Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995Closed loop MBE and CBE facility control with new software system
Hertel, B.
Conference Paper
1995In situ film thickness and temperature control of molecular beam epitaxy growth by pyrometric interferometry
Böbel, F.G.; Möller, H.; Hertel, B.; Grothe, H.; Schraud, G.; Schröder, S.; Chow, P.
Journal Article
1995In situ observation of chemical vapour deposition growth of epitaxial SiGe thin films by reflexion supported pyrometric interferometry
Ritter, G.; Tillack, B.; Weidner, M.; Zaumseil, P.; Böbel, F.G.; Hertel, B.; Möller, H.
Journal Article
1995In situ real time monitoring of film thickness and temperature during epitaxial growth by using Reflexion Supported Pyrometric Interferometry (RSPI)
Böbel, F.G.; Möller, H.; Hertel, B.; Märitz, J.; Wagner, J.; Chow, P.
Conference Paper
1995In situ real-time temperature and thickness measurement for Si/SiGe growth on MBE and RTCVD systems
Möller, H.; Böbel, F.G.; Hertel, B.; Lindenberg, T.; Ritter, G.
Journal Article
1994In situ film-thickness and temperature monitor
Böbel, F.G.; Möller, H.; Hertel, B.; Ritter, G.; Chow, P.
Journal Article
1994Pyrometric Interferometry (PI) for real time MBE process monitoring
Böbel, F.G.; Möller, H.; Hertel, B.; Wowchak, A.; Hove, J. van; Chow, P.
Journal Article