Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Microstructural analysis of the modifications in substrate-bound silicon-rich silicon oxide induced by continuous wave laser irradiation
Wang, Nan; Fricke-Begemann, Thomas; Peretzki, Patrick; Thiel, Karsten; Ihlemann, Jürgen; Seibt, Michael
Journal Article
2014Fabrication of Fresnel micro lens array in borosilicate glass by F2-laser ablation for glass interposer application
Brusberg, L.; Neitz, M.; Schröder, H.; Fricke-Begemann, T.; Ihlemann, J.
Conference Paper