Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20193D applicable ALD film for humidity detection
Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Hermeticity of SI1-XGeX diaphragms for the fabrication of a capacitive post-CMOS pressure sensor
Walk, Christian; Netaev, Alexander; Wiemann, Matthias; Görtz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten
Conference Paper
2019A piezoelectric flexural plate wave (FPW) Bio-MEMS sensor with improved molecular mass detection for point-of-care diagnostics
Walk, Christian; Wiemann, Matthias; Görtz, Michael; Weidenmüller, Jens; Jupe, Andreas; Seidl, Karsten
Journal Article
2018Development of a piezoelectric flexural plate-wave (FPW) bioMEMS-sensor for rapid point-of-care diagnostics
Jupe, Andreas; Livshits, Pavel; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Conference Paper
2018Fabrication and characterization of bending-independent capacitive CMOS pressure sensor stacks
Fischer, Roland; Ditler, Heinrich; Görtz, Michael; Mokwa, Wilfried
Journal Article, Conference Paper
2018Implantable multi-sensor system for hemodynamic controlling
Weidenmüller, Jens; Dogan, Özgü; Stanitzki, Alexander; Baum, Mario; Schröder, Tim; Wünsch, Dirk; Görtz, Michael; Grabmaier, Anton
Journal Article
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
20173D packaging technologies for smart medical implants
Schröder, Tim; Wünsch, Dirk; Baum, Mario; Hiller, Karla; Wiemer, Maik; Otto, Thomas; Weidenmüller, Jens; Dogan, Özgü; Utz, Alexander; Görtz, Michael
Conference Paper
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Conference Paper
2017Development of micro electromechanical biosensor for fast detection of respiratory syncytial virus infections in newborns
Livshits, Pavel; Jupe, Andreas; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Journal Article, Conference Paper, Poster
2017DRUGAS: Implantable telemetric system for measuring the portal venous pressure: Assembly aspects
Fischer, Roland; Weidenmüller, Jens; Görtz, Michael; Göttsche, Thorsten; Mokwa, Wilfried
Journal Article
2017Gedünnte kapazitive Silizium-Drucksensoren in flexiblen und dehnbaren extra weichen Substraten für haptische Messungen
Fischer, Roland; Weichsel, Lisa; Mokwa, Wilfried; Görtz, Michael
Conference Paper
2017Implantable hemodynamic controlling system with a highly miniaturized two axis acceleration sensor
Baum, Mario; Wünsch, Dirk; Hiller, Karla; Forke, Roman; Schröder, Tim; Weidlich, Sebastian; Hahn, Susann; Reuter, Danny; Wiemer, Maik; Weidenmüller, Jens; Dogan, Özgü; Görtz, Michael; Otto, Thomas
Conference Paper
2017Implantable multi sensor system for hemodynamic controlling
Weidenmüller, Jens; Dogan, Özgü; Stanitzki, Alexander; Baum, Mario; Schröder, Tim; Wünsch, Dirk; Görtz, Michael; Grabmaier, Anton
Conference Paper
2017Intelligente Implantate. Geringere Abmessungen bei höherer Komplexität und Funktionalität
Mokwa, Wilfried; Görtz, Michael
Journal Article
2017Overview on an implantable multi sensor system for cardiovascular monitoring
Görtz, Michael; Grabmaier, Anton; Wiemer, Maik; Storsberg, Joachim; Duschl, Claus; Vom Bögel, Gerd
Journal Article, Conference Paper
2017Sensor components of a miniaturized implant for haemodynamic controlling
Weidenmüller, Jens; Dogan, Özgü; Stanitzki, Alexander; Baum, Mario; Wünsch, Dirk; Wiemer, Maik; Görtz, Michael
Journal Article, Conference Paper
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Telemetric multi-sensor system for medical applications - the approach
Weidenmüller, Jens; Walk, Christian; Dogan, Özgü; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article
2017An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS
Utz, Alexander; Walk, Christian; Haas, Norbert; Fedtschenko, Tatjana; Stanitzki, Alexander; Mokhtari, Mehran; Görtz, Michael; Kraft, Michael; Kokozinski, Rainer
Journal Article
2016Concept for a miniaturized cardiovascular multi sensor implant
Dogan, Özgü; Weidenmüller, Jens; Gembaczka, Pierre; Stanitzki, Alexander; Wünsch, Dirk; Baum, Mario; Wiemer, Maik; Görtz, Michael
Abstract
2016Development of a low temperature SiC protection layer for post-CMOS MEMS fabrication utilizing vapour release technologies
Walk, Christian; Chen, Yizhou; Vidovic, Nino; Kuhl, Andreas; Görtz, Michael; Vogt, H.
