Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2010Acid diffusion effects between resists in freezing processes used for contact hole patterning
Fuhrmann, J.; Fiebach, A.; Erdmann, A.; Trefonas, P.
Conference Paper, Journal Article
2010Modeling of double patterning interactions in litho-cure-litho-etch (LCLE) processes
Erdmann, A.; Shao, F.; Fuhrmann, J.; Fiebach, A.; Patsis, G.P.; Trefonas, P.
Conference Paper
2009A model of self-limiting residual acid diffusion for pattern doubling
Fuhrmann, J.; Fiebach, A.; Uhle, M.; Erdmann, A.; Szmanda, C.R.; Truong, C.
Conference Paper, Journal Article