Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Modulating complex beams in amplitude and phase using fast tilt-micromirror arrays and phase masks
Roth, M.; Heber, J.; Janschek, K.
Journal Article
2018Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2018Optische Anordnung zur Erzeugung von Lichtfeldverteilungen und Verfahren zum Betrieb einer optischen Anordnung
Heber, Jörg; Janschek, Klaus; Roth, Matthias
Patent
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, C.; Heber, J.; Berndt, D.
Abstract
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk
Presentation
2017Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, M.; Heber, J.; Janschek, K.
Conference Paper
2017Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, Matthias; Heber, Jörg; Janschek, Klaus
Presentation
2016Lithographische Techniken für die hochauflösende Zell-Mikroskopie: Strahlformung in der Biologie mit strukturierten UV-Schichten
Heber, Jörg; Rückerl, F.; Berndt, Dirk; Schmidt, Jan; Bellow, S.; Tivenez, J.-Y.; Knobbe, Jens; Shorte, S.L.; Wagner, Michael
Presentation
2016Spatially resolved scatter measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk
Journal Article
2016Spatio-angular illumination control using diffractive micromirror arrays
Heber, Jörg; Rückerl, Florian; Berndt, Dirk; Schmidt, Jan; Bellow, Sebastien; Tinevez, Jean-Yves; Knobbe, Jens; Shorte, Spencer; Wagner, Michael
Conference Paper
2016System design of programmable 4f phase modulation techniques for rapid intensity shaping - a conceptual comparison
Roth, Matthias; Heber, Jörg; Janschek, Klaus
Conference Paper
2015Spatially resolved contrast measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer; Wagner, Michael; Schenk, Harald
Conference Paper
2015Spatio-angular light control in microscopes using micro mirror arrays
Rückerl, F.; Bellow, S.; Berndt, Dirk; Tinevez, J.-Y.; Heber, Jörg; Wagner, Michael; Shorte, S.
Conference Paper
2014Deeper insight with MEMS based illumination
Skupsch, Christoph; Heber, Jörg; Berndt, Dirk; Wagner, Michael; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer
Presentation
2014Photoactivation and optogenetics with micro mirror enhanced illumination
Rückerl, Florian; Berndt, Dirk; Heber, Jörg; Shorte, Spencer
Conference Paper
2013Micro mirror arrays as high-resolution spatial light modulators for photoactivation and optogenetics
Rückerl, F.; Kielhorn, Martin; Tinevez, J.-Y.; Heber, Jörg; Heintzmann, R.; Shorte, S.
Conference Paper
2011Calibration of diffractive micromirror arrays for microscopy applications
Berndt, Dirk; Heber, Jörg; Sinning, Steffen; Rudloff, Dirk; Wolschke, Steffen; Eckert, Mark; Schmidt, Jan-Uwe; Bring, M.; Wagner, Michael; Lakner, Hubert
Conference Paper
2010Multispectral characterization of diffractive micromirror arrays
Berndt, D.; Heber, J.; Sinning, S.; Kunze, D.; Knobbe, J.; Schmidt, J.-U.; Bring, M.; Rudloff, D.; Friedrichs, M.; Rössler, J.; Eckert, M.; Kluge, W.; Neumann, H.; Wagner, M.; Lakner, H.
Conference Paper
2010Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range
Schmidt, J.-U.; Bring, M.; Heber, J.; Friedrichs, M.; Rudloff, D.; Rößler, J.; Berndt, D.; Neumann, H.; Kluge, W.; Eckert, M.; List, M.; Müller, M.; Wagner, M.
Conference Paper
2008Mikromechanisches Bauelement mit Temperaturstabilisierung und Verfahren zur Einstellung einer definierten Temperatur oder eines definierten Temperaturverlaufes an einem mikromechanischen Bauelement
Heber, J.; Klose, T.; Sandner, T.; Bergmann, A.; Gerwig, C.; Knieling, T.
Patent
2007Contrast properties of spatial light modulators for microlithography
Heber, J.; Kunze, D.; Dürr, P.; Rudloff, D.; Wagner, M.; Björnängen, P.; Luberek, J.; Berzinsh, U.; Sandström, T.; Karlin, T.
Conference Paper
2007Flächenkalibrierung von Mikrospiegelarrays
Schug, H.
: Heber, J. (Prüfer)
Thesis
2007Software für die zeitoptimierte Kalibrierung von Mikrokippspiegeln
Berndt, D.
: Heber, J. (Prüfer)
Thesis
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation
2006High-performance coatings for micromechanical mirrors
Gatto, A.; Yang, M.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Schenk, H.; Lakner, H.; Heber, J.
Journal Article
2005Lanthanide tri-fluorides: A survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV - VUV - spectral range
Uhlig, H.; Thielsch, R.; Heber, J.; Kaiser, N.
Conference Paper
2005Laser ablation of SiOx thin films for direct mask writing
Heber, J.; Ihlemann, J.; Schulz-Ruhtenberg, M.; Schmidt, J.
Conference Paper
2005Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements
Schulz-Ruhtenberg, M.; Ihlemann, J.; Heber, J.
Conference Paper, Journal Article
2005New challenges for VUV-XUV radiation resistant coatings
Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2005Optical, structural, and mechanical properties of gadolinium trifluoride thin films grown on amorphous substrates
Thielsch, R.; Heber, J.; Uhlig, H.; Kaiser, N.
