Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers
Merten, André; Schroedter, Richard; Dreyhaupt, André; Graßhoff, Thomas; Schwarzenberg, Markus; Hugger, Stefan; Schilling, Christian; Grahmann, Jan; Ostendorf, Ralf
Journal Article
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2016Scanning optical MEMS with very high frequencies
Drabe, Christian; Graßhoff, Thomas; Todt, Ulrich; Flemming, André; Sandner, Thilo; Grahmann, Jan
Presentation
2015About stress in filled DRIE-trenches
Kaiser, Bert; Drabe, Christian; Graßhoff, Thomas; Conrad, Holger; Schenk, Harald; Grahmann, Jan
Journal Article
2014Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, Thilo; Kimme, Simon; Grasshoff, Thomas; Todt, Ulrich; Graf, Alexander; Tulea, Christian; Schenk, Harald
Conference Paper
2013Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera
Sandner, Thilo; Grasshoff, Thomas; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2012The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald
Conference Paper