Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Strain nano-engineering: SSOI as a playground
Moutanabbir, O.; Hähnel, A.; Reiche, M.; Erfurth, W.; Tarun, A.; Hayazawa, N.; Kawata, S.; Naumann, F.; Petzold, M.
Conference Paper
2011Strain stability in nanoscale patterned strained silicon-on-insulator
Moutanabbir, O.; Reiche, M.; Hähnel, A.; Erfurth, W.; Motohashi, M.; Tarun, A.; Hayazawa, N.; Kawata, S.; Naumann, F.; Patzold, M.; Holt, M.; Maser, J.
Conference Paper
2010Strain stability in nanoscale patterned strained silicon-on-insulator
Moutanabbir, O.; Reiche, M.; Hähnel, A.; Erfurth, W.; Tarun, A.; Hayazawa, N.; Kawata, S.; Naumann, F.; Petzold, M.
Journal Article, Conference Paper
2009The complex evolution of strain during nanoscale patterning of 60 nm thick strained silicon layer directly on insulator
Moutanabbir, O.; Reiche, M.; Erfurth, W.; Naumann, F.; Petzold, M.; Gösele, U.
Journal Article
2009Probing the strain states in nanopatterned strained SOI
Moutanabbir, O.; Reiche, M.; Hähnel, A.; Erfurth, W.; Naumann, F.; Petzold, M.; Gösele, U.
Conference Paper
2008Strained silicon on wafer level by waferbonding: Materials processing, strain measurements and strain relaxation
Reiche, M.; Moutanabbir, O.; Himcinschi, C.; Christiansen, S.; Erfurth, W.; Gösele, U.; Mantl, S.; Buca, D.; Zhao, Q.; Loo, R.; Nguyen, D.; Muster, F.; Petzold, M.
Conference Paper
2007Strain relaxation in nanopatterned strained silicon round pillars
Himcinschi, C.; Singh, R.; Radu, I.; Milenin, A.P.; Erfurth, W.; Reiche, M.; Gösele, U.; Christiansen, S.H.; Muster, F.; Petzold, M.
Journal Article
1996Charakterisierung strukturell-morphologischer Eigenschaften von Al-Bondpads mittels rastermikroskopischer Verfahren
Katzer, D.; Erfurth, W.
Conference Paper