Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Optics contamination studies in support of high-throughput EUV lithography tools
Hill, S.B.; Faradzhev, N.S.; Richter, L.J.; Grantham, S.; Tarrio, C.; Lucatorto, T.B.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Feigl, T.
Conference Paper
2011Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W.
Journal Article