Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy
Hutzler, Andreas; Matthus, Christian D.; Dolle, Christian; Rommel, Mathias; Jank, Michael P.M.; Spiecker, Erdmann; Frey, Lothar
Journal Article
2019Wavelength-selective 4H-SiC UV-sensor array
Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.
Journal Article
2018Analysis of compensation effects in aluminum-implanted 4H-SiC devices
Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.
Conference Paper
2018Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2018Anode recirculation and purge strategies for PEM fuel cell operation with diluted hydrogen feed gas
Steinberger, Michael; Geiling, Johannes; Öchsner, Richard; Frey, Lothar
Journal Article
2018Calculation of frequency dependent power losses in inductive systems with litz wire conductors by a coupled numeric approach
Rosskopf, Andreas
: Frey, Lothar
Dissertation
2018Electrical properties of schottky-diodes based on B doped diamond
Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.
Conference Paper
2018Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.
Journal Article
2018Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2018Heavily n-type doped silicon and the dislocation formation during its growth by the Czochralski method
Stockmeier, Ludwig
: Lerch, R.; Frey, L.; Danilewsky, A.N.
Dissertation
2018Heterogeneous integration of vertical GaN power transistor on Si capacitor for DC-DC converters
Yu, Zechun; Zeltner, Stefan; Boettcher, Norman; Rattmann, Gudrun; Leib, Jürgen; Bayer, Christoph Friedrich; Schletz, Andreas; Erlbacher, Tobias; Frey, Lothar
Presentation
2018Human Sweat Analysis Using a Portable Device Based on a Screen‐printed Electrolyte Sensor
Zoerner, A.; Oertel, S.; Jank, M.P.M.; Frey, L.; Langenstein, B.; Bertsch, T.
Journal Article
2018Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Rosshirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Conference Paper
2018Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
2018Nano- and micro-patterned S-, H- and X-PDMS for cell-based applications: Comparison of wettability, roughness and cell-derived parameters
Scharin-Mehlmann, Marina; Häring, Aaron; Rommel, Mathias; Dirnecker, Tobias; Friedrich, Oliver; Frey, Lothar; Gilbert, Daniel F.
Journal Article
2018Normalized differential conductance to study current conduction mechanisms in MOS structures
Nouibat, T.H.; Messai, Z.; Chikouch, D.; Ouennoughi, Z.; Rouag, N.; Rommel, Mathias; Frey, Lothar
Journal Article
2018One-step nanoimprinted Bragg grating sensor based on hybrid polymers
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Stumpf, Florian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Journal Article
2018Principle of lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias
Poster
2018TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing
Rosenberger, Manuel; Girschikofsky, Maiko; Förthner, Michael; Belle, Stefan; Rommel, Mathias; Frey, Lothar; Schmauß, Bernhard; Hellmann, Ralf
Journal Article
2018Untersuchung der elektrischen Feldstärke und des Teilentladungsverhaltens an keramischen Schaltungsträgern
Bayer, Christoph Friedrich
: Frey, Lothar
Dissertation
2017Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C
Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.
Journal Article
2017Determination of the selectivity of printed wearable sweat sensors
Zörner, A.; Oertel, S.; Schmitz, B.; Lang, N.; Jank, M.P.M.; Frey, L.
Conference Paper
2017Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Presentation
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2017Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers
Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar
Journal Article
2017Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.
Conference Paper
2017Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Poster
2017Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography
Rumler, Maximilian; Foerthner, M.; Baier, L.; Evanschitzky, P.; Becker, M.; Rommel, M.; Frey, L.
Journal Article
2017Monolithically integrated solid-state-circuit-breaker for high power applications
Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Nanoimprinted surface relief Bragg gratings for sensor applications
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Poster
2017One-step fabrication of hierarchical structures
Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2017Polymerization related deformations in multilayer soft stamps for nanoimprint
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Scheer, Hella-Christin; Frey, Lothar
Journal Article
2017Stress reduction in high voltage MIS capacitor fabrication
Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.
Conference Paper
2017Waveguide bragg gratings in Ormocer®s for temperature sensing
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, M.; Baier, L.; Michel, F.; Förthner, M.; Becker, M.; Rommel, M.; Frey, L.
Conference Paper
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2016Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles
Polster, S.; Jank, M.P.M.; Frey, L.
Journal Article
2016Determination of Fowler-Nordheim tunneling parameters in Metal-Oxide-Semiconductor structure including oxide field correction using a vertical optimization method
Toumi, S.; Ouennoughi, Z.; Strenger, K.C.; Frey, L.
Journal Article
2016The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles
Meric, Z.; Mehringer, C.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2016Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximillian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Journal Article
2016Ion implantation of polypropylene films for the manufacture of thin film capacitors
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.
Conference Paper
2016Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization
Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme
Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.
Journal Article
2016Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Job, Reinhart; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Monolithic 3D TSV-based high-voltage, high-temperature capacitors
Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
Albrecht, Matthäus; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Prospects and issues of nanomaterials use in microelectronics
Jank, Michael; Bauer, Anton; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Screen-printed biochemical sensors for detection of ammonia levels in sweat - Towards integration with vital parameter monitoring sports gear
Oertel, S.; Jank, M.P.M.; Frey, L.; Hofmann, C.; Lang, N.; Struck, M.
Conference Paper
2016Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability
Krach, Florian; Thielen, Nils; Heckel, Thomas; Bauer, Anton J.; Erlbacher, Tobias; Frey, Lothar
Conference Paper
2016Slew rate control of a 600 V 55 mΩ GaN cascode
Endruschat, A.; Heckel, T.; Reiner, R.; Waltereit, P.; Quay, R.; Ambacher, O.; März, M.; Eckardt, B.; Frey, L.
Conference Paper
2016TiO2 nanotubes: Nitrogen-ion implantation at low dose provides noble-metal-free photocatalytic H2-evolution activity
Zhou, X.; Häublein, V.; Liu, N.; Nguyen, N.T.; Zolnhofer, E.M.; Tsuchiya, H.; Killian, M.S.; Meyer, K.; Frey, L.; Schmuki, P.
Journal Article
2016Waveguide Bragg gratings in Ormocer hybrid polymers
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
2015"Black" TiO2 nanotubes formed by high-energy proton implantation show noble-metal-co-catalyst free photocatalytic H-2-evolution
Liu, N.; Haublein, V.; Zhou, X.M.; Venkatesan, U.; Hartmann, M.; Mackovic, M.; Nakajima, T.; Spiecker, E.; Osvet, A.; Frey, L.; Schmuki, P.
Journal Article
2015Assessment of dicing induced damage and residual stress on the mechanical and electrical behavior of chips
Fuegl, M.; Mackh, G.; Meissner, E.; Frey, L.
Conference Paper
2015Bioactivation and functionalization of PDMS surfaces to control cellular adhesion behaviour by micro- or nanopatterning and plasma treatment
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Gilbert, D.F.; Herrmann, M.; Frey, Lothar
Poster
2015Characterization and application of nano- and microstructured PDMS surfaces for manipulation of cells
Scharin, Marina; Gilbert, D.; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Haering, A.; Friedrich, O.; Frey, Lothar
Presentation
2015Characterization and application of nano- and microstructured silicon-polymer-based surfaces for manipulation of cells
Scharin, Marina; Haering, Aaron; Gilbert, D.; Dirnecker, Tobias; Stumpf, Florian; Rommel, Mathias; Friedrich, Oliver; Frey, Lothar
Poster
2015Charge pumping measurements on differently passivated lateral 4H-SiC MOSFETs
Salinaro, A.; Pobegen, G.; Aichinger, T.; Zippelius, B.; Peters, D.; Friedrichs, P.; Frey, L.
