Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2015Sub-aperture EUV collector with dual-wavelength spectral purity filter
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Zeitner, Uwe; Leitel, Robert; Eckstein, Hans Christoph; Schleicher, Philipp; Schröder, Sven; Trost, Marcus; Risse, Stefan; Steinkopf, Ralf; Scholze, F.; Laubis, C.
Conference Paper
2013Characterisation of EUV damage thresholds and imaging performance of Mo/Si multilayer mirrors
Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus
Conference Paper
2013Lifetime and refurbishment of multilayer LPP collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Nobert R.; Ershov, Alex I.; Dea, Silvia de; Hoffmann, Kay; Fontaine, Bruno la; Fomenkov, Igor V.; Brandt, David
Conference Paper
2013Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Trost, Marcus; Schröder, Sven; Duparré, Angela; Risse, Stefan; Feigl, Torsten; Zeitner, Uwe D.; Tünnermann, Andreas
Journal Article
2012EUV damage threshold measurements of Mo/Si multilayer mirrors
Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus
Journal Article
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Optical reflector coatings for astronomical applications from EUV to IR
Schürmann, Mark; Jobst, Paul Johannes; Yulin, Sergiy; Feigl, Torsten; Heiße, Hanno; Wilbrandt, Steffen; Stenzel, Olaf; Gebhardt, Andreas; Risse, Stefan; Kaiser, Norbert
Conference Paper