Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Sinzinger, Stefan
Journal Article
2014Co-sputtering of rugate filters of reduced loss and roughness
Taeschner, Kerstin; Bartzsch, Hagen; Herffurth, Tobias; Schröder, Sven; Duparre, Angela; Frach, Peter
Conference Paper
2014In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert
Journal Article
2014Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Scattering reduction through oblique multilayer deposition
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Angle and wavelength resolved light scattering measurement of optical surfaces and thin films
Schröder, Sven; Unglaub, David; Fink, Alexander von; Hauptvogel, Matthias; Trost, Marcus; Herffurth, Tobias; Duparré, Angela; Stover, John
Conference Paper
2013Compact light scatter techniques for optical coatings
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela
Conference Paper
2013Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Evaluation of subsurface damage by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schmitz, David; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Light scattering of interference coatings from the IR to the EUV spectral regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Journal Article
2013Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela
Conference Paper
2012Quality assessment of precision optical surfaces through light scattering techniques
Schröder, Sven; Finck, Alexander von; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Sophisticated light scattering techniques from the VUV to the IR regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Verfahren zur hochempfindlichen Streulichtmessung
Trost, Marcus; Schröder, Sven; Herffurth, Tobias
Patent
2011Bestimmung der Messunsicherheit im Mikrometer-Bereich - Strategien, Modelle und Einflussfaktoren
Tan, Özgür; Krah, Thomas; Neuschaefer-Rube, Ulrich; Ehrig, Wiebke; Herffurth, Tobias; Schröder, Sven; Lyda, Wolfram; Eigenbrod, Hartmut; Hoffmann, R.; Weißensee, Karina; Apel, Sebastian; Pedrini, Giancarlo; Gaspar, J.; Schrader, Christian; Zschiegner, N.
Book Article
2011Registrierung multimodaler Messungen am Beispiel eines MEMS
Zimmermann, Jan; Sawodny, Oliver; Lyda, Wolfram; Burla, Avinash; Osten, Wolfgang; Eigenbrod, Hartmut; Westkämper, Engelbert; Shaw, Laura; Weckenmann, Albert; Herffurth, Tobias; Duparré, Angela; Tünnermann, Andreas; Staude, Andreas; Goebbels, Jürgen
Book Article