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| 2018 | Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt | Book Article |
| 2016 | Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximilian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper | Journal Article |
| 2015 | Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper | Poster |
| 2015 | Optical bragg gratings in inorganic-organic hybrid polymers for highly sensitive temperature measurements
Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Förthner, Michael; Frey, Lothar; Rommel, Mathias; Fader, Robert | Conference Paper |
| 2015 | UV-NIL R&D at Fraunhofer IISB. Past examples and future challenges
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, Robert; Schmitt, Holger | Presentation |
| 2014 | Bioactivation of plane and patterned PDMS thin films by wettability engineering
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, Julius; Herrmann, Benjamin; Rumler, Maximilian; Fader, Robert; Frey, Lothar; Herrmann, Martin | Journal Article |
| 2014 | Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper | Poster |
| 2014 | Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar | Presentation |
| 2014 | Optical polymers with tunable refractive index for nanoimprint technologies
Landwehr, Johannes; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann | Journal Article |
| 2014 | Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann | Poster |
| 2014 | Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann | Poster |
| 2014 | Process development for nanoimprint at Fraunhofer IISB
Fader, Robert; Rumler, Maximilian; Scharin, Marina; Förthner, Michael; Rommel, Mathias | Presentation |
| 2014 | Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography
Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike | Poster |
| 2013 | Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rommel, Mathias; Bauer, Anton J.; Rumler, Maximilian; Frey, Lothar; Verschuuren, Marcus Antonius; Laar, Robert van de; Ji, Ran; Schömbs, Ulrike | Journal Article, Conference Paper |
| 2013 | Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U. | Presentation |
| 2013 | Alignment accuracy in a mask aligner using substrate conformal imprint lithography (SCIL)
Schömbs, Ulrike; Fader, Robert; Verschuuren, Marc | Poster |
| 2013 | Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar | Journal Article |
| 2013 | Evaluation of UV-SCIL resists for structure transfer using plasma etching
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas | Poster |
| 2013 | In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists
Verschuuren, Marc; Fader, Robert; Brakel, Remco van; Hurxkens, Gert-Jan | Poster |
| 2013 | Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S. | Presentation |
| 2013 | Micromolding of micropatterned PDMS surfaces to define the adhesive behavior of human cells in vitro
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, J.; Rumler, Maximilian; Herrmann, Benjamin; Fader, Robert; Frey, Lothar; Herrmann, Martin | Poster |
| 2013 | Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, Anton J.; Frey, Lothar; Hermman, Martin | Poster |
| 2012 | Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar | Poster |
| 2012 | Functional epoxy polymer for direct nano-imprinting of micro optical elements
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas | Poster |