Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Combined 3D micro structuring of ceramic green tape using punching, embossing and laser processing
Hagen, G.; Kopp, T.; Ziesche, S.; Partsch, U.; Ruprecht, E.
Conference Paper
2011Novel technology options for multilayer-based ceramic microsystems
Partsch, U.; Goldberg, A.; Ihle, M.; Hagen, G.; Arndt, D.
Conference Paper
2009Structuring of green sheets and laminates for multilayer ceramic microsystems with a combined laser and punching machine
Hagen, G.; Partsch, U.
Conference Paper
2008Generation of via holes and patterns in green foils for multilayer ceramics
Hagen, G.; Partsch, U.
Conference Paper
2004Nafion® polymer film as a low-temperature passivation for lifetime measurements on silicon wafers
Stokkan, G.; Isenberg, J.; Biro, D.; Warta, W.; Hagen, G.
Conference Paper