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| 2013 | Lifetime and refurbishment of multilayer LPP collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Kaiser, Norbert; Tünnerman, Andreas; Böwering, Nobert R.; Ershov, Alex I.; Dea, Silvia de; Hoffmann, Kay; Fontaine, Bruno la; Fomenkov, Igor V.; Brandt, David | Conference Paper |
| 2012 | Compact x-ray microscope for the water window based on a high brightness laser plasma source
Legall, H.; Blobel, G.; Stiel, H.; Sandner, W.; Seim, C.; Takman, P.; Martz, D.H.; Selin, M.; Vogt, U.; Hertz, H.M.; Esser, D.; Sipma, H.; Luttmann, J.; Höfer, M.; Hoffmann, H.D.; Yulin, S.; Feigl, T.; Rehbein, S.; Guttmann, P.; Schneider, G.; Wiesemann, U.; Wirtz, M.; Diete, W. | Journal Article |
| 2012 | EUV damage threshold measurements of Mo/Si multilayer mirrors
Müller, Matthias; Barkusky, Frank; Feigl, Torsten; Mann, Klaus | Journal Article |
| 2012 | Identification of twinned gas phase clusters by single shot scattering with intense soft x-ray pulses
Rupp, D.; Adolph, M.; Gorkhover, T.; Schorb, S.; Wolter, D.; Hartmann, R.; Kimmel, N.; Reich, C.; Feigl, T.; Castro, A.R.B. de; Treusch, R.; Strüder, L.; Möller, T.; Bostedt, C. | Journal Article |
| 2012 | Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D. | Conference Paper |
| 2012 | Optical reflector coatings for astronomical applications from EUV to IR
Schürmann, Mark; Jobst, Paul Johannes; Yulin, Sergiy; Feigl, Torsten; Heiße, Hanno; Wilbrandt, Steffen; Stenzel, Olaf; Gebhardt, Andreas; Risse, Stefan; Kaiser, Norbert | Conference Paper |
| 2011 | Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E. | Conference Paper |
| 2011 | Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2011 | Optics contamination studies in support of high-throughput EUV lithography tools
Hill, S.B.; Faradzhev, N.S.; Richter, L.J.; Grantham, S.; Tarrio, C.; Lucatorto, T.B.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Feigl, T. | Conference Paper |
| 2011 | Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Conference Paper |
| 2011 | Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS
Schürmann, M.; Yulin, S.; Nesterenko, V.; Feigl, T.; Kaiser, N.; Tkachenko, B.; Schürmann, M.C. | Conference Paper |
| 2010 | Beschichtungen für die EUV-Lithografie
Feigl, T.; Perske, M.; Pauer, H.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Schröder, S.; Trost, M.; Duparré, A.; Kaiser, N. | Conference Paper |
| 2010 | A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength
Feigl, T. et al. | Journal Article |
| 2010 | Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A. | Conference Paper |
| 2010 | A journey from ancient China bronze mirrors to picometer shaped interference coatings
Kaiser, N.; Bischoff, M.; Feigl, T.; Schulz, U.; Yulin, S. | Journal Article |
| 2010 | Kollektorbeschichtungen für die EUV-Lithographie
Perske, M.; Pauer, H.; Yulin, S.; Trost, M.; Schröder, S.; Duparre, A.; Feigl, T.; Kaiser, N. | Journal Article |
| 2010 | Laterally graded Mo/Si multilayer for a 5 steradian EUV collector
Perske, M.; Pauer, H.; Yulin, S.; Nesterenko, V.; Schürmann, M.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2010 | Multi-technique study of carbon contamination and cleaning of Mo/Si multilayer optics exposed to pulsed EUV radiation
Schürmann, M.; Yulin, S.; Nesterenko, V.; Feigl, T.; Kaiser, N.; Tkachenko, B.; Schürmann, M.C. | Conference Paper |
| 2010 | Nanoscale coatings
Kaiser, N.; Bischoff, M.; Feigl, T.; Schulz, U.; Stenzel, O. | Conference Paper |
| 2009 | Extreme ultraviolet laser excites atomic giant resonance
Richter, M.; Amusia, M.Y.; Bobashev, S.V.; Feigl, T.; Juranic, P.N.; Martins, M.; Sorokin, A.A.; Tiedtke, K. | Journal Article |
