Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018MMS, MMS-Array, MEMS-Aktuator und Verfahren zum Bereitstellen eines MMS
Dürr, Peter; Friedrichs, Martin; Gehner, Andreas; Kunze, Detlef
Patent
2017How to integrate MEMS on foundry-fabricated CMOS backplanes
Schulze, Matthias; Hohle, Christoph; Friedrichs, Martin
Conference Paper
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Poster
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Journal Article, Conference Paper
2015Stress controlled CMUT fabrication based on a CMOS compatible sacrificial release process
Elsäßer, Linus; Friedrichs, Martin; Klemm, Markus; Unamuno, Anartz
Conference Paper
2015Verfahren zum Herstellen eines kapazitiven Ultraschallwandlers und Anordnung einer Mehrzahl von kapazitiven Ultraschallwandlern
Unamuno-Eguren, Anartz; Friedrichs, Martin
Patent
2014High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn
Conference Paper
2014Multi-Level MOEMS structures for spatial light modulators
Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias
Conference Paper
2013Characterization of a MID-volume fabrication process for CMUT development
Unamuno, Anartz; Friedrichs, Martin; Jeroch, Werner; Grüger, Heinrich
Poster
2013Integration of multi-level MOEMS structure on CMOS for spatial light modulators
Friedrichs, Martin; List, Matthias; Müller, Michael
Conference Paper
2012Monolithic integration of MOEMS on CMOS backplanes using surface micromachining techniques
List, Matthias; Friedrichs, Martin; Müller, Michael
Conference Paper
2012One-dimensional light modulator
Sinning, Steffen; Wullinger, I.; Schmidt, Jan-Uwe; Friedrichs, Martin; Dauderstädt, Ulrike; Wolschke, Steffen; Hughes, Thomas; Pahner, D.; Wagner, Michael
Conference Paper
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation