.P.; Plöger, S.; Hermerschmidt, A. | Conference Paper |
2015 | Multilevel micro-structuring of glassy carbon molds for precision glass molding Prater, K.; Dukwen, J.; Scharf, T.; Herzig, H.P.; Plöger, S.; Hermerschmidt, A. | Conference Paper |
2014 | Surface micro-structuring of glassy carbon for precision glass molding of diffractive optical elements Prater, K.; Dukwen, J.; Scharf, T.; Herzig, H.P.; Hermerschmidt, A. | Conference Paper |