Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Assessing surface imperfections of freeforms using a robotic light scattering sensor
Herffurth, T.; Trost, M.; Beier, M.; Steinkopf, R.; Heidler, N.; Pertermann, T.; Schröder, S.
Journal Article
2019Assessment of Surface Roughness, Homogeneity, and Defects of Substrates and Coatings for Space Applications
Herffurth, T.; Trost, M.; Schlegel, R.; Schwinde, S.; Schröder, S.
Conference Paper
2019Design, additive manufacturing, processing, and characterization of metal mirror made of aluminum silicon alloy for space applications
Hilpert, E.; Hartung, J.; Lukowicz, H. von; Herffurth, T.; Heidler, N.
Journal Article
2019International round-robin experiment for angle-resolved light scattering measurement
Finck, A. von; Herffurth, T.; Duparre, A.; Schröder, S.; Lequime, M.; Zerrad, M.; Liukaityte, S.; Amra, C.; Achour, S.; Chalony, M.; Kuperman, Q.; Cornil, Y.; Bialek, A.; Goodman, T.; Greenwell, C.; Gur, B.; Brinkers, S.; Otter, G.; Vosteen, A.; Stover, J.; Vink, R.; Deep, A.; Doyle, D.
Journal Article
2018Light scattering: From academic research towards industrial applications
Schröder, S.; Trost, M.; Herffurth, T.
Conference Paper
2017Light scattering techniques for the characterization of optical components
Hauptvogel, M.; Schröder, S.; Herffurth, T.; Trost, M.; Finck, A. von; Duparré, A.; Weigel, T.
Conference Paper
2017Surface characterization of high-end optical components using light scattering
Schröder, S.; Trost, M.; Herffurth, T.; Hauptvogel, M.; Sachkov, M.E.; Zhupanov, V.G.
Conference Paper
2016Scatter reduction of calcium fluoride based DUV optics
Wang, J.; Cangemi, M.J.; Oudard, J.F.; Trost, M.; Herffurth, T.; Schröder, S.; Duparre, A.
Conference Paper
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, A. von; Herffurth, T.; Schröder, S.; Duparre, A.; Sinzinger, S.
Journal Article
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Sinzinger, Stefan
Journal Article
2014Co-sputtering of rugate filters of reduced loss and roughness
Taeschner, Kerstin; Bartzsch, Hagen; Herffurth, Tobias; Schröder, Sven; Duparre, Angela; Frach, Peter
Conference Paper
2014In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert
Journal Article
2014Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Scattering reduction through oblique multilayer deposition
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Angle and wavelength resolved light scattering measurement of optical surfaces and thin films
Schröder, Sven; Unglaub, David; Fink, Alexander von; Hauptvogel, Matthias; Trost, Marcus; Herffurth, Tobias; Duparré, Angela; Stover, John
Conference Paper
2013Compact light scatter techniques for optical coatings
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela
Conference Paper
2013Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Evaluation of subsurface damage by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schmitz, David; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Light scattering of interference coatings from the IR to the EUV spectral regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Journal Article
2013Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela
Conference Paper
2012Quality assessment of precision optical surfaces through light scattering techniques
Schröder, Sven; Finck, Alexander von; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Sophisticated light scattering techniques from the VUV to the IR regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Verfahren zur hochempfindlichen Streulichtmessung
Trost, Marcus; Schröder, Sven; Herffurth, Tobias
Patent
2011Angle resolved scattering: An effective method for characterizing thin film coatings
Schröder, S.; Herffurth, T.; Blaschke, H.; Duparre, A.
Journal Article
2011Bestimmung der Messunsicherheit im Mikrometer-Bereich - Strategien, Modelle und Einflussfaktoren
Tan, Özgür; Krah, Thomas; Neuschaefer-Rube, Ulrich; Ehrig, Wiebke; Herffurth, Tobias; Schröder, Sven; Lyda, Wolfram; Eigenbrod, Hartmut; Hoffmann, R.; Weißensee, Karina; Apel, Sebastian; Pedrini, Giancarlo; Gaspar, J.; Schrader, Christian; Zschiegner, N.
Book Article
2011Impact of surface roughness on scatter losses and the scattering distribution of surfaces and thin film coatings
Schröder, S.; Herffurth, T.; Duparre, A.
Conference Paper
2011Kompakter streulichtbasierter Rauheitssensor
Herffurth, T.; Hauptvogel, M.; Duparré, A.; Tünnermann, A.; Notni, G.; Tünnermann, A.
Journal Article, Conference Paper
2011Registrierung multimodaler Messungen am Beispiel eines MEMS
Zimmermann, Jan; Sawodny, Oliver; Lyda, Wolfram; Burla, Avinash; Osten, Wolfgang; Eigenbrod, Hartmut; Westkämper, Engelbert; Shaw, Laura; Weckenmann, Albert; Herffurth, Tobias; Duparré, Angela; Tünnermann, Andreas; Staude, Andreas; Goebbels, Jürgen
Book Article
2010Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: Measurement and analysis
Schröder, S.; Herffurth, T.; Trost, M.; Duparre, A.
Journal Article
2010ARS: An effective method for characterizing structural and alteration effects in thin film coatings
Schröder, S.; Herffurth, T.; Blaschke, H.; Duparré, A.
Conference Paper
2010Bewertung der Poliergüte schwer zugänglicher Oberflächen durch Streulichtmethoden
Schröder, S.; Trost, M.; Herffurth, T.; Duparré, A.
Abstract
2010Roughness measurement of ultra precision surfaces using light scattering techniques and analysis
Herffurth, T.; Schröder, S.; Trost, M.; Duparre, A.
Conference Paper
2009Vorrichtung und Verfahren zur winkelaufgeloesten Streulichtmessung
Schröder, S.; Duparre, A.; Herffurth, T.; Notni, G.
Patent