Journal Article
2015Comparison of silicon and 4H silicon carbide patterning using focused ion beams
Veerapandian, Savita Kaliya Perumal; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, Lex; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Journal Article, Conference Paper
2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers
Förthner, Michael; Rumler, Maximillian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers
Förthner, Michael; Rumler, Maximillian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2015Controlling cellular adhesion through micro- or nanopatterning of silicone-based surfaces to improve biomedical devices for in vitro based applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Glibert, D.F.; Herrmann, M.; Frey, Lothar
Poster
2015Current conduction mechanism of MIS devices using multidimensional minimization system program
Rouag, N.; Ouennoughi, Zahir; Rommel, Mathias; Murakami, Katsuhisa; Frey, Lothar
Journal Article
2015Device optimization and application study of low cost printed temperature sensor for mobile and stationary battery based Energy Storage Systems
Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; März, M.; Frey, L.
Conference Paper
2015A DLTS study of hydrogen doped czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Journal Article, Conference Paper
2015Functionalization of PDMS surfaces through micro- or nano-patterning to control the cellular adhesion
Scharin, Marina; Häring, Aron; Dirnecker, Tobias; Rommel, Mathias; Marhenke, Julius; Friedrich, O.; Gilbert, D.F.; Herrmann, Martin; Frey, Lothar
Presentation
2015High-voltage monolithic 3D capacitors based on through-silicon-via technology
Grünler, Saeideh; Rattmann, Gudrun; Erlbacher, Tobias; Bauer, Anton; Frey, Lothar
Poster
2015Impact of post-trench processing on the electrical characteristics of 4H-SiC trench-MOS structures with thick top and bottom oxides
Banzhaf, C.T.; Grieb, M.; Rambach, M.; Bauer, A.J.; Frey, L.
Conference Paper
2015Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L.
Journal Article
2015Influence of annealing, oxidation and doping on conduction-band near interface traps in 4H-SiC characterized by low temperature conductance measurements
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.; Frey, L.
Conference Paper
2015Integrated galvanically isolated MOSFET and IGBT gate-driver circuit with switching speed control
Lorentz, V.R.H.; Schwarz, R.; Heckel, T.; März, M.; Frey, L.
Conference Paper
2015Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper
Poster
2015Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, N.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
2015Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
Erlbacher, T.; Schwarzmann, H.; Bauer, A.J.; Döhler, G.H.; Schreivogel, M.; Lutz, T.; Guillén, F.H.; Graf, J.; Fix, R.; Frey, L.
Journal Article
2015Modeling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Presentation
2015Modelling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, R.; Frey, L.; Weber, H.; Moder, I.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Conference Paper
2015Nano- and micrometer scale surface topography modification of Si (100) by Ga focused ion beam irradiation
Rai, Deepa; Stumpf, Florian; Frey, Lothar; Rommel, Mathias
Poster
2015A novel charge based SPICE model for nonlinear device capacitances
Heckel, T.; Frey, L.
Conference Paper
2015Optical bragg gratings in inorganic-organic hybrid polymers for highly sensitive temperature measurements
Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Förthner, Michael; Frey, Lothar; Rommel, Mathias; Fader, Robert
Conference Paper
2015Robust double-ring junction termination extension design for high voltage power semiconductor devices based on 4H-SiC
Hürner, A.; Benedetto, L. di; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Conference Paper
2015SiC MOSFETs in hard-switching bidirectional DC/DC converters
Heckel, T.; Eckardt, B.; März, M.; Frey, L.
Conference Paper
2015Silicon nitride, a high potential dielectric for 600 V integrated RC-snubber applications
Krach, F.; Schwarzmann, H.; Bauer, A.J.; Erlbacher, T.; Frey, L.
Journal Article
2015Species transport by natural convection of supercritical ammonia
Seebeck, J.; Savva, P.; Erlekampf, J.; Meissner, E.; Friedrich, J.; Frey, L.
Conference Paper
2015Temperature dependent characterization of bipolar injection field-effect-transistors (BiFET) for determining the short-circuit-capability
Hürner, A.; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Conference Paper
2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays
Scharin, Marina; Newcomer, Kate; Al-Naimi, Abd; Dirnecker, Tobias; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays
Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
2015Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration
Meric, Z.; Mehringer, C.; Karpstein, N.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2014Analytical stress characterization after different chip separation methods
Fuegl, M.; Mackh, G.; Meissner, E.; Frey, L.
Journal Article
2014Bioactivation of plane and patterned PDMS thin films by wettability engineering
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, Julius; Herrmann, Benjamin; Rumler, Maximilian; Fader, Robert; Frey, Lothar; Herrmann, Martin
Journal Article
2014Characterization and application of 600 V normally-off GaN transistors in hard switching DC/DC converters
Heckel, T.; Frey, L.; Zeltner, S.
Conference Paper
2014Comparison of patterning silicon and silicon carbide using focused ion beam
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Poster
2014Deep-level defects in high-dose proton implanted and high-temperature annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Rommel, Mathias; Schustereder, Werner; Schulze, Hans-Joachim; Frey, Lothar; Job, R.
Conference Paper
2014DLTS characterization of proton-implanted silicon under varying annealing conditions
Laven, J.G.; Jelinek, M.; Job, R.; Schustereder, W.; Schulze, H.-J.; Rommel, M.; Frey, L.
Journal Article
2014A DLTS study of hydrogen doped Czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, S.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
2014Effect of shallow n-doping on field effect mobility in p-doped channels of 4H-SiC MOS field effect transistors
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.J.; Frey, L.
Conference Paper
2014Experimental analysis of bipolar SiC-devices for future energy distribution systems
Huerner, A.; Mitlehner, H.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2014Galvanically isolated differential data transmission using capacitive coupling and a modified Manchester algorithm for smart power converters
Niedermeier, M.T.; Wenger, M.M.; Filimon, R.; Sedlacek, V.O.; Lorentz, V.R.H.; Fort, C.; März, M.; Ferrieux, J.P.; Frey, L.
Conference Paper
2014High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors
Oertel, S.; Jank, M.P.M.; Teuber, E.; Bauer, A.J.; Frey, L.
Conference Paper, Journal Article
2014Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2014Investigation of trenched and high temperature annealed 4H-SiC
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2014Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2014Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, R.; Förthner, M.; Haas, A.; Rommel, M.; Bauer, A.J.; Frey, L.
Presentation
2014Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Presentation
2014MeV-proton channeling in crystalline silicon
Jelinek, Moriz; Schustereder, Werner; Kirnstoetter, S.; Laven, Johannes G.; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2014Modification of polypropylene films for thin film capacitors by ion implantation
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Grimm, W.