Conference Paper
2005Verfahren zur Herstellung optischer Bauteile
Ihlemann, J.; Schulz-Ruhtenberg, M.; Heber, J.
Patent
2005VUV optical coatings for the next-generation micro-mechanical mirrors
Yang, M.; Gatto, A.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Heber, J.; Schenk, H.; Lakner, H.
Conference Paper
2004Development of mechanical stress in fluoride multilayers for UV applications
Thielsch, R.; Heber, J.; Uhlig, H.; Kaiser, N.
Conference Paper
2003Deep UV laser induced fluorescence in fluoride thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2003Luminescence of UV thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.; Lewis, K.L.; Soileau, M.J.; Stolz, C.J.
Conference Paper
2003Metallisches Fluorid in Pulver- oder Granulatform, Verfahren zu seiner Herstellung und den Nachweis der Reinheit
Heber, J.; Kaiser, N.; Muehlig, C.; Triebel, W.
Patent
2003Optisches Element, Verfahren zu seiner Herstellung und zur Bestimmung seiner optischen Eigenschaften
Heber, J.; Kaiser, N.; Muehlig, C.; Triebel, W.
Patent
2003Radiation resistance of optical materials against synchrotron radiation
Günster, S.; Blaschke, H.; Ristau, D.; Gatto, A.; Heber, J.; Kaiser, N.; Diviacco, B.; Marsi, M.; Trovo, M.; Sarto, F.; Scaglione, S.; Masetti, E.
Conference Paper
2003Spectrophotometry in the vacuum-UV
Heber, J.; Gatto, A.; Kaiser, N.
Conference Paper
2002193 nm laser induced fluorescence in fluoride thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002193 nm laser induced luminescence in oxide thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition
Thielsch, R.; Gatto, A.; Heber, J.; Kaiser, N.
Journal Article
2002Deep UV laser induced luminescence in oxide thin films
Heber, J.; Muhlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002Fluorescence lifetimes of molecular dye ensembles near interfaces
Danz, N.; Heber, J.; Bräuer, A.; Kowarschik, R.
Journal Article
2002High-performance deep-ultraviolet optics for free-electron lasers
Gatto, A.; Thielsch, R.; Heber, J.; Kaiser, N.; Ristau, D.; Günster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.; Garzella, D.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Amra, C.
Journal Article
2002High-performance UV/VUV optics for the storage ring FEL at ELETTRA
Gatto, A.; Heber, J.; Kaiser, N.; Ristau, D.; Gunster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.P.
Journal Article
2002Optics developments in the VUV-soft X-ray spectral region
Feigl, T.; Heber, J.; Gatto, A.; Kaiser, N.
Journal Article
2001Absorption limited performance of SiO2/Al2O3 multi-layer coatings at 193nm - a systematic study
Thielsch, R.; Heber, J.; Kaiser, N.; Apel, O.; Mann, K.; Ristau, D.; Blaschke, H.; Arens, W.
Conference Paper
2001High-performance DUV optics for Free Electron Lasers
Gatto, A.; Thielsch, R.; Heber, J.; Kaiser, N.; Ristau, D.; Günster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.; Garzella, D.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Amra, C.
Conference Paper
2000Comparative study of the UV-optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion assisted deposition and plasma-ion-assisted deposition
Thielsch, R.; Gatto, A.; Heber, J.; Martin, S.; Kaiser, N.
Conference Paper
2000Critical issues on the assessment of laser induced damage thresholds of fluoride multilayer coatings at 193 nm
Thielsch, R.; Heber, J.; Kaiser, N.; Martin, S.; Welsch, E.
Conference Paper
2000Nonlinear absorption phenomena in oxide coatings for 193 nm
Apel, O.; Mann, K.; Heber, J.; Thielsch, R.
Conference Paper
2000Pulsed top-hat beam thermal lens: a simple and sensitive tool for in situ measurement on ultraviolet dielectric components
Li, B.C.; Martin, S.; Welsch, E.; Thielsch, R.; Heber, J.; Kaiser, N.
Conference Paper
1999ArF radiation resistance of optical coatings on CaF2 in relation to the surface finish of the substrate
Thielsch, R.; Heber, J.; Duparre, A.; Kaiser, N.; Mann, K.R.; Eva, E.
Conference Paper
1999Changes in optical interference coatings exposed to 193-nm excimer laser radiation
Heber, J.; Thielsch, R.; Blaschke, H.; Kaiser, N.; Leinhos, U.; Görtler, A.
Conference Paper
1999Laser resistivity and causes of damage in coating materials for 193 nm by photothermal methods
Blaschke, H.; Thielsch, R.; Heber, J.; Kaiser, N.; Martin, S.; Welsch, E.
Conference Paper
1999Microstructure and radiation interactions of optical interference coatings for 193 nm applications
Heber, J.; Thielsch, R.; Blaschke, H.; Kaiser, N.; Leinhos, U.; Görtler, A.
Conference Paper
1999Structural and mechanical properties of evaporated pure and mixed MgF2-BaF2 thin films
Thielsch, R.; Pommies, M.; Heber, J.; Kaiser, N.; Ullmann, J.
Conference Paper
1998Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral region
Thielsch, R.; Heber, J.; Jakobs, S.; Kaiser, N.; Duparre, A.; Ullmann, J.
Conference Paper
1998Stability of optical interference coatings exposed to low-fluence 193 nm ArF radiation
Heber, J.; Thielsch, R.; Blaschke, H.
Conference Paper