Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Trench filling with a-Si using a PE-CVD process and back etch sequence
Elsäßer, Linus; Naumann, A.
Conference Paper
2016Back-end-of-line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Amelung, Jörg; Klemm, Markus; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael; Grüger, Heinrich
Conference Paper
2016Back-End-of-Line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Koch, Sandro; Amelung, Jörg; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael
Presentation
2016Schallwandlerarray mit gekoppelten Wandlern
Klemm, Markus; Elsäßer, Linus; Unamuno-Eguren, Anartz; Kupnik, Mario; Unger, Alexander
Patent
2015Performance assessment of CMUT arrays based on electrical impedance test results
Klemm, Markus; Unamuno, Anartz; Elsäßer, Linus; Jeroch, Werner
Journal Article
2015Stress controlled CMUT fabrication based on a CMOS compatible sacrificial release process
Elsäßer, Linus; Friedrichs, Martin; Klemm, Markus; Unamuno, Anartz
Conference Paper