Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Low-Resistance Ohmic Contact Formation by Laser Annealing of N-Implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Conference Paper
2020Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology
Rusch, Oleg; Hellinger, Carsten; Moult, Jonathan; Corcoran, Yunji; Erlbacher, Tobias
Conference Paper
2019Low-resistance ohmic contact formation by laser annealing of N-implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster