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| 2020 | Dreidimensionaler Nanostrukturkörper und Verfahren zum Herstellen eines dreidimensionalen Nanostrukturkörpers
Allani, Sonja; Jupe, Andreas; Vogt, Holger; Goehlich, Andreas | Patent |
| 2018 | Development of a piezoelectric flexural plate-wave (FPW) bioMEMS-sensor for rapid point-of-care diagnostics
Jupe, Andreas; Livshits, Pavel; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas | Conference Paper |
| 2017 | Analysis of semiconductor process variations by means of hierarchical median polish
Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Kappert, Holger; Vogt, Holger | Conference Paper |
| 2017 | Analytical model for thin-film SOI PIN-diode leakage current
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Goehlich, Andreas; Paschen, Uwe | Journal Article |
| 2017 | Development of micro electromechanical biosensor for fast detection of respiratory syncytial virus infections in newborns
Livshits, Pavel; Jupe, Andreas; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas | Journal Article, Poster |
| 2017 | Fabrication and electrochemical characterization of ruthenium nanoelectrodes
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger | Journal Article |
| 2017 | Heterogene Integration einer Miniatur-Solarzelle für autarke Sensoren
Krause, Christopher; Stühlmeyer, Martin; Figge, Martin; Goehlich, Andreas; Kappert, Holger | Conference Paper |
| 2017 | Tapering of nanoelectrodes for an intracellular contact via a double hard mask technique
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger | Conference Paper |
| 2017 | Untersuchung von dreidimensionalen Nanoelektroden für die intrazelluläre Kontaktierung auf integrierten Schaltungen
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Kappert, Holger; Vogt, Holger | Conference Paper |
| 2016 | ALD-based 3D-capacitors for harsh environments
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger | Conference Paper |
| 2016 | Digital microfluidics for microchip-based cell sorting
Kahnert, Stefan; Schreiber, Fedor; Goehlich, Andreas; Greifendorf, Dieter; Lennartz, Klaus; Kirstein, Uwe; Bartels, Frank; Janzyk, Udo; Rennings, Andreas; Erni, Daniel; Küppers, Ralf; Vogt, Holger | Conference Paper |
| 2016 | Efficient chip architectures for a microfluidic cell sorter actuated by electrowetting and its electrohydrodynamic analysis
Schreiber, Fedor; Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Bartels, Frank; Janzyk, Udo; Lennartz, Klaus; Kirstein, Uwe; Rennings, Andreas; Küppers, Ralf; Erni, Daniel | Conference Paper |
| 2016 | Entwicklung eines piezoresistiven Drucksensors für Hochtemperaturanwendungen auf Basis eines SOI-Substrats
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Andrei; Vogt, Holger | Conference Paper |
| 2016 | HOT-300 - a multidisciplinary technology approach targeting microelectronic systems at 300 °C operating temperature
Vogt, Holger; Altmann, Frank; Braun, Sebastian; Celik, Yusuf; Dietrich, Lothar; Dietz, Dorothee; Dijk, Marius van; Dreiner, Stefan; Döring, Ralf; Gabler, Felix; Goehlich, Andreas; Hutter, Matthias; Ihle, Martin; Kappert, Holger; Kordas, Norbert; Kokozinski, Rainer; Naumann, Falk; Nowak, Torsten; Oppermann, Hermann; Partsch, Uwe; Petzold, Matthias; Roscher, Frank; Rzepka, Sven; Schubert, Ralph; Weber, Constanze; Wiemer, Maik; Wittler, Olaf; Ziesche, Steffen | Conference Paper |
| 2016 | Materials and technologies to enable high temperature stable MEMS and electronics for smart systems used in harsh environments
Gabler, Felix; Roscher, Frank; Döring, Ralf; Otto, Alexander; Ziesche, Steffen; Ihle, Martin; Celik, Yusuf; Dietz, Dorothee; Goehlich, Andreas; Kappert, Holger; Vogt, Holger; Naumann, Falk; Geßner, Thomas | Conference Paper |
| 2016 | Mikrofluidik-Chip-Architekturen für eine Zell-Sortieranlage basierend auf der Elektrowetting-Technologie
Schreiber, Fedor; Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Bartels, Frank; Janzyk, Udo; Lennartz, Klaus; Kirstein, Uwe; Rennings, Andreas; Küppers, Ralf; Erni, Daniel | Journal Article |
| 2016 | Nanostructures on CMOS-intelligent sensors and actuators by post processing
Goehlich, Andreas; Vogt, Holger | Conference Paper |
| 2016 | Post-CMOS integrated ALD 3D micro- and nanostructures and application for multi-electrode arrays
Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger | Conference Paper |
| 2016 | Post-CMOS integration of miniaturized solar cells for energy harvesting of autonomous sensor nodes
Stühlmeyer, Martin; Goehlich, Andreas; Figge, Martin; Vogt, Holger | Conference Paper |
| 2016 | Statistical tests to determine spatial correlations in the response behavior of PUFs
Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Vogt, Holger | Conference Paper |
| 2015 | ALD-basierte, monolithisch integrierte 3D-Nanostrukturen
Jupe, Andreas; Goehlich, Andreas; Feizi, Khadijeh; Vogt, Holger | Conference Paper |
| 2015 | Charakterisierung und Modellierung freistehender Silizium Membranen auf SOI-Basis für Drucksensor-Anwendungen
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Alexander; Vogt, Holger | Conference Paper |
| 2015 | CMOS integrated miniaturized photovoltaic cells for autonomous sensor nodes: Simulations and experimental results
Goehlich, Andreas; Stühlmeyer, Martin; Vogt, Holger | Conference Paper |
| 2015 | Entwicklung von Hochtemperatur Trench-Kondensatoren unter Verwendung von dünnen ALD-Dielektrika
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger | Conference Paper |
| 2015 | High-temperature trench capacitors, using thin-film ALD dielectrics
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger | Journal Article, Conference Paper |
| 2015 | High-temperature trench capacitors, using thin-film ALD dielectrics
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger | Conference Paper |
| 2015 | Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Walk, Christian; Goehlich, Andreas; Giese, Andre; Görtz, Michael; Vogt, Holger; Kraft, Michael | Conference Paper |
| 2015 | Mikrofluidik-Chip-Architekturen für eine Zell-Sortieranlage basierend auf der Elektrowetting-Technologie
Schreiber, Fedor; Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Bartels, Frank; Janzyk, Udo; Lennartz, Klaus; Kirstein, Uwe; Rennings, Andreas; Küppers, Ralf; Erni, Daniel | Conference Paper |
| 2014 | CMOS integrated biosensor for the detection of biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Manova, Radostina K.; Scheres, Luc; Roeven, Esther; Trilling, Anke; Schmidt, Andreas; Hutten, Ulrike; Neureiter, Katrin; Pierrat, Sebastien; Beek, Teris A. van; Vogt, Holger | Abstract |
| 2014 | Development of a microchip based cell sorting device
Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Vogt, Holger; Lennartz, Klaus; Kirstein, Uwe; Goellner, B.; Michelsen, U.; Bartels, Frank; Schreiber, F.; Rennings, A.; Erni, Daniel | Abstract |
| 2014 | Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael | Journal Article |
| 2014 | PECVD of poly-SiGe/Ge layers with increased total gas flow
Wang, Qiang; Goehlich, Andreas; Ruß, Marco; Yang, Pin; Vogt, Holger | Journal Article |
| 2013 | CMOS integrated free standing circular membrane for the detection of allergens and biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Schmidt, Alexander; Klieber, Robert; Haas, Norbert; Greifendorf, Dieter; Vogt, Holger | Conference Paper |
| 2013 | CMOS kompatible, nanomodifizierte Multi-Elektroden-Arrays
Jupe, Andreas; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger | Conference Paper |
| 2013 | Development of an universial allergen sensor system
Goehlich, Andreas; Burmester, Kim; Celik, Yusuf; Klieber, Robert; Greifendorf, Dieter; Haas, Norbert; Vogt, Holger | Conference Paper |
| 2013 | Entwicklung einer Mikrochip navigierten Zellsortieranlage
Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Vogt, Holger; Lennartz, Klaus; Kirstein, Uwe; Goellner, B.; Michelsen, U.; Bartels, F. | Conference Paper |
| 2013 | Entwicklung eines hochtemperaturfesten Kondensators für die Mikrosystemtechnik
Celik, Yusuf; Goehlich, Andreas; Jupe, Andreas; Vogt, Holger | Conference Paper |
| 2013 | Hybrid sensor integration by wafer-to-wafer bonding
Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger | Book Article |
| 2013 | Integrierte Sensorstruktur
Vogt, Holger; Goehlich, Andreas; Jupe, Andreas | Patent |
| 2013 | Optical simulation of photodiodes and photocells made of amorphous silicon/germanium
Goehlich, Andreas | Book Article |
| 2012 | Direct integration of carbon nanotubes on CMOS with high-temperature tungsten metallization
Jupe, Andreas; Hoeren, André; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger | Conference Paper |