Conference Paper
2014Nanoscale characterization of TiO2 films grown by atomic layer deposition on RuO2 electrodes
Murakami, Katsuhisa; Rommel, Mathias; Hudec, Boris; Rosová, Alica; Hušeková, Krístina; Dobročka, Edmund; Rammula, Raul; Kasikov, Arne; Han, Jeong Hwan; Lee, Woongkyu; Song, Seul Ji; Paskaleva, Albena; Bauer, Anton J.; Frey, Lothar; Fröhlich, Karol; Aarik, Jaan; Hwang, Cheol Seong
Journal Article
2014NanoSPV - SPM Technique for Measuring Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, M.; Bauer, A.J.; Frey, L.; Hitzel, F.; Stadelmann, A.
Presentation
2014NanoSPV - SPM Technique for the Quantitative Measurement of Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, Mathias; Bauer, Anton; Frey, Lothar; Hitzel, Frank; Stadelmann, Anja; Bartel, Til
Presentation
2014A new method to increase the doping efficiency of proton implantation in a high-dose regime
Jelinek, Moriz; Laven, Johannes G.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2014Numerical time-dependent 3D simulation of flow pattern and heat distribution in an ammonothermal system with various baffle shapes
Erlekampf, J.; Seebeck, J.; Savva, P.; Meissner, E.; Friedrich, J.; Alt, N.S.A.; Schlücker, E.; Frey, L.
Conference Paper, Journal Article
2014Optical polymers with tunable refractive index for nanoimprint technologies
Landwehr, Johannes; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann
Journal Article
2014Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann
Poster
2014Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdman
Poster
2014Pulsed direct flame deposition and thermal annealing of transparent amorphous indium zinc oxide films as active layers in field effect transistors
Kilian, D.; Polster, S.; Vogeler, I.; Jank, M.P.M.; Frey, L.; Peukert, W.
Journal Article
2014Reliability of monolithic RC-snubbers in MOS-based power modules
Erlbacher, T.; Schwarzmann, H.; Krach, F.; Bauer, A.J.; Berberich, S.E.; Kasko, I.; Frey, L.
Conference Paper
2014Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography
Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike
Poster
2014Systematic analysis of the high- and low-field channel mobility in lateral 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Mortet, V.; Ortiz, G.; Erlbacher, T.; Burenkov, A.; Bauer, A.J.; Cristiano, F.; Bedel-Pereira, E.; Pichler, P.; Ryssel, H.; Frey, L.
Conference Paper
2014Temperature and electrical field dependence of the ambipolar mobility in n-doped 4H-SiC
Hürner, A.; Bonse, C.; Clemmer, G.; Kallinger, B.; Heckel, T.; Erlbacher, T.; Mitlehner, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2014Thickness mapping of high-k dielectrics at the nanoscale
Trapnauskas, Justinas; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Journal Article
2013Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rommel, Mathias; Bauer, Anton J.; Rumler, Maximilian; Frey, Lothar; Verschuuren, Marcus Antonius; Laar, Robert van de; Ji, Ran; Schömbs, Ulrike
Journal Article, Conference Paper
2013Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U.
Presentation
2013Alloying of ohmic contacts to n-type 4H-SiC via laser irradiation
Hürner, A.; Schlegl, T.; Adelmann, B.; Mitlehner, H.; Hellmann, R.; Bauer, A.J.; Frey, L.
Conference Paper
2013Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries
Iglesias, V.; Martin-Martinez, J.; Porti, M.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Bersuker, G.
Journal Article
2013Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2013Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC
Häublein, V.; Temmel, G.; Mitlehner, H.; Rattmann, G.; Strenger, C.; Hürner, A.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2013Conceptional design of nano-particulate ITO inks for inkjet printing of electron devices
Kölpin, Nadja; Wegener, Moritz; Teuber, Erik; Polster, Sebastian; Frey, Lothar; Roosen, Andreas
Journal Article
2013Conduction mechanisms in thermal nitride and dry gate oxides grown on 4H-SiC
Ouennoughi, Z.; Strenger, C.; Bourouba, F.; Haeublein, V.; Ryssel, H.; Frey, L.
Journal Article
2013Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi
Noll, S.; Scholten, D.; Grieb, M.; Bauer, A.J.; Frey, L.
Conference Paper
2013Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Journal Article
2013Evaluation of UV-SCIL resists for structure transfer using plasma etching
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas
Poster
2013Functional epoxy polymer for direct nano-imprinting of micro-optical elements
Fader, R.; Landwehr, J.; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Völkel, R.; Brehm, M.; Kraft, A.
Journal Article
2013Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Pichler, P.; Erlbacher, T.; Ryssel, H.; Frey, L.
Conference Paper
2013Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction
Rommel, Mathias; Jambreck, Joachim D.; Lemberger, Martin; Bauer, Anton J.; Frey, Lothar; Murakami, Katsuhisa; Richter, Christoph; Weinzierl, Philipp
Journal Article
2013Innovative balancing, heating and temperature sensing element for automotive batteries
Filimon, R.; Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; Wenger, M.; Giegerich, M.; März, M.; Frey, L.
Conference Paper
2013Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts
Adelmann, B.; Hürner, A.; Schlegel, T.; Bauer, A.J.; Frey, L.; Hellmann, R.
Journal Article
2013Laser melting of nanoparticulate transparent conductive oxide thin films
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Journal Article
2013Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.
Presentation
2013Micromolding of micropatterned PDMS surfaces to define the adhesive behavior of human cells in vitro
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, J.; Rumler, Maximilian; Herrmann, Benjamin; Fader, Robert; Frey, Lothar; Herrmann, Martin
Poster
2013Optimization of copper top-side metallization for high performance SiC-devices
Behrens, T.; Suenner, T.; Geinitz, E.; Schletz, A.; Frey, L.
Conference Paper
2013Patterning flat and tilted 4H-SiC by Ga+ resistless lithography and subsequent reactive ion etching
Beuer, Susanne; Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Bauer, Anton J.; Frey, Lothar
Poster
2013Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.
Journal Article
2013Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, Anton J.; Frey, Lothar; Hermman, Martin
Poster
20124H-SiC MOSFETs with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2012Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications
Schwarzmann, Holger; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Conference Paper
2012Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM
Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Presentation
2012Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar
Journal Article
2012Effect of HfO2 polycrystallinity on distribution of the CAFM-induced TDDB in high-k gate stacks
Iglesias, V.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Porti, M.; Martin-Martinez, J.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Bersuker, G.
Poster
2012Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Journal Article
2012Eletrisches Überbrückungselement, insbesondere für Speicherzellen eines Energiespeichers
Dorp, Joachim vom; Erlbacher, Tobias; Frey, L.
Patent
2012Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar
Poster
2012Fabrication and application of shielded probes for conductive AFM measurements
Jambreck, Joachim D.; Rommel, Mathias; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Poster
2012Feasibility and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, T.; Huerner, A.; Bauer, A.J.; Frey, L.
Journal Article
2012Feasiblity and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, Tobias; Hürner A.; Bauer, Anton J.; Frey, Lothar
Journal Article
2012Ferroelectricity in simple binary ZrO2 and HfO2
Müller, J.; Böscke, T.S.; Schröder, U.; Mueller, S.; Bräuhaus, D.; Böttger, U.; Frey, L.; Mikolajick, T.
