Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Electrically Controlled Actuation of Strained Nanomembranes
Enderlein, T.; Nestler, J.; Stiehl, C.; Morschhauser, A.; Otto, T.
Journal Article
2017Investigations on Parylene C for its integrability into MEMS
Selbmann, F.; Baum, M.; Hecker, C.; Roscher, F.; Enderlein, T.; Wiemer, M.; Joseph, Y.; Otto, T.
Conference Paper
2017Novel concept of integrated micro actuation of membranes in liquid environments
Stiehl, C.; Enderlein, T.; Nestler, J.; Otto, T.
Conference Paper
2016A new approach for 3D Integration based on printed multilayers and through polymer vias
Roscher, F.; Saeidi, N.; Enderlein, T.; Selbmann, F.; Wiemer, M.; Gessner, T.
Conference Paper
2016Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding
Wang, W.-S.; Wiemer, M.; Froemel, J.; Enderlein, T.; Gessner, T.; Lullin, J.; Bargiel, S.; Passilly, N.; Albero, J.; Gorecki, C.
Conference Paper
2015Fabrication of micro needle arrays using an ultra short pulse laser
Enderlein, T.; Nestler, J.; Otto, T.; Gessner, T.
Conference Paper
2014Capillary microfluidic chip with integrated pump and valve actuator
Große, Allyn; Geidel, Sascha; Enderlein, Tom; Groß, Stefan; Morschhauser, Andreas; Nestler, Jörg; Edelmann, Jan; Otto, Thomas; Gessner, Thomas
Poster
2014Capillary microfluidic chip with integrated pump and valve actuator
Große, Allyn; Geidel, Sascha; Enderlein, Tom; Groß, Stefan; Morschhauser, Andreas; Nestler, Jörg; Edelmann, Jan; Otto, Thomas; Geßner, Thomas
Conference Paper
2014Dry Integration Strategies of rolled-up Nanostructures by a Combination of Laser and Mems Technologies
Helke, C.; Enderlein, T.; Harazim, S.; Nestler, J.; Otto, T.; Schmidt, O.G.; Gessner, T.
Conference Paper
2014Kombination von Laser- und MEMS Technologieprozessen fuer Integrationsstrategien von rolled-up Nano-Architekturen
Helke, C.; Enderlein, T.; Harazim, S.; Nestler, J.; Otto, T.; Schmidt, O.G.; Gessner, T.
Conference Paper
2014Laser based dry Integration of rolled-up Nanomembranes into Polymer Substrates
Enderlein, T.; Helke, C.; Harazim, S.; Geidel, S.; Nestler, J.; Otto, T.; Schmidt, O.G.; Gessner, T.
Conference Paper
2014Laser based integration method of rolled-up nano membranes in polymer based LoC systems
Enderlein, T.; Helke, C.; Harazim, S.; Nestler, J.; Schmidt, O.G.; Otto, T.; Gessner, T.
Abstract
2014MEMS based integration of nano scaled architectures manufactured by the rolled-up nanotech method
Helke, C.; Enderlein, T.; Harazim, S.; Nestler, J.; Schmidt, O.G.; Otto, T.; Gessner, T.
Abstract
2014Multifunctional nanomembranes as sensitive optical sensors in compact MEMS devices
Harazim, S.; Bolanos, V.; Helke, C.; Enderlein, T.; Otto, T.; Schmidt, O.G.
Abstract
2013Degree of integration enhancement of membrane actuators in LOCs utilizing laser technology
Geidel, S.; Enderlein, T.; Nestler, J.; Morschhauser, A.; Otto, T.; Gessner, T.
Conference Paper
2013Picosecond Laser Micromachining in the context of MEMS/NEMS applications
Enderlein, T.; Helke, C.; Hiller, K.; Nestler, J.; Schueller, M.; Geidel, S.; Otto, T.; Gessner, T.
Conference Paper
2012Laser micromachining and micro hot embossing for highly integrated lab-on-chip systems
Enderlein, T.; Baum, M.; Nestler, J.; Otto, T.; Besser, J.; Wiemer, M.; John, B.; Hänel, J.; Gessner, T.
Conference Paper
2012Laser Micromachining for Micro- and Lab-on- Chip-Systems
Nestler, J.; Enderlein, T.; Geidel, S.
Conference Paper
2012Laserbasierter Multilayer-Fügeprozess zur Erzeugung heterogener und druckstabiler mikrofluidischer Systeme
Geidel, S.; Enderlein, T.; Morschhauser, A.; Nestler, J.; Otto, T.; Gessner, T.
Conference Paper
2012LoC Integrationsstrategien für aufgerollte Sensoren
Harazim, S.; Helke, C.; Enderlein, T.; Morschhauser, A.; Nestler, J.; Sanchez, S.; Grimm, D.; Otto, T.; Schmidt, O.; Gessner, T.
Conference Paper
2011Micromachining of polymers on base of renewable raw materials for microfluidic systems
Otto, T.; Enderlein, T.; Nestler, J.; Morschhauser, A.; Klenert, P.; Gessner, T.
Conference Paper
2008Microfluidic cartridge with integrated pumps and liquid position feedback design for running protein assays
Nestler, J.; Enderlein, T.; Hiller, K.; Otto, T.; Gessner, T.; Auerswald, J.; Knapp, H.F.; Griffiths, C.; Bigot, S.
Conference Paper