Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Metal mirrors with excellent figure and roughness
Steinkopf, R.; Gebhardt, A.; Scheiding, S.; Rohde, M.; Stenzel, O.; Gliech, S.; Giggel, V.; Löscher, H.; Ullrich, G.; Rucks, P.; Duparre, A.; Risse, S.; Eberhardt, R.; Tünnermann, A.
Conference Paper
2007Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.; Tünnermann, A.
Conference Paper
2007UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A.
Conference Paper
2006Scattering analysis of optical components in the DUV
Schröder, S.; Gliech, S.; Duparre, A.
Conference Paper
2005Investigating the ArF laser stability of CaF2 at elevated fluences
Burkert, A.; Mühlig, C.; Triebel, W.; Keutel, D.; Natura, U.; Parthier, L.; Gliech, S.; Schröder, S.; Duparre, A.
Conference Paper
2005Low-loss gratings for next-generation gravitational wave detectors
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.; Gliech, S.
Conference Paper
2005Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions
Schröder, S.; Gliech, S.; Duparre, A.
Journal Article
2005Scatter analysis of optical components from 193 nm to 13.5 nm
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.
Conference Paper
2005Sensitive and flexible light scatter techniques from the VUV to IR regions
Schröder, S.; Gliech, S.; Duparre, A.
Conference Paper
2005Streulichtanalyse für die Nanotechnotechnik
Schröder, S.; Gliech, S.; Duparre, A.
Journal Article
2005Surface texture investigation of ultra-precision optical components
Schröder, S.; Ratteit, J.; Gliech, S.; Duparre, A.
Conference Paper
2004157 nm and 193 nm scatter, R and T measurement technique
Gliech, S.; Gessner, H.; Hultaker, A.; Duparre, A.
Conference Paper
2004Characterization of CaF2 substrates for VUV fluoride coatings
Hultaker, A.; Gliech, S.; Gessner, H.; Duparre, A.
Conference Paper
2004High-sensitivity light scattering measurement of optical coating components
Gliech, S.; Schröder, S.; Duparre, A.
Conference Paper
2004Light scatter technique for application in optics, nanotechnology and engineering
Gliech, S.; Duparre, A.
Conference Paper
2004VERFAHREN UND VORRICHTUNG ZUR UNTERDRUECKUNG VON LICHTABSORPTION, LICHTSTREUUNG UND KONTAMINATION BEI WELLENLAENGEN UNTERHALB VON 200NM
Duparre, A.; Gliech, S.; Notni, G.; Steinert, J.
Patent
2003Characterizing CaF2 for VUV optical components: Roughness, surface scatter, and bulk scatter
Hultaker, A.; Benkert, N.; Gliech, S.; Duparre, A.
Conference Paper
2003Entwicklung und Anwendung eines Messsystems zur Bestimmung des totalen Streulichts von optischen und technisch rauhen Oberflächen und Schichten
Gliech, S.
Dissertation
2003Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A.
Book Article
2003System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
Gliech, S.; Geßner, H.; Duparre, A.
Conference Paper
2003VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Duparre, A.; Gliech, S.; Benkert, N.
Book Article
2003VUV light scattering measurements of substrates and thin film coatings
Hultaker, A.; Gliech, S.; Benkert, N.; Duparre, A.
Conference Paper
2002Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A.
Journal Article
2002Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Duparre, A.; Ferre-Borrull, J.; Gliech, S.; Notni, G.; Steinert, J.; Bennett, J.M.
Journal Article
2001Surface characterization of optical components for the DUV, VUV und EUV
Duparre, A.; Kozhevnikov, I.; Gliech, S.; Steinert, J.; Notni, G.
Journal Article
2000Advanced Methods for surface and subsurface defect characterization of optical components
Steinert, J.; Gliech, S.; Wuttig, A.; Duparre, A.; Truckenbrodt, H.
Conference Paper
2000DUV/VUV light scattering measurement of optical components for lithography applications
Gliech, S.; Steinert, J.; Flemming, M.; Duparre, A.
Conference Paper
2000International round-robin experiment to test the International Organization for Standardization total-scattering draft standard
Kadkhoda, P.; Müller, A.; Ristau, D.; Duparre, A.; Gliech, S.; Lauth, H.; Schuhmann, U.; Reng, N.; Tilsch, M.; Schuhmann, R.; Amra, C.; Deumie, C.; Jolie, C.; Kessler, H.; Lindström, T.; Ribbing, C.G.; Bennet, J.M.
Journal Article
2000Light scattering of UV-optical components
Duparre, A.; Gliech, S.; Steinert, J.
Conference Paper
1999Charakterisierung optischer Komponenten für DUV Spektralbereich
Mann, K.; Apel, O.; Ristau, D.; Duparre, A.; Gliech, S.
Journal Article
1999Hochauflösende Topometrie im Kontext globaler Makrostrukturen
Duparre, A.; Notni, G.; Recknagel, R.-J.; Feigl, T.; Gliech, S.
Journal Article
1999International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696
Kadkhoda, P.; Amra, C.; Bennett, J.M.; Deumie, C.; Duparre, A.; Gliech, S.; Jolie, C.; Kessler, H.; Lauth, H.; Lindström, T.; Müller, A.; Reng, N.; Ribbing, C.G.; Ristau, D.; Schuhmann, R.G.; Schuhmann, U.; Tilsch, M.
Conference Paper
1999Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S.
Conference Paper
1999Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering
Gliech, S.; Duparre, A.; Recknagel, R.-J.; Notni, G.
Conference Paper
1997Concepts for standardization of total scatter measurements at 633 nm
Kadkhoda, M.; Strink, P.; Ristau, D.; Duparre, A.; Gliech, S.; Reng, N.; Greif, M.; Schuhmann, R.; Goldner, M.
Conference Paper
1997Non-contact testing of optical surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S.
Conference Paper
1997Quality assessment from supersmooth to rough surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S.
Conference Paper
1996Analysis of interface and volume inhomogenities in a multilayer system by light scattering methods
Pichlmaier, S.; Hehl, K.; Schuhmann, U.; Duparre, A.; Gliech, S.
Conference Paper
1996Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
Duparre, A.; Gliech, S.
Conference Paper
1996Optical scattering and surface microstructure of thin films for laser application
Duparre, A.; Kiesel, A.; Gliech, S.
Journal Article
1994Interface and volume inhomogenities in optical thin films investigated by light scattering methods
Duparre, A.; Gliech, S.; Hehl, K.; Pichlmaier, U.; Schuhmann, U.
Conference Paper