Journal Article
2012Functional epoxy polymer for direct nano-imprinting of micro optical elements
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas
Poster
2012Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Conference Paper
2012In situ monitoring technologies for ammonthermal reactors
Alt, N.; Meissner, E.; Schlücker, E.; Frey, L.
Journal Article
2012Intrinsic MOSFET leakage of high-k peripheral DRAM devices: Measurement and simulation
Roll, G.; Jakschik, S.; Goldbach, M.; Wachowiak, A.; Mikolajick, T.; Frey, L.
Conference Paper
2012Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Journal Article, Conference Paper
2012Modular inverter power electronic for intelligent e-drives
Hofmann, M.; Schletz, A.; Domes, K.; Marz, M.; Frey, L.
Conference Paper
2012Nanoscale characterization of TiO2 films grown by atomic layer deposition
Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Hudec, Boris; Rosova, A.; Hueková, K.; Fröhlich, Karol; Kasikov, A.; Ramula, R.; Aarik, J.; Han, J.H.; Han, S.; Lee, W.; Song, S.J.; Hwang, C.S.
Poster
2012Nanosecond polarization switching and long retention in a novel MFIS-FET based on ferroelectric HfO2
Müller, J.; Böscke, T.S.; Schröder, U.; Hoffmann, R.; Mikolajick, T.; Frey, L.
Journal Article
2012Novel cost-efficient contactless distributed monitoring concept for smart battery cells
Lorentz, V.R.H.; Wenger, M.M.; Grosch, J.L.; Giegerich, M.; Jank, M.P.M.; März, M.; Frey, L.
Conference Paper
2012Novel organic polymer for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Journal Article, Conference Paper
2012Ohmic and rectifying contacts on bulk AlN for radiation detector applications
Erlbacher, Tobias; Bickermann, Matthias; Kallinger, Birgit; Meissner, Elke; Bauer, Anton J.; Frey, Lothar
Journal Article, Conference Paper
2012Plasma-assisted atomic layer deposition of alumina at room temperature
Lemberger, Martin; Fromm, Timo; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Poster
2012Purity of ion beams: Analysis and simulation of mass spectra and mass interferences in ion implantation
Häublein, V.; Ryssel, H.; Frey, L.
Journal Article
2012Reliability characterization of dielectrics in 200V trench capacitors
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
2012Significant on-resistance reduction of LDMOS devices by intermitted trench gates integration
Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Journal Article
2012Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2012Smart battery cell monitoring with contactless data transmission
Lorentz, V.; Wenger, M.; Giegerich, M.; Zeltner, S.; März, M.; Frey, L.
Conference Paper
2012Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium
Maier, R.; Häublein, V.; Ryssel, H.; Völlm, H.; Feili, D.; Seidel, H.; Frey, L.
Conference Paper
2012Structural and reliability analysis of ohmic contacts to SiC with a stable protective coating for harsh environment applications
Daves, W.; Kraus, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Journal Article
2012The thermal budget of hydrogen-related donor profiles: Diffusion-limited activation and thermal dissociation
Laven, J.G.; Job, R.; Schulze, H.-J.; Niedernostheide, F.-J.; Schustereder, W.; Frey, L.
Conference Paper
20114H-SiC n-MOSFET logic circuits for high temperature operation
Le-Huu, M.; Grieb, M.; Schrey, F.F.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2011Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications
Daves, W.; Krauss, A.; Behnel, N.; Häublein, V.; Bauer, A.; Frey, L.
Journal Article
2011Analysis of the effect of germanium preamorphization on interface defects and leakage current for high-k metal-oxide-semiconductor field-effect transistor
Roll, G.; Jakschik, S.; Goldbach, M.; Wachowiak, A.; Mikolajick, T.; Frey, L.
Journal Article, Conference Paper
2011Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2011Comparative study on metallization and passivation materials for high temperature sensor applications
Daves, W.; Krauss, A.; Le-Huu, M.; Kronmüller, S.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2011Conduction mechanisms and environmental sensitivity of solution-processed silicon nanoparticle layers for thin-film transistors
Weis, S.; Körmer, R.; Jank, M.P.M.; Lemberger, M.; Otto, M.; Ryssel, H.; Peukert, W.; Frey, L.
Journal Article
2011Conversion efficiency of radiation damage profiles into hydrogenrelated donor profiles
Laven, J.G.; Job, R.; Schustereder, W.; Schulze, H.-J.; Niedernostheide, F.-J.; Schulze, H.; Frey, L.
Conference Paper
2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, K.; Rommel, M.; Yanev, V.; Bauer, A.J.; Frey, L.
Poster
2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, Anton J.; Frey, Lothar
Conference Paper
2011Dielectric layers suitable for high voltage integrated trench capacitors
Dorp, J. vom; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article, Conference Paper
2011Dopant profiles in silicon created by MeV hydrogen implantation: Influence of annealing parameters
Laven, J.G.; Schulze, H.-J.; Häublein, V.; Niedernostheide, F.-J.; Schulze, H.; Ryssel, H.; Frey, L.
Journal Article
2011Effects of oxygen and forming gas annealing on ZnO TFTs
Huang, J.; Radhakrishna, U.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.
Conference Paper
2011Electrical characterization of lateral 4H-SiC MOSFETs in the temperature range of 25 to 600 °C for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2011Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Journal Article
2011EPR investigations of non-oxidized silicon nanoparticles from thermal pyrolysis of silane
Körmer, R.; Otto, M.; Wu, J.; Jank, M.P.M.; Frey, L.; Peukert, W.
Journal Article
2011Experiments and simulation of the diffusion and activation of the n-Type dopants P, As, and Sb implanted into germanium
Koffel, S.; Kaiser, R.J.; Bauer, A.J.; Amon, B.; Pichler, P.; Lorenz, J.; Frey, L.; Scheiblin, P.; Mazzocchi, V.; Barnes, J.-P.; Claverie, A.
Journal Article, Conference Paper
2011Ferroelectric Zr0.5Hf0.5O2 thin films for nonvolatile memory applications
Müller, J.; Böscke, T.S.; Bräuhaus, D.; Schröder, U.; Böttger, U.; Sundqvist, J.; Kcher, P.; Mikolajick, T.; Frey, L.
Journal Article
2011Ferroelectricity in yttrium-doped hafnium oxide
Müller, J.; Schröder, U.; Böscke, T.S.; Müller, I.; Böttger, U.; Wilde, L.; Sundqvist, J.; Lemberger, M.; Kücher, P.; Mikolajick, T.; Frey, L.
Journal Article
2011Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article, Conference Paper
2011Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie. Leistungen und Ergebnisse. Jahresbericht 2010
: Richter, T.; Frey, L.
Annual Report
2011Gate oxide reliability at the nano-scale evaluated by combining cAFM and CVS
Erlbacher, T.; Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2011Germanium substrate loss during thermal processing
Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
2011A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
Murakami, M.; Rommel, M.; Yanev, V.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article
2011Impact of carbon junction implant on leakage currents and defect distribution: Measurement and simulation
Roll, G.; Jakschik, S.; Burenkov, A.; Goldbach, M.; Mikolajick, T.; Frey, L.
Journal Article, Conference Paper
2011Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures
Paskaleva, A.; Lemberger, M.; Bauer, A.J.; Frey, L.
Journal Article
2011Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2011Investigation of the reliability of 4H-SiC MOS devices for high temperature applications
Le-Huu, M.; Schmitt, H.; Noll, S.; Grieb, M.; Schrey, F.F.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article
2011Leakage current and defect characterization of p+n-source/drain diodes
Roll, G.; Goldbach, M.; Frey, L.
Journal Article
2011Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Poster
2011Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Jambreck, J.D.; Böhmler, M.; Rommel, M.; Hartschuh, A.; Bauer, A.J.; Frey, L.
Conference Paper
2011Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2011Modulares Steuerungskonzept für integrierte Messtechnik in der Halbleiterfertigung am Beispiel einer Mehrkammerprozessanlage
Schellenberger, Martin
: Ryssel, H.; Frey, L.
Dissertation
2011Monolithic RC-snubber for power electronic applications
Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Conference Paper
2011Novel polymers for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Poster
2011A novel PWM control for a bi-directional full-bridge DC-DC converter with smooth conversion mode transitions
Lorentz, V.R.H.; Schwarzmann, H.; März, M.; Bauer, A.J.; Ryssel, H.; Frey, L.; Poure, P.; Braun, F.
Journal Article
2011Properties of SiO2 and Si3N4 as gate dielectrics for printed ZnO transistors
Walther, S.; Polster, S.; Meyer, B.; Jank, M.; Ryssel, H.; Frey, L.
Journal Article, Conference Paper
2011Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2011Thermal characterization of an axle-twin-drive with system integrated double-inverter
Hofmann, M.; Eckardt, B.; März, M.; Frey, L.
Conference Paper
2011Tuning of charge carrier density of ZnO nanoparticle films by oxygen plasma treatment
Walther, S.; Polster, S.; Jank, M.P.M.; Thiem, H.; Ryssel, H.; Frey, L.
Journal Article, Conference Paper
2011UV-enhanced substrate conformal imprint lithography using an epoxy based polymer
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Kraft, A.
Poster
2010Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
Hinz, J.; Bauer, A.J.; Frey, L.
Journal Article
2010Carbon junction implant: Effect on leakage currents and defect distribution
Roll, G.; Jakschik, S.; Goldbach, M.; Mikolajick, T.; Frey, L.
Conference Paper
2010Characterization of thickness variations of thin dielectric layers at a nanoscale using Scanning Capacitance Microscopy
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
Rommel, M.; Spoldi, G.; Yanev, V.; Beuer, S.; Amon, B.; Jambreck, J.; Petersen, S.; Bauer, A.J.; Frey, L.
Journal Article
2010Deep doping profiles in silicon created by MeV hydrogen implantation: Influence of implantation parameters
Laven, J.G.; Schulze, H.-J.; Häublein, V.; Niedernostheide, F.-J.; Schulze, H.; Ryssel, H.; Frey, L.
Conference Paper
2010Direct imprinting, post processing, and characterization of functional UV-curing materials
Schmitt, H.; Kett, F.; Fader, R.; Rommel, M.; Bauer, A.J.; Hornung, M.; Frey, L.
Poster
2010Effective work function tuning in high-kappa dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article
2010Effects of oxygen and forming gas annealing on ZnO-TFTs
Huang, J.; Krishna, U.R.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.
Poster
2010Effizienzoptimierung integrierter elektrischer Antriebssysteme für Hybrid- und Elektrofahrzeuge
Hofmann, M.; Eckardt, B.; März, M.; Frey, L.
Conference Paper
2010Electrical scanning probe microscopy techniques for the detailed characterization of high-k dielectric layers
Rommel, M.; Yanev, V.; Paskaleva, A.; Erlbacher, T.; Lemberger, M.; Bauer, A.J.; Frey, L.
Conference Paper
2010Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
Hinz, J.; Bauer, A.J.; Thiede, T.; Fischer, R.A.; Frey, L.
Journal Article
2010Evolution of shear strength and microstructure of die bonding technologies for high temperature applications during thermal aging
Egelkraut, S.; Frey, L.; Knoerr, M.; Schletz, A.
Conference Paper
2010Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2010Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie. Leistungen und Ergebnisse. Jahresbericht 2009
: Richter, T.; Frey, L.
Annual Report
2010Full wafer microlens replication by UV imprint lithography
Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Bich, A.; Eisner, M.; Völkel, R.; Hornung, M.
Conference Paper, Journal Article
2010Future challenges in CMOS process modelling
Pichler, P.; Burenkov, A.; Lorenz, J.; Kampen, C.; Frey, L.
Journal Article, Conference Paper
2010Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafers
Lazareva, I.; Nutsch, A.; Schellenberger, M.; Pfitzner, L.; Frey, L.
Conference Paper
2010Honeycomb voids due to ion implantation in germanium
Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Claverie, A.; Benassayag, G.; Scheiblin, P.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
2010Impact of forming gas annealing on ZnO-TFTs
Huang, J.; Krishna, U.R.; Lemberger, M.; Jank, M.P.M.; Ryssel, H.; Frey, L.
Conference Paper
2010The impact of helium co-implantation on hydrogen induced donor profiles in float zone silicon
Laven, J.G.; Job, R.; Schulze, H.-J.; Niedernostheide, F.-J.; Häublein, V.; Schulze, H.; Schustereder, W.; Ryssel, H.; Frey, L.
Conference Paper
2010The impact of helium co-implantation on hydrogen induced donor profiles in float zone silicon
Schulze, H.-J.; Niedernostheide, F.-J.; Häublein, V.; Schulze, H.; Schustereder, W.; Ryssel, H.; Frey, L.; Job, R.; Laven, J.G.
Journal Article, Conference Paper
2010Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminum implanted 4H SiC
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Poster
2010Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles
Walther, S.; Schäfer, S.; Jank, M.P.M.; Thiem, H.; Peukert, W.; Ryssel, H.; Frey, L.
Journal Article
2010Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.D.; Ebm, C.; Platzgummer, E.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2010Integrierbare Bauelemente zur Erhöhung der Betriebssicherheit elektronischer Systemkomponenten im Automobil
Dorp, J. vom; Erlbacher, T.; Lorentz, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2010Lanthanoid implantation for effective work function control in NMOS high-k/metal gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2010Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010Modeling of the effective work function instability in metal/high-kappa dielectric stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article
2010Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010NMOS logic circuits using 4H-SiC MOSFETs for high temperature applications
Le-Huu, M.; Schrey, F.F.; Grieb, M.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2010Optical inspection of flat reflective surfaces by a wave front sensor
Lazareva, I.; Nutsch, A.; Pfitzner, L.; Frey, L.
Conference Paper
2010Polymer bonded soft magnetics for EMI filter applications in power electronics
Engelkraut, S.; Ryssel, H.; Frey, L.; Rauch, M.; Schletz, A.; März, M.
Conference Paper
2010Reduced on resistance in LDMOS devices by integrating trench gates into planar technology
Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article
2010Trench gate integration into planar technology for reduced on-resistance in LDMOS devices
Erlbacher, T.; Rattmann, G.; Bauer, A.J.; Frey, L.
Poster
2010Trench gate integration into planar technology for reduced on-resistance in LDMOS devices
Erlbacher, T.; Rattmann, G.; Bauer, A.J.; Frey, L.
Conference Paper
2010Virtual equipment engineering: A novel approach for the integrated development of semiconductor manufacturing equipment
Koitzsch, M.; Mattes, A.; Schellenberger, M.; Pfitzner, L.; Frey, L.
Conference Paper
2009Characterization of Organic Contamination during Semiconductor Manufacturing Processing Employing Near Edge X-Ray Absorption Fine Structure Spectroscopy
Mueller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.; Müller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.
Abstract
2009Characterization of organic contamination in semiconductor manufacturing processes
Nutsch, A.; Beckhoff, B.; Bedana, G.; Borionetti, G.; Codegoni, D.; Grasso, S.; Guerinoni, G.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.; Simone, D. de; Frey, L.
Conference Paper
2009Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article
2009Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2009Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2009Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie. Leistungen und Ergebnisse. Jahresbericht 2008
: Öchsner, R.; Frey, L.
Annual Report
2009Full wafer microlens replication by UV imprint lithography
Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Bich, A.; Eisner, M.; Voelkel, R.; Hornung, M.
Poster
2009Highly sensitive wavefront sensor for characterization of micro- to nanometer-scale surface flatness deviations
Lazareva, I.; Nutsch, A.; Pfitzner, L.; Frey, L.
Conference Paper
2009Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition
Müller, J.; Böscke, T.S.; Schröder, U.; Reinicke, M.; Oberbeck, L.; Zhou, D.; Weinreich, W.; Kücher, P.; Lemberger, M.; Frey, L.
Conference Paper, Journal Article
2009Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.; Ebm, C.; Platzgummer, E.; Bauer, A.; Frey, L.
Poster, Conference Paper
2009Lanthanum implantation for threshold voltage control in metal/high-k devices
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper, Journal Article
2008Self-aligned growth of organometallic layers for nonvolatile memories: Comparison of liquid-phase and vapor-phase deposition
Erlbacher, T.; Jank, M.P.M.; Ryssel, H.; Frey, L.; Engl, R.; Walter, A.; Sezi, R.; Dehm, C.
Journal Article
2008Simulation of mass interferences considering charge exchange events and dissociation of molecular ions during extraction
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2007MOCVD of hafnium silicate films obtained from a single-source precursor on silicon and germanium for gate-dielectric applications
Lemberger, M.; Schön, F.; Dirnecker, T.; Jank, M.P.M.; Frey, L.; Ryssel, H.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.
Journal Article
2007UV nanoimprint materials: Surface energies, residual layers, and imprint quality
Schmitt, H.; Frey, L.; Ryssel, H.; Rommel, M.; Lehrer, C.
Journal Article
2006Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements
Rambach, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2006The impact of mass resolution on molybdenum contamination for B, P, BF, and as implantations
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2006Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes
Ghicov, A.; Macak, J.M.; Tsuchiya, H.; Kunze, J.; Haeublein, V.; Frey, L.; Schmuki, P.
Journal Article
2006Nanoscale morphology and photoemission of arsenic implanted germanium films
Petö, G.; Khanh, N.Q.; Horvath, Z.E.; Molnar, G.; Gyulai, J.; Kotai, E.; Guczi, L.; Frey, L.
Journal Article
2006Simulation of ion beam direct structuring for 3D nanoimprint template fabrication
Platzgummer, E.; Biedermann, A.; Langfischer, H.; Eder-Kapl, S.; Kuemmel, M.; Cernusca, S.; Loeschner, H.; Lehrer, C.; Frey, L.; Lugstein, A.; Bertagnolli, E.
Conference Paper, Journal Article
2006Well design in a bulk CMOS technology with low mask count
Jank, M.P.M.; Kandziora, C.; Frey, L.; Ryssel, H.
Conference Paper
2005Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2005Annealing of aluminum implanted 4H-SiC
Rambach, M.; Bauer, A.J.; Frey, L.; Friedrichs, P.; Ryssel, H.
Conference Paper
2005Characterization of interface state densities by photocurrent analysis. Comparison of results for different insulator layers
Rommel, M.; Groß, M.; Ettinger, A.; Bauer, A.J.; Frey, L.; Ryssel, H.
Poster
2005Characterization of interface state densities by photocurrent analysis: Comparison of results for different insulator layers
Rommel, M.; Groß, M.; Ettinger, A.; Lemberger, M.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper, Journal Article
2005Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren
Frey, L.; Bauer, A.; Ryssel, H.
Journal Article
2005Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor
Lemberger, M.; Paskaleva, A.; Zurcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
2005High-k hafnium silicate films on silicon and germanium wafers by MOCVD using a single-source precursor
Lemberger, M.; Schön, F.; Dirnecker, T.; Jank, M.P.M.; Paskaleva, A.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2005Implantation and annealing of aluminum in 4H silicon carbide
Rambach, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2005Investigations into the wear of a WL10 ion source
Häublein, V.; Sadrawetz, S.; Frey, L.; Martinz, H.-P.; Ryssel, H.
Conference Paper
2005Stempel für Mikrochips
Frey, L.; Fischer, B.
Journal Article
2005Thin Hf(x)Ti(y)Si(z)O films with varying Hf to Ti contents as candidates for high-k dielectrics
Bauer, A.J.; Paskaleva, A.; Lemberger, M.; Frey, L.; Ryssel, H.
Conference Paper
2005Triple trench gate IGBTs
Berberich, S.E.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2005Wafer scale characterization of interface state densities without test structures by photocurrent analysis
Rommel, M.; Groß, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2004Design, fabrication and characterization of a microactuator for nebulization of fluids
Yasenov, N.; Berberich, S.E.; Frey, L.; Ryssel, H.
Conference Paper
2004Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zurcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper, Journal Article
2004Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams
Lehrer, C.; Frey, L.; Petersen, S.; Ryssel, H.; Schäfer, M.; Sulzbach, T.
Journal Article
2004Investigation of rapid thermal annealed pn-junctions in SiC
Rambach, M.; Weiss, R.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2003Different ion implanted edge terminations for Schottky diodes on SiC
Weiss, R.; Frey, L.; Ryssel, H.
Conference Paper
2003Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper, Journal Article
2003ENCOTION - A new simulation tool for energetic contamination analysis
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2003Influence of antenna shape and resist patterns on charging damage during ion implantation
Dirnecker, T.; Bauer, A.J.; Beyer, A.; Frey, L.; Henke, D.; Ruf, A.; Ryssel, H.
Conference Paper
2003Investigation of implantation-induced defects in thin gate oxides using low field tunnel currents
Jank, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2003Investigation of lanthanum contamination from a lanthanated tungsten ion source
Häublein, V.; Walser, H.; Frey, L.; Ryssel, H.
Conference Paper
2003Materialbearbeitung mittels fokussierter Ionenstrahlen zur TEM-Probenpräparation und Nanostrukturierung
Frey, L.; Lehrer, C.
Journal Article
2003Materials processing by focused ion-beams for TEM sample preparation and nanostructuring
Frey, L.; Lehrer, C.
Journal Article
2003Nanoscale effects in focused ion beam processing
Frey, L.; Lehrer, C.; Ryssel, H.
Journal Article
2003ROENTGENSTRAHLQUELLE MIT EINER KLEINEN BRENNFLECKGROESSE
Frey, L.; Lehrer, C.; Hanke, R.; Schmitt, P.
Patent
2003Surface properties and electrical characteristics of rapid thermal annealed 4H-SiC
Bauer, A.J.; Rambach, M.; Frey, L.; Weiss, R.; Rupp, R.; Friedrichs, P.; Schörner, R.; Peters, D.
Conference Paper
2003Trench sidewall doping for lateral power devices
Berberich, S.E.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2003Zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper, Journal Article
2002Development of enhanced depth-resolution technique for shallow dopant profiles
Fujita, M.; Tajima, J.; Nakagawa, T.; Abo, S.; Kinomura, A.; Paszti, F.; Takai, M.; Schork, R.; Frey, L.; Ryssel, H.
Journal Article
2002Effect of barium contamination on gate oxide integrity in high-k DRAM
Boubekeur, H.; Mikolajick, T.; Nagel, N.; Bauer, A.; Frey, L.; Ryssel, H.
Journal Article
2002Influence of photoresist pattern on charging damage during high current ion implantation
Dirnecker, T.; Ruf, A.; Frey, L.; Beyer, A.; Bauer, A.J.; Henke, D.; Ryssel, H.
Conference Paper
2002MOCVD of titanium dioxide on the basis of new precursors
Leistner, T.; Lehmbacher, K.; Härter, P.; Schmidt, C.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article
2002Platinum contamination issues in ferroelectric memories
Boubekeur, H.; Mikolajick, T.; Pamler, W.; Hopfner, J.; Frey, L.; Ryssel, H.
Journal Article
2002Verfahren zur Herstellung einer hochtemperaturfesten Verbindung zwischen zwei Wafern
Kroener, F.; Fischer, K.; Frey, L.
Patent
2002Verkohltes Silizium. Neues Halbleitermaterial für die Leistungselektronik
Frey, L.; März, M.
Journal Article
2001Barium, strontium and bismuth contamination in CMOS processes
Boubekeur, H.; Mikolajick, T.; Höpfner, J.; Dehm, C.; Pamler, W.; Steiner, J.; Kilian, G.; Kolbesen, B.O.; Bauer, A.; Frey, L.; Ryssel, H.
Conference Paper
2001Electrical reliability aspects of through the gate implanted MOS-structures with thin oxides
Jank, M.; Lemberger, M.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article
2001Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused Ion beam nano machining
Lehrer, C.; Frey, L.; Petersen, S.; Sulzbach, T.; Ohlsson, O.; Dziomba, T.; Danzebrink, H.U.; Ryssel, H.
Journal Article
2001High-resolution constant-height imaging with apertured silicon cantilever probes
Dziomba, T.; Danzebrink, H.U.; Lehrer, C.; Frey, L.; Sulzbach, T.; Ohlsson, O.
Journal Article
2001Impact of platinum contamination on ferroelectric memories
Boubekeur, H.; Mikolajick, T.; Nagel, N.; Dehm, C.; Pamler, W.; Bauer, A.; Frey, L.; Ryssel, H.
Journal Article
2001Limitations of focused ion beam nanomachining
Lehrer, C.; Frey, L.; Petersen, S.; Ryssel, H.
Journal Article
2001Tungsten, Nickel, and Molybdenum Schottky Diodes with Different Edge Termination
Weiss, R.; Frey, L.; Ryssel, H.
Journal Article
2000Aspects of barium contamination in high dielectric dynamic random-access memories
Boubekeur, H.; Hopfner, J.; Mikolajick, T.; Dehm, C.; Frey, L.; Ryssel, H.
Journal Article
2000Defects and gallium - contamination during focused ion beam micro machining
Lehrer, C.; Frey, L.; Petersen, S.; Mizutani, M.; Takai, M.; Ryssel, H.
Conference Paper
2000Enhanced depth-resolution analysis with medium energy ion scattering (MEIS) for shallow junction profiling
Tajima, J.; Park, Y.K.; Fujita, M.; Takai, M.; Schork, R.; Frey, L.; Ryssel, H.
Conference Paper
2000Field emitter array fabricated using focused ion and electron beam induced reaction
Yavas, O.; Ochiai, C.; Takai, M.; Park, Y.K.; Lehrer, C.; Lipp, S.; Frey, L.; Ryssel, H.; Hosono, A.; Okuda, S.
Journal Article
2000Gate oxide damage due to through the gate implantation in MOS-structures with ultrathin and standard oxides
Jank, M.P.M.; Lemberger, M.; Frey, L.; Ryssel, H.
Conference Paper
2000Phosphorus ion shower implantation for special power IC applications
Kröner, F.; Schork, R.; Frey, L.; Burenkov, A.; Ryssel, H.
Conference Paper
2000Wafer conserving full range construction analysis for IC fabrication and process development based on FIB/dual beam inline application
Boit, C.; Dawes, N.; Dziesiaty, A.; Demm, E.; Ebersberger, B.; Frey, L.; Geyer, S.; Hirsch, A.; Lehrer, C.; Meis, P.; Kamolz, M.; Lezec, H.; Rettenmaier, H.; Tittes, W.; Treichler, R.; Weiland, R.; Zimmermann, H.
Conference Paper
1999AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite
Biro, L.P.; Mark, G.I.; Gyulai, J.; Havancszak, K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Carbon nanotubes produced by high energy (E greater than 100MeV), heavy ion irradiation of graphite
Biro, L.P.; Szabo, B.; Mark, G.I.; Gyulai, J.; Havancsak, K.; Kurti, J.; Dunlop, A.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
1999Comparison of beam-induced deposition using ion microprobe
Park, Y.S.; Nagai, T.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
1999Comparison of FIB-induced physical and chemical etching
Park, Y.K.; Paszti, F.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper
1999Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO
Bauer, A.J.; Mayer, P.; Frey, L.; Häublein, V.; Ryssel, H.
Conference Paper
1999Impact of nitrogen implantation into polysilicon to reduce boron penetration through the gate oxide
Bauer, A.J.; Mayer, P.; Frey, L.; Häublein, V.; Ryssel, H.
Conference Paper
1999Impurity incorporation during beam assisted processing analyzed using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article, Conference Paper
1999Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Ion beam-treated silicon probes operated in transmission and cross-polarized reflection mode near- infrared scanning near-field optical microscopy (NIR-SNOM)
Dziomba, T.; Sulzbach, T.; Ohlsson, O.; Lehrer, C.; Frey, L.; Danzebrink, H.U.
Journal Article
1999MOCVD of ferroelectric thin films
Schmidt, C.; Lehnert, W.; Leistner, T.; Frey, L.; Ryssel, H.
Conference Paper
1999Nano-slit probes for near-field optical microscopy fabricated by focused ion beams
Danzebrink, H.U.; Dziomba, T.; Sulzbach, T.; Ohlsson, T.; Lehrer, C.; Frey, L.
Journal Article
1999Scanning probe method investigation of carbon nanotubes produced by high energy ion irradiation of graphite
Biro, L.P.; Mark, G.I.; Gyulai, J.; Rozlosnik, N.; Kurti, J.; Szabo, B.; Frey, L.; Ryssel, H.
Journal Article
1998Distortion of SIMS Profiles due to Ion Beam Mixing: Shallow Arsenic Implants in Silicon
Montandon, C.; Burenkov, A.; Frey, L.; Pichler, P.; Biersack, J.P.
Journal Article
1998Fabrication of field emitter array using focused ion and electron beam induced reaction
Takai, M.; Kishimoto, T.; Morimoto, H.; Park, Y.K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.; Hosono, A.; Kawabuchi, S.
Conference Paper
1998Microanalysis of masklessly fabricated microstructures using nuclear microprobe
Park, Y.K.; Takai, M.; Nagai, T.; Kishimoto, T.; Seidl, A.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper, Journal Article
1998Microprobe analysis of Pt films deposited by beam induced reaction
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1998Surface disorder production during plasma immersion implantation
Lohner, T.; Khanh, N.Q.; Petrik, P.; Biro, L.P.; Fried, M.; Pinter, I.; Lehnert, W.; Frey, L.; Ryssel, H.; Wentnik, D.J.; Gyulai, J.
Conference Paper
1997Distortion of SIMS profiles due to ion beam mixing
Saggio, M.; Montandon, C.; Burenkov, A.; Frey, L.; Pichler, P.
Conference Paper
1997In-depth damage distribution by scanning probe methods in targets irradiated with 200 MeV ions
Biro, L.P.; Gyulai, J.; Havancsak, K.; Didyk, A.Y.; Frey, L.; Ryssel, H.
Journal Article
1997Measurement of shallow arsenic impurity profiles in semiconductor silicon using ToF-SIMS and TXRF
Schwenke, H.; Knoth, J.; Fabry, L.; Pahlke, S.; Scholz, R.; Frey, L.
Journal Article
1997New method based on atomic force microscopy for in-depth characterization of damage in Si irradiated with 209 MeV Kr
Biro, L.P.; Gyulai, J.; Havancsak, K.; Didyk, A.Y.; Bogen, S.; Frey, L.; Ryssel, H.
Journal Article
1997Range and damage distributions in ultra low-energy boron ion implantation
Hatzopoulos, N.; Suder, S.; Berg, J. van den; Donnelly, S.E.; Armour, D.G.; Panknin, D.; Fukark, W.; Frey, L.; Foad, M.A.; Moffatt, S.; Bailey, P.; Noakes, C.T.Q.
Conference Paper
1997Reduction of lateral parasitic current flow by buried recombination layers formed by high-energy implantation of C or O into silicon
Bogen, S.; Herden, M.; Frey, L.; Ryssel, H.
Conference Paper
1997SiC formation by high-temperature carbon implantation into SiO2, the role of Si/SiO2 interface
Frey, L.; Stoemenos, J.; Schork, R.; Nejim, A.; Hemment, P.L.
Journal Article
1996A comparison of focused ion beam and electron beam induced deposition processes
Lipp, S.; Frey, L.; Lehrer, C.; Demm, C.; Pauthner, S.; Ryssel, H.
Conference Paper, Journal Article
1996Investigations on the topology of structures milled and etched by focused ion beams
Lipp, S.; Frey, L.
Journal Article
1996Modification of field emitter array tip shape by focused ion-beam irradiation
Takai, M.; Kishimoto, T.; Yamashita, M.; Morimoto, H.; Yura, S.; Hosono, A.; Okuda, S.; Lipp, S.; Frey, L.; Ryssel, H.
Journal Article
1996Modifikation integrierter Schaltungen mittels fokussierter Ionenstrahlen. Ein Weg zur schnellen Bereitstellung und Optimierung von ASICs
Frey, L.; Lipp, S.
Book Article
1996Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO(x)) deposition
Lipp, S.; Frey, L.; Lehrer, C.; Frank, B.; Demm, E.; Pauthner, S.; Ryssel, H.
Journal Article
1995Analysis of contamination - a must for ultraclean technology
Ryssel, H.; Streckfuß, N.; Aderhold, W.; Berger, R.; Falter, T.; Frey, L.
Conference Paper
1995Comparison of retrograde and conventional p-wells in regard latch-up susceptibility
Bogen, S.; Gong, L.; Frey, L.; Ryssel, H.; Körber, K.
Journal Article
1995Gitterdeformation in Silicium nach Implantationen von Phosphor
Remmler, M.; Frey, L.; Ryssel, H.
Conference Paper
1995Improved delineation technique for two dimensional dopant profiling
Gong, L.; Petersen, S.; Frey, L.; Ryssel, H.
Journal Article
1995Local material removal by focused ion beam milling and etching
Lipp, S.; Frey, L.; Franz, G.; Demm, E.; Petersen, S.; Ryssel, H.
Journal Article
1995Local material removal by focused ion beam milling and etching
Lipp, K.; Frey, L.; Franz, G.; Demm, E.; Petersen, S.; Ryssel, H.
Conference Paper
1995Model for the electronic stopping of channeled ions in silicon around the stopping power maximum
Simionescu, A.; Hobler, G.; Bogen, S.; Frey, L.; Ryssel, H.
Journal Article
1995Recombination of charge carriers in buried layers formed by high energy oxygen or carbon implantation into silicon
Bogen, S.; Frey, L.; Herder, M.; Ryssel, H.
Conference Paper
1995Strain profiles in phosphorus implanted /100/-silicon
Remmler, M.; Frey, L.; Horvath, Z.E.; Ryssel, H.
Conference Paper
1994Analytical description of high energy implantation profiles of bordon and phosphorus into crystalline silicon
Gong, L.; Bogen, S.; Frey, L.; Jung, W.; Ryssel, H.
Journal Article
1994Investigation of the effect of altered defect structure produced by photon assisted the diffusion of As in silicon during thermal anneallagation
Biro, L.P.; Gyulai, J.; Bogen, S.; Frey, L.; Ryssel, H.
Journal Article
1994Practical aspects of ion beam analysis of semiconductor structures
Frey, L.; Pichler, P.; Kasko, I.; Thies, I.; Lipp, S.; Streckfuß, N.; Gong, L.
Journal Article
1993Contamination control and ultrasensitive chemical analysis
Ryssel, H.; Frey, L.; Streckfuß, N.; Schork, R.; Kroninger, F.; Falter, T.
Journal Article
1993Effect of ion-beam mixing temperature on cobalt silicide formation
Kasko, I.; Dehm, C.; Frey, L.; Ryssel, H.
Journal Article
1993High energy implantation of high10 B and high11 B into -100- silicon in channel and in random
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H.
Journal Article
1993A novel delineation technique for 2D-profiling of dopants in crystalline silicon
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H.
Journal Article
1993Photon assisted implantation -PAI-
Biro, L.P.; Gyulai, J.; Ryssel, H.; Frey, L.; Kormany, T.; Tuan, N.M.
Journal Article
1992Characterization of metal impurities in silicon-on-insulator material
Frey, L.; Kroninger, F.; Streckfuß, N.; Ryssel, H.
Conference Paper
1992High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen
Frey, L.; Bogen, S.; Gong, L.; Jung, W.; Gyulai, J.; Ryssel, H.
Journal Article
1991Effect of oxygen on the formation of end-of-range disorder in implantation amorphized silicon
Frey, L.; Khanh, N.Q.; Gyulai, J.; Lorenz, E.
Journal Article