Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays
Barth, Stephan; Derenko, Susan; Bartzsch, Hagen; Zywitzki, Olaf; Modes, Thomas; Patrovsky, Fabian; Fiehler, Vera; Uhlig, Tino; Frach, P.; Eng, L.M.
Journal Article
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Conference Paper
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2019Theory and Experiment of Antiferroelectric (AFE) Si-Doped Hafnium Oxide (HSO) Enhanced Floating-Gate Memory
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Eng, L.M.; Seidel, K.; Müller, J.
Journal Article
2017Anodization of sputtered substoichiometric aluminum oxide thin-films for improved nanorod array fabrication
Patrovsky, Fabian; Fiehler, Vera; Derenko, Susan; Barth, Stephan; Bartzsch, Hagen; Ortstein, Katrin; Frach, Peter; Eng, L.M.
Journal Article
2013Laser remote-fusion cutting with solid-state lasers
Wagner, A.; Lütke, M.; Wetzig, A.; Eng, L.M.
Journal Article
2013Local photochemical plasmon mode tuning in metal nanoparticle arrays
Derenko, S.; Kullock, R.; Wu, Z.; Sarangan, A.; Schuster, C.; Eng, L.M.; Härtling, T.
Journal Article
2011Effects of patterning induced stress relaxation in strained SOI/SiGe layers and substrate
Hermann, P.; Hecker, M.; Renn, F.; Rlke, M.; Kolanek, K.; Rinderknecht, J.; Eng, L.M.
Journal Article
2011Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy
Hermann, P.; Hecker, M.; Chumakov, D.; Weisheit, M.; Rinderknecht, J.; Shelaev, A.; Dorozhkin, P.; Eng, L.M.
Journal Article
2011Non-destructive testing of integrated nanostructures using 3D polarization control in an optical microscope
Härtling, T.; Olk, P.; Kullock, R.; Eng, L.M.
Conference Paper
2010Controlled photochemical particle growth in two-dimensional ordered metal nanoparticle arrays
Härtling, T.; Seidenstucker, A.; Olk, P.; Plettl, A.; Ziemann, P.; Eng, L.M.
Journal Article
2010Fabrication of two-dimensional Au@FePt core-shell nanoparticle arrays by photochemical metal deposition
Härtling, T.; Uhlig, T.; Seidenstücker, A.; Bigall, N.C.; Olk, P.; Wiedwald, U.; Han, L.; Eychmüller, A.; Plettl, A.; Ziemann, P.; Eng, L.M.
Journal Article
2010Polarization mode preservation in elliptical index tailored optical fibers for apertureless scanning near-field optical microscopy
Zeh, C.; Spittel, R.; Unger, S.; Opitz, J.; Köhler, B.; Kirchhof, J.; Bartelt, H.; Eng, L.M.
Journal Article
2010Three-dimensional, arbitrary orientation of focal polarization
Olk, P.; Härtling, T.; Kullock, R.; Eng, L.M.
Journal Article
2009Determination of proximity effect parameters by means of CD-linearity in sub 100 nm electron beam lithography
Hauptmann, M.; Choi, K.-H.; Jaschinsky, P.; Hohle, C.; Kretz, J.; Eng, L.M.
Conference Paper, Journal Article
2009Fast backscattering parameter determination in e-beam lithography with a modified doughnut test
Keil, K.; Hauptmann, M.; Choi, K.H.; Kretz, J.; Eng, L.M.; Bartha, J.W.
Journal Article
2009Utilizing near-field and depolarization effects for tip-enhanced Raman spectroscopy on semiconductor nanostructures
Hermann, P.; Chong, Z.; Hecker, M.; Olk, P.; Weisheit, M.; Rinderknecht, J.; Ritz, Y.; Kücher, P.; Eng, L.M.
Abstract
2007Extending conventional scatterometry using generalized ellipsometry
Reinig, P.; Geiler, T.; Mört, M.; Hingst, T.; Bloeß, H.; Renger, J.; Eng, L.M.
Conference Paper
2006High throughput screening of ferroelectric thin film libraries
Schroeter, C.; Wessler, B.; Schönecker, A.; Keitel, U.; Eng, L.M.
Journal Article