| 2008 | Effect of anomalous transmittance in EUV multilayer optics
Kozhevnikov, I.; Yulin, S.; Feigl, T.; Kaiser, N. | Journal Article |
| 2008 | Enhanced reflectivity and stability of high-temperature LPP collector mirrors
Feigl, T.; Yulin, S.; Perske, M.; Pauer, H.; Schürmann, M.; Kaiser, N.; Böwering, N.R.; Khodykin, O.V.; Fomenkov, I.V.; Brandt, D.C. | Conference Paper |
| 2008 | Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A. | Journal Article |
| 2008 | High-performance EUV multilayer optics
Kaiser, N.; Yulin, S.; Perske, M.; Feigl, T. | Conference Paper |
| 2008 | Hochreflektierende EUV/Röntgen-Mehrschichtspiegel
Yulin, S.; Feigl, T.; Benoit, N.; Perske, M.; Taracheva, E.; Schröder, S.; Nesterenko, V.; Kaiser, N. | Journal Article |
| 2008 | Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.; Fang, M.; Chandhok, M. | Conference Paper |
| 2008 | Novel TMA telescope based on ultra precise metal mirrors
Risse, S.; Gebhardt, A.; Damm, C.; Peschel, T.; Stöckl, W.; Feigl, T.; Kirschstein, S.; Eberhardt, R.; Kaiser, N.; Tünnermann, A. | Conference Paper |
| 2008 | Performance and lifetime of EUV source collectors measured with a full size EUV collector reflectometer
Hinze, U.; Chichkov, B.N.; Feigl, T.; Zeitner, U.D.; Damm, C.; Bolshukhin, D.; Kleinschmidt, J.; Schriever, G.; Schürmann, M.C. | Conference Paper |
| 2008 | Scattering of EUV optics - substrate, coating, and degradation effects
Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A. | Conference Paper |
| 2008 | Structure and stressed state of molybdenum layers in Mo/Si multilayers
Pinegyn, V.; Zubarev, E.N.; Kondratenko, V.V.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N. | Journal Article |
| 2008 | The structure of Mo/Si multilayers prepared in the conditions of ionic assistance
Zubarev, E.N.; Kondratenko, V.V.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N. | Journal Article |
| 2007 | EUV multilayer optics at the Fraunhofer IOF
Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A. | Conference Paper |
| 2007 | EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2007 | High-performance multilayer coatings for 106 nm
Taracheva, E.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2007 | Photoelectric effect at ultrahigh intensities
Sorokin, A.A.; Bobashev, S.V.; Feigl, T.; Tiedtke, K.; Wabnitz, H.; Richter, M. | Journal Article |
| 2007 | Spiegel mit einer Silberschicht
Kaiser, N.; Uhlig, H.; Stoeckl, W.; Scheler, M.; Risse, S.; Feigl, T. | Patent |
| 2007 | The structure, diffusion and phase formation in Mo/Si multilayers with stressed Mo layers
Zubarev, E.N.; Zhurba, A.V.; Kondratenko, V.V.; Pinegyn, V.I.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N. | Journal Article |
| 2007 | Thermisch stabiler Multilayer-Spiegel fuer den EUV-Spektralbereich
Benoit, N.; Feigl, T.; Yulin, S.; Kaiser, N. | Patent |
| 2007 | Thin silicon carbide coating of the primary mirror of VUV imaging instruments of solar orbiter
Schühle, U.; Uhlig, H.; Curdt, W.; Feigl, T.; Theissen, A.; Teriaca, L. | Conference Paper |
| 2006 | EUV multilayer mirrors with enhanced stability
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2006 | EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Conference Paper, Journal Article |
| 2006 | High-temperature LPP collector mirror
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.; Böwering, N.; Ershov, A.; Khodykin, O.; Viatella, J.; Bruzzone, K.; Fomenkov, I.; Myers, D.; Brandt, D. | Conference Paper |
| 2006 | Im EUV-Spektralbereich reflektierender Spiegel
Feigl, T.; Kaiser, N.; Kuhlmann, T.; Yulin, S. | Patent |
| 2006 | Interface-engineered EUV multilayer mirrors
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N. | Conference Paper, Journal Article |
| 2006 | Schwarzschild-objective-based EUV micro exposure tool
Zeitner, U.; Feigl, T.; Benkenstein, T.; Damm, C.; Peschel, T.; Kaiser, N.; Tünnermann, A. | Conference Paper |
| 2006 | Transmissionsfilter fuer den EUV-Spektralbereich
Kozhevnikov, I.; Kaiser, N.; Yulin, S.; Feigl, T. | Patent |
| 2005 | Carbon window soft x-ray imaging using multilayer optics
Artyukov, I.A.; Bugayev, Y.; Devizenko, O.Y.; Feschenko, R.M.; Kasyanov, Y.S.; Kondratenko, V.V.; Romanova, S.A.; Saveliev, S.V.; Schäfers, F.; Feigl, T.; Uspenski, Y.A.; Vinogradov, A.V. | Conference Paper |
| 2005 | Compact source and beam delivery system for EUV radiation using a Schwarzschild objective
Mann, K.; Barkusky, F.; Bayer, A.; Peth, C.; Töttger, H.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | EUV Schwarzschild-Objektiv
Feigl, T. | Journal Article |
| 2005 | EUV/soft x-ray multilayer optics
Yulin, S.; Feigl, T.; Benoit, N.; Kaiser, N. | Conference Paper |
| 2005 | Formation and direct writing of color centers in LiF using a laser-induced extreme ultraviolet plasma in combination with a Schwarzschild objective
Barkusky, F.; Peth, C.; Mann, K.; Feigl, T.; Kaiser, N. | Journal Article |
| 2005 | Halterung fuer optische Elemente
Damm, C.; Peschel, T.; Zeitner, U.D.; Feigl, T.; Banse, H. | Patent |
| 2005 | High-performnace Cr/Sc multilayers for the soft X-ray range
Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | High-temperature multilayers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | Imaging properties of different optics for EUV radiation
Bayer, A.; Barkusky, F.; Peth, C.; Töttger, H.; Mann, K.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | Interface-engineered multilayer mirrors
Yulin, S.; Bernoit, N.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N. | Journal Article |
| 2005 | New challenges for VUV-XUV radiation resistant coatings
Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | Optical coatings: Trends and challenges
Kaiser, N.; Feigl, T.; Stenzel, O.; Schulz, U.; Yang, M. | Journal Article |
| 2005 | Radiation stability of EUV Mo/Si multilayer mirrors
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper, Journal Article |
| 2005 | Reflektierende Schichtenfolge mit Barriereschichten
Yulin, S.; Kaiser, N.; Feigl, T. | Patent |
| 2005 | Schichtsysteme für optische Anwendungen
Kaiser, N.; Feigl, T.; Stenzel, O.; Schulz, U. | Book Article |
| 2004 | Enhanced reflectivity and stability of Sc/Si multilayers
Yulin, S.; Schäfers, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2004 | EUV and soft X-ray multilayer optics
Kaiser, N.; Yulin, S.; Feigl, T.; Bernitzki, H.; Lauth, H. | Conference Paper |
| 2004 | High-performance Cr/Sc multilayers for the soft X-ray range
Yulin, S.; Schäfers, F.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2004 | Start up optix technologies - a critical assessment of a Fraunhofer spin-off idea
Feigl, T. | Master Thesis |
| 2004 | Verbundbauteil und Verfahren zur Herstellung eines Verbundbauteiles
Stoeckl, W.; Feigl, T.; Banse, H.; Eberhardt, R.; Kaiser, N. | Patent |
| 2003 | At-wavelength metrology on Sc-based multilayers for the VUV and water window
Schäfers, F.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2003 | Monochromatorspiegel fuer den EUV-Spektralbereich
Feigl, T.; Kaiser, N.; Kuhlmann, T.; Yulin, S. | Patent |
| 2003 | Spectral reflectance tuning of EUV mirrors for metrology applications
Yulin, S.A.; Kuhlmann, T.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2003 | Verfahren zur Herstellung eines thermisch stabilen Schichtsystems zur Reflexion von Strahlung im extremen ultravioletten Spektralbereich (EUV)
Yulin, S.; Feigl, T.; Kaiser, N. | Patent |
