Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013High pressure - Low temperature sintering of tungsten carbide ceramics
Poetschke, J.; Grasso, S.; Richter, V.; Michaelis, A.
Conference Paper
2013Low-temperature spark plasma sintering of pure nano wc powder
Grasso, S.; Poetschke, J.; Richter, V.; Maizza, G.; Sakka, Y.; Reece, M.J.
Journal Article
2012Reference samples for ultra trace analysis of organic compounds on substrate surfaces
Nutsch, A.; Beckhoff, B.; Borionetti, G.; Codegoni, D.; Grasso, S.; Hoenicke, P.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.
Conference Paper
2009Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfaces
Grasso, S.; Cazzini, E.; Bersani, M.; Lazzeri, P.; Gennaro, S.; Kolbe, M.; Müller, M.; Kregsamer, P.; Posch, F.
Journal Article
2009Characterization of organic contamination in semiconductor manufacturing processes
Nutsch, A.; Beckhoff, B.; Bedana, G.; Borionetti, G.; Codegoni, D.; Grasso, S.; Guerinoni, G.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.; Simone, D. de; Frey, L.
Conference Paper
2009Highly sensitive detection of inorganic contamination
Beckhoff, B.; Nutsch, A.; Altmann, R.; Borionetti, G.; Pello, C.; Polignano, M.L.; Codegoni, D.; Grasso, S.; Cazzini, E.; Bersani, M.; Lazzeri, P.; Gennaro, S.; Kolbe, M.; Müller, M.; Kregsamer, P.; Posch, F.
Conference Paper
2009Revealing Copper Contamination in Silicon after Low Temperature Treatments
Polignano, M.; Brivio, J.; Codegoni, D.; Grasso, S.; Altmann, R.; Nutsch, A.; Pavia, G.
Conference Paper