Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018MMS, MMS-Array, MEMS-Aktuator und Verfahren zum Bereitstellen eines MMS
Dürr, Peter; Friedrichs, Martin; Gehner, Andreas; Kunze, Detlef
Patent
2018Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2018Precision glass molding of fused silica optics
Friedrichs, Marcel; Dambon, Olaf; Pongs, Guido; Zhang, Lin; Yi, Allen Y.; Klocke, Fritz
Conference Paper
2017Atomic diffusion induced degradation in bimetallic layer coated cemented tungsten carbide
Peng, Zirong; Rohwerder, Michael; Choi, Pyuck-Pa; Gault, Baptiste; Meiners, Thorsten; Friedrichs, Marcel; Kreilkamp, Holger; Klocke, Fritz; Raabe, Dierk
Journal Article
2017Chalcogenide glass molding advances precision IR optics
Friedrichs, Marcel; Kreilkamp, Holger
Journal Article
2017Degradation Mechanism of Molds for Precision Glass Molding
Peng, Zirong; Rohwerder, Michael; Friedrichs, Marcel; Choi, Pyuck-Pa; Gault, Baptiste; Meiners, Thorsten; Kreilkamp, Holger; Klocke, Fritz; Raabe, Dierk
Journal Article, Conference Paper
2017How to integrate MEMS on foundry-fabricated CMOS backplanes
Schulze, Matthias; Hohle, Christoph; Friedrichs, Martin
Conference Paper
2017Protective coatings for chalcogenide glass molding
Friedrichs, Marcel; Staasmeyer, Jan-Helge; Dambon, Olaf; Klocke, Fritz
Conference Paper
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Poster
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Journal Article, Conference Paper
2016Influence of the interlayer material selection for PtIr-coatings on the degradation mechanisms for use in Precision Glass Molding
Friedrichs, Marcel; Dambon, Olaf; Bernhardt, Frank; Dong, Zhen; Klocke, Fritz
Conference Paper
2016Model of coating wear degradation in precision glass molding
Klocke, Fritz; Dambon, Olaf; Rohwerder, Michael; Bernhardt, Frank; Friedrichs, Marcel; Merzlikin, Sergly V.
Journal Article
2016Tribological wear analysis and numerical lifetime prediction of glassy carbon tools in fused silica molding
Dukwen, Julia; Friedrichs, Marcel; Liu, Gang; Tang, Minjie; Dambon, Olaf; Klocke, Fritz
Journal Article
2015Stress controlled CMUT fabrication based on a CMOS compatible sacrificial release process
Elsäßer, Linus; Friedrichs, Martin; Klemm, Markus; Unamuno, Anartz
Conference Paper
2015Verfahren zum Herstellen eines kapazitiven Ultraschallwandlers und Anordnung einer Mehrzahl von kapazitiven Ultraschallwandlern
Unamuno-Eguren, Anartz; Friedrichs, Martin
Patent
2014Drilling of cooling holes by using high power ultrashort pulsed laser radiation
Uchtmann, H.; Friedrichs, M.; Kelbassa, I.
Conference Paper
2014High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn
Conference Paper
2014Multi-Level MOEMS structures for spatial light modulators
Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias
Conference Paper
2013Characterization of a MID-volume fabrication process for CMUT development
Unamuno, Anartz; Friedrichs, Martin; Jeroch, Werner; Grüger, Heinrich
Poster
2013Integration of multi-level MOEMS structure on CMOS for spatial light modulators
Friedrichs, Martin; List, Matthias; Müller, Michael
Conference Paper
2012Monolithic integration of MOEMS on CMOS backplanes using surface micromachining techniques
List, Matthias; Friedrichs, Martin; Müller, Michael
Conference Paper
2012One-dimensional light modulator
Sinning, Steffen; Wullinger, I.; Schmidt, Jan-Uwe; Friedrichs, Martin; Dauderstädt, Ulrike; Wolschke, Steffen; Hughes, Thomas; Pahner, D.; Wagner, Michael
Conference Paper
2010Multispectral characterization of diffractive micromirror arrays
Berndt, D.; Heber, J.; Sinning, S.; Kunze, D.; Knobbe, J.; Schmidt, J.-U.; Bring, M.; Rudloff, D.; Friedrichs, M.; Rössler, J.; Eckert, M.; Kluge, W.; Neumann, H.; Wagner, M.; Lakner, H.
Conference Paper
2010Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range
Schmidt, J.-U.; Bring, M.; Heber, J.; Friedrichs, M.; Rudloff, D.; Rößler, J.; Berndt, D.; Neumann, H.; Kluge, W.; Eckert, M.; List, M.; Müller, M.; Wagner, M.
Conference Paper
2009Advances in SLM development for microlithography
Dauderstädt, U.; Askebjer, P.; Björnängen, P.; Dürr, P.; Friedrichs, M.; List, M.; Rudloff, D.; Schmidt, J.-U.; Müller, M.; Wagner, M.
Conference Paper
2009Fabrication of large-scale mono-crystalline silicon micro-mirror arrays using adhesive wafer transfer bonding
Zimmer, F.; Niklaus, F.; Lapisa, M.; Ludewig, T.; Bring, M.; Friedrichs, M.; Bakke, T.; Schenk, H.; Wijngaart, W. van der
Conference Paper
2008Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors
Schmidt, J.-U.; Friedrichs, M.; Gehner, A.
Journal Article
2008The integration of mono-crystalline silicon micro-mirrors on CMOS for SLM applications
Zimmer, F.; Friedrichs, M.; Lapisa, M.; Niklaus, F.; Müller, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2008Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates
Schmidt, J.-U.; Friedrichs, M.; Bakke, T.; Voelker, B.; Rudloff, D.; Lakner, H.
Conference Paper
2007Hochauflösende Flächenlichtmodulatoren auf Basis von Mikrospiegelmatrizen
Wagner, M.; Dürr, P.; Dauderstädt, U.; Gehner, A.; Friedrichs, M.; Schmidt, J.-U.; Lakner, H.
Conference Paper
2007Technologieentwicklung für 1-Mega-Pixel Mikrospiegel-Arrays mit hohem optischem Füllfaktor und langzeitstabilem Auslenkverhalten
Schmidt, J.-U.; Friedrichs, M.; Rudloff, D.; Lakner, H.
Conference Paper
2006Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
Krellmann, M.; Friedrichs, M.; Dauderstädt, U.; Wagner, M.; Lakner, H.
Conference Paper
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation
2006Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.; Schenk, H.; Lakner, H.
Conference Paper
2006Micromirror Array of Monocrystalline Silicon
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.
Conference Paper
2006One megapixel SLM with high optical fill factor and low creep actuators
Friedrichs, M.; Schmidt, J.; Duerr, P.; Bakke, T.
Conference Paper
2005Drift free, highly planar silicon micromirror arrays
Völker, B.; Friedrichs, M.; Rudloff, D.; Bakke, T.
Conference Paper
2005Etch stop materials for release by vapor HF etching
Bakke, T.; Schmidt, J.; Friedrichs, M.; Völker, B.
Conference Paper
2005Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding
Bakke, T.; Friedrichs, M.; Völker, B.; Reiche, M.; Leonardsson, L.; Schenk, H.; Lakner, H.
Conference Paper