Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Wave front sensor for highly accurate characterization of flatness on wafer surfaces
Nutsch, A.; Bucourt, S.; Grandin, T.; Lazareva, I.; Pfitzner, L.
Conference Paper
2008Determination of flatness on patterned wafer surfaces using wavefront sensing methods
Nutsch, A.; Pfitzner, L.; Grandin, T.; Levecq, X.; Bucourt, S.
Conference Paper