Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Define and measure the dimensional accuracy of two-photon laser lithography based on its instrument transfer function
Dai, Gaoliang; Hu, Xiukun; Hering, Julian; Eifler, Matthias; Seewig, Jörg; Freymann, Georg von
Journal Article
2021Metrological characteristics of material measures depending on manufacturing parameters in direct laser writing and external stress factors
Gross, Katja; Eifler, Matthias; Hering, Julian; Freymann, Georg von; Seewig, Jörg
Conference Paper
2021Towards a continuous frequency band chirp material measure for surface topography measuring instrument calibration
Eifler, Matthias; Hering, Julian; Keksel, Andrej; Freymann, Georg von; Seewig, Jörg
Conference Paper
2020Comparison of material measures for areal surface topography measuring instrument calibration
Eifler, M.; Hering, J.; Seewig, J.; Leach, R.K.; Freymann, Georg von; Hu, X.; Dai, G.
Journal Article
2020Performance specification of areal surface texture instruments exemplified by a self-built WLI
Bulun, Georgis; Eifler, Matthias; Hering, Julian; Freymann, Georg von; Seewig, Jörg
Conference Paper
2019User-oriