Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Chuck system for integrated IR-based temperature - measurement in rotational grinding of sapphire wafers
Klocke, F.; Dambon, O.; Herben, M.; Veselovac, D.; Adams, O.; Kuljanic, E.; Sortino, M.; Totis, G.
Conference Paper
2011IR-based temperature measurement in rotational grinding of sapphire wafers
Klocke, Fritz; Kuljanic, Elso; Dambon, Olaf; Sortino, M.; Herben, Maurice; Totis, G.
Conference Paper
2009Rotationsschleifen von Saphirwafern
Klocke, F.; Dambon, O.; Herben, M.; Wilbert, A.
Journal Article
2008Polishing-grinding - an innovation for high precision optics
Klocke, F.; Grüntzig, A.; Hollstegge, D.; Dambon, O.; Riegel, J.; Herben, M.
Conference Paper
2008Polishing-grinding - an innovation for manufacturing of high precision optics
Klocke, F.; Grüntzig, A.; Hollstegge, D.; Völker, C.; Dambon, O.; Herben, M.; Bulla, B.; Czarlay, D.; Riegel, J.
Conference Paper
2007Deflektometrie zur Ebenheitsbestimmung. Anwendung der Streifenreflexion zur Waferinspektion
Schmitt, R.; Köllmann, D.; Herben, M.
Conference Paper
2007Nondestructive characterization of sub-surface damage in rotational ground silicon wafers by laser acoustics
Pähler, D.; Schneider, D.; Herben, M.
Journal Article
2006In-process monitoring of contact zone forces during rotational grinding of silicon wafers
Pähler, D.; Klocke, F.; Beegen, L.; Herben, M.; Jakob, A.
Conference Paper