| 2002 | Chromium-scandium multilayer mirrors for the nitrogen K(alpha) line in the water window region
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N.; Gorelik, T.; Kaiser, U.; Richter, W. | Journal Article |
| 2002 | Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N. | Journal Article |
| 2002 | Design and fabrication of broadband EUV multilayer mirrors
Kuhlmann, T.; Yulin, S.A.; Feigl, T.; Kaiser, N.; Bernitzki, H.; Lauth, H. | Conference Paper |
| 2002 | EUV multilayer mirrors with tailored spectral reflectivity
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2002 | High-performance 6-inch EUV mask blanks produced under real production conditions by ion-beam sputter deposition
Becker, H.W.; Sobel, F.; Aschke, L.; Renno, M.; Krieger, J.; Buttgereit, U.; Hess, G.; Lenzen, F.; Knapp, K.; Yulin, S.A.; Feigl, T.; Kuhlmann, T.; Kaiser, N. | Conference Paper |
| 2002 | Interlayer transition zones in Mo/Si superlattices
Yulin, S.; Feigl, T.; Kuhlmann, T.; Kaiser, N.; Fedorenko, A.I.; Kondratenko, V.V.; Poltseva, O.V.; Sevryukova, V.A.; Zolotaryov, A.Y.; Zubarev, E, N. | Journal Article |
| 2002 | Multiscale degradations of storage ring FEL optics
Gatto, A.; Feigl, T.; Kaiser, N.; Garzella, D.; Ninno, G. de; Couprie, M.E.; Marsi, M.; Trovo, M.; Walker, R.; Grewe, M.; Wille, K.; Paoloni, S.; Reita, V.; Roger, J.P.; Boccara, C; Torchio, P.; Albrand, G.; Amra, C. | Journal Article |
| 2002 | Optics developments in the VUV-soft X-ray spectral region
Feigl, T.; Heber, J.; Gatto, A.; Kaiser, N. | Journal Article |
| 2002 | Thermal stability of Cr/Sc multilayers for the soft x-ray range
Yulin, S.; Kuhlmann, T.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2002 | Verfahren zur Herstellung eigenspannungsfreier reflektierender optischer Schichtsysteme auf Substraten
Yulin, S.; Feigl, T.; Kuhlmann, T.; Kaiser, N. | Patent |
| 2001 | Cr/Sc multilayer mirrors for the nitrogen K(alpha)-line in the water window
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2001 | Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N. | Conference Paper |
| 2001 | Damage resistant and low-stress Si-based multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N. | Conference Paper |
| 2001 | Heat resistance of EUV multilayer mirrors for long-time applications
Feigl, T.; Lauth, H.; Yulin, S.; Kaiser, N. | Journal Article |
| 2001 | Verfahren zur Herstellung eines Duennschichtsystems
Feigl, T.; Yulin, S.; Stoeckl, W.; Kaiser, N. | Patent |
| 2000 | Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by reactive evaporation, IAD, and PIAD
Thielsch, R.; Feigl, T.; Kaiser, N.; Martin, S.; Scaglione, S.; Sarto, F.; Alvisi, M.; Rizzo, A. | Conference Paper |
| 2000 | Magnetron sputtered EUV mirrors with high thermal stability
Feigl, T.; Yulin, S.; Kaiser, N.; Thielsch, R. | Conference Paper |
| 2000 | Si-based multilayers with high thermal stability
Kaiser, N.; Yulin, S.; Feigl, T. | Conference Paper |
| 2000 | Struktur und Eigenschaften von Schichtsystemen für den EUV-Spektralbereich
Feigl, T. | Dissertation |
| 1999 | Hochauflösende Topometrie im Kontext globaler Makrostrukturen
Duparre, A.; Notni, G.; Recknagel, R.-J.; Feigl, T.; Gliech, S. | Journal Article |
| 1998 | Messung von Mikrostrukturen in einem großen Skalenbereich durch Kombination von Weißlichtinterferometrie und Rasterkraftmikroskopie
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G. | Conference Paper |
| 1998 | Wide scale surface measurement using white light interferometry and atomic force microscopy
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G. | Conference Paper |
| 1996 | Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process
Jakobs, S.; Feigl, T.; Duparre, A. | Conference Paper |