Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Gatto, A.; Yang, M.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Laboratory LPP EUV reflectometer working with non-polarized radiation
Loyen, L. van; Böttger, T.; Schädlich, S.; Braun, S.; Foltyn, T.; Leson, A.; Scholze, F.; Müllender, S.
Conference Paper, Journal Article
2005Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Braun, S.; Foltyn, T.; Leson, A.; Gatto, A.; Yang, M.; Kaiser, N.
Conference Paper
2005Multilayer monochromators for the wavelength-dispersive X-ray fluorescence spectrometry
Braun, S.; Foltyn, T.; Menzel, M.; Leson, A.; Schäfers, F.; Mertin, M.
Journal Article
2005Multilayer optics development of EUV microscopy
Braun, S.; Foltyn, T.; Loyen, L. van; Leson, A.; Walter, K.; Bergmann, K.; Neff, W.
Conference Paper
2005Preparation and characterization of multilayers for EUV applications
Foltyn, T.; Braun, S.; Friedrich, W.; Leson, A.; Menzel, M.
Conference Paper
2004Carbon buffer layers for smoothing substrates of EUV and X-ray multilayer mirrors
Braun, S.; Bendjus, B.; Foltyn, T.; Menzel, M.; Schreiber, J.; Weißbach, D.
Conference Paper
2004Deposition of multilayer mirrors with arbitrary period thickness distributions
Foltyn, T.; Braun, S.; Moss, M.; Leson, A.
Conference Paper
2004Design and development of an optical system for EUV-microscopy
Foltyn, T.; Braun, S.; Gawlitza, P.; Leson, A.; Bergmann, K.; Neff, W.; Walter, K.
Conference Paper
2004High reflection optics and high precision metrology for extreme ultraviolet (EUV) light
Braun, S.; Böttger, T.; Foltyn, T.; Loyen, L. van; Leson, A.
Conference Paper
2004Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
Braun, S.; Bendjus, B.; Foltyn, T.; Menzel, M.; Schreiber, J.; Leson, A.
Conference Paper
2004Stress compensation of a Mo/Si/C highly reflective multilayer by means of an optimised buffer layer and heat treatment
Moss, M.; Böttger, T.; Braun, S.; Foltyn, T.; Leson, A.
Journal Article
2003Custom-tailored nm-multilayers for EUV and X-ray optical applications
Braun, S.; Böttger, T.; Foltyn, T.; Moss, M.; Loyen, L. van; Leson, A.
Conference Paper
2003Grenzflächen-optimierte Mo/Si Multischichten als Reflektoren für den EUV Spektralbereich
Braun, S.; Foltyn, T.; Mai, H.; Moss, M.; Leson, A.
Journal Article
2003Multi-component EUV multilayer mirrors
Braun, S.; Foltyn, T.; Loyen, L. van; Moss, M.; Leson, A.
Conference Paper
2002High-precision nm-multilayers for EUV and x-ray optical application
Braun, S.; Dietsch, R.; Foltyn, T.; Holz, T.; Mai, H.; Moss, M.; Weißbach, D.; Leson, A.
Conference Paper