Conference Paper
2016Development of a system concept for miniaturized cardiovascular multi sensor implants
Dogan, Özgü; Walk, Christian; Weidenmüller, Jens; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article, Conference Paper
2016A highly miniaturized two-axis acceleration sensor for implantable hemody-namic controlling system
Wünsch, Dirk; Hiller, Karla; Forke, Roman; Baum, Mario; Wiemer, Maik; Geßner, Thomas; Görtz, Michael; Weidenmüller, Jens; Dogan, Özgü
Abstract
2016Technischer Aufbau epiretinaler Netzhautimplantate
Mokwa, Wilfried; Görtz, Michael
Journal Article
2016Telemetric multi sensor system for medical applications - the approach
Weidenmüller, Jens; Walk, Christian; Dogan, Özgü; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Abstract
2015Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Walk, Christian; Goehlich, Andreas; Giese, Andre; Görtz, Michael; Vogt, Holger; Kraft, Michael
Conference Paper
2015Optimierung von Polysilicium Membranen eines absolut messenden, kapazitiven MEMS Drucksensors
Walk, Christian; Giese, Andre; Weidenmüller, Jens; Görtz, Michael
Conference Paper
2015Telemetriesystem zur nichtinvasiven Glukosemessung in der Tränenflüssigkeit
Fischer, Roland; Hennig, Andreas; Lauko, Jan; Wilson, Christopher; Görtz, Michael; Mokwa, Wilfried
Conference Paper
2014Development of an implantable integrated MEMS pressure sensor using polyimide epoxy composite and Atomic Layer Deposition for encapsulation
Gembaczka, Pierre; Görtz, Michael; Kraft, Michael
Journal Article, Conference Paper
2014Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael
Journal Article
2014Implantable sensor to measure liquor pressure of a ventricular drainage system
Görtz, Michael; Bögel, G. vom; Gembaczka, Pierre; Kraft, Michael
Journal Article, Conference Paper
2014Eine offene Telemetrieplattform für implantierbare Medizintechnik
Wallrodt, M.; Harnack, M.; Görtz, Michael; Fischer, R.; Mokwa, Wilfried; Biela, S.; Pfennig, M.; Schmitz-Rode, Thomas
Journal Article
2013Kapazitive integrierte Drucksensoren für ein implantierbares System zur drahtlosen Druckmessung in der Pulmonalarterie
Gembaczka, Pierre; Görtz, Michael; Kordas, Norbert; Lerch, Renee G.; Müntjes, Jutta A.; Kraft, Michael; Mokwa, Wilfried
Conference Paper
2013Ongoing development and first long-term trials of a cardiac output monitoring system in the pulmonary artery (COMPASS)
Pfennig, M.; Cleven, Nina J.; Biela, S.; Urbaszek, Albrecht; Ooyen, A. van; Görtz, Michael; Mokwa, Wilfried; Schmitz-Rode, Thomas
Journal Article, Conference Paper
2013State of the art telemetric implantable sensors and their encapsulation
Kraft, Michael; Görtz, Michael; Müntjes, Jutta A.; Mokwa, Wilfried; Cleven, Nina J.; Schmitz-Rode, Thomas
Conference Paper
2013Studies on thinned flexible integrated capacitive pressure sensors in tactile sensor arrays for the use in robotics and prosthetics
Müntjes, Jutta A.; Häfner, Joachim; Görtz, Michael; Mokwa, Wilfried
Conference Paper
2013Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren
Görtz, Michael; Betz, Wolfgang; Mokwa, Wilfried; Vogt, Holger; Kraft, Michael
Conference Paper
2012Development of surgical techniques for implantation of a wireless intraocular epiretinal retina implant in Göttingen minipigs
Laube, T.; Brockmann, C.; Roessler, G.; Walter, P.; Krueger, C.; Görtz, Michael; Klauke, S.; Bornfeld, N.
Journal Article
2012Long-term intravascular blood-pressure monitoring with a novel, wireless sensor system - results from chronic in-vivo studies
Cleven, Nina J.; Woitok, Anna; Isfort, Peter; Penzkofer, Tobias; Görtz, Michael; Göttsche, Thorsten; Steinseifer, Ulrich; Schmitz-Rode, Thomas
Abstract
2012A novel fully implantable wireless sensor system for monitoring hypertension patients
Cleven, Nina J.; Müntjes, Jutta A.; Fassbender, Holger; Urban, Ute; Görtz, Michael; Vogt, Holger; Gräfe, Maik; Göttsche, Thorsten; Penzkofer, Tobias; Schmitz-Rode, Thomas; Mokwa, Wilfried
Journal Article
2012Results from long-term in-vivo tests of a wireless, intravascular blood-pressure monitoring system for hypertension patients
Cleven, Nina J.; Woitok, Anna; Penzkofer, T.; Isfort, P.; Görtz, Michael; Göttsche, Thorsten; Steinseifer, Ulrich; Schmitz-Rode, Thomas
Abstract
2012Thinned CMOS pressure sensors for tactile sensing in prosthetics
Häfner, Joachim; Görtz, Michael; Mokwa, Wilfried
Conference Paper
2011Implantable sensor for continuous pulmonary artery hemodynamic monitoring in heart failure patients (COMPASS)
Urbaszek, Albrecht; Görtz, Michael; Traulsen, Tim; Mokwa, Wilfried; Schmitz-Rode, Thomas
Conference Paper
2010Feasibility study of an integrated pressure sensor transponder for triggering of a pacemaker in the treatment of dysphagia
Betz, Wolfgang; Görtz, Michael; Feussner, H.; Schneider, A.; Knödgen, Fritz; Trieu, Hoc-Khiem
Conference Paper, Journal Article