Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics
Koehler, D.; Hiller, K.; Forke, R.; Konietzka, S.; Pohle, A.; Billep, D.; Heinz, S.; Lange, A.
Conference Paper
2012Integration of piezoelectric polymer transducers into microsystems for sensing applications
Schulze, R.; Gessner, T.; Schueller, M.; Forke, R.; Billep, D.; Hahn, R.; Heinrich, M.; Sborikas, M.; Wegener, M.
Conference Paper
2011Robust design of MEMS structures
Hofmann, K.; Billep, D.; Forke, R.; Hiller, K.; Gessner, T.
Conference Paper
2010Hochpräzise integrierte Sensorsignalverarbeitung zur Anregung, Kalibrierung und Auswertung von MEMS-Gyroskopen
Köhler, D.; Pohle, A.; Konietzka, S.; Heinz, S.; Lange, A.; Billep, D.; Forke, R.; Horstmann, J.T.; Loebel, K.-U.; Ramsbeck, M.
Conference Paper
2008Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Forke, R.; Scheibner, D.; Mehner, J.E.; Gessner, T.; Dötzel, W.
Conference Paper, Journal Article
2008Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Doetzel, W.; Mehner, J.
Journal Article
2008Technology dependent design and characterization of silicon vibration sensors with linear tunable band selectivity
Shaporin, A.; Forke, R.; Dienel, M.; Naumann, M.; Scheibner, D.; Dötzel, W.; Mehner, J.
Conference Paper
2008Technology dependent design and characterization of silicon vibration sensors with linear tunable band selectivity
Shaporin, A.; Forke, R.; Dienel, M.; Naumann, M.; Scheibner, D.; Dötzel, W.; Mehner, J.
Conference Paper
2008Test-structures for wafer level microsystems characterization
Shaporin, A.; Forke, R.; Schmiedel, R.; Dötzel, W.
Conference Paper
2008Tunable Frequency Selective Vibration Detection with MEMS Force Coupled Oscillators
Forke, R.; Scheibner, D.; Doetzel, W.; Mehner, J.
Conference Paper
2007Adjustable Force Coupled Sensor-Actuator System for Low Frequency Resonant Vibration Detection
Forke, R.; Scheibner, D.; Mehner, J.; Gessner, T.; Dötzel, W.
Conference Paper
2007MEMS Characterization Technique Based on Special Designed Test-Structures
Shaporin, A.; Forke, R.; Doetzel, W.; Mehner, J.
Conference Paper
2007Spektrale Vibrationsmessung mit mikromechanischen kraftgekoppelten Silizium-Schwingern
Forke, R.; Scheibner, D.; Hiller, K.; Gessner, T.; Dötzel, W.; Mehner, J.
Conference Paper
2007Test-Structure based MEMS Characterization Technique
Shaporin, A.V.; Hanf M.; Forke, R.; Mehner, J.; Gessner, T.; Dötzel, W.
Conference Paper
2006Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Forke, R.; Scheibner, D.; Mehner, J.; Geßner, T.; Doetzel, W.
Conference Paper
2006Micromachined force coupled sensor actuator system for frequency selective vibration monitoring
Forke, R.; Scheibner, D.; Mehner, J.; Geßner, T.; Doetzel, W.
Conference Paper
2006A tunable resonant vibration measurement unit based on a micromachined force coupled sensor-actuator system
Mehner, J.; Gessner, T.; Forke, R.; Scheibner, D.; Doetzel, W.
Conference Paper
2005Mikromechanisches gekoppeltes Schwingsystem für frequenzselektive Vibrationsmessungen
Forke, R.; Mehner, J.; Doetzel, W.; Geßner, T.
Conference Paper