Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019A Novel Indirect Quasi-Static Actuation Concept for 2D MEMS Micromirrors
Kaupmann, P.; Pinter, S.; Franz, J.; Streiter, R.; Otto, T.
Journal Article
2017Design of a 2D MEMS micromirror with indirect static actuation
Kaupmann, P.; Pinter, S.; Franz, J.; Streiter, R.; Otto, T.
Conference Paper
2017A novel gyroscopic actuation concept for 2D MEMS micromirrors
Kaupmann, P.; Pinter, S.; Franz, J.; Streiter, R.; Otto, T.
Journal Article, Conference Paper
2012Einstellbarer Hochspannungswiderstand
Cudazzo, Markus; Franz, Jonas
Patent
2001Mechanical reliability of MEMS-structures under shock load
Wagner, U.; Franz, J.; Schweiker, M.; Bernhard, W.; Müller-Fiedler, R.; Michel, B.; Paul, O.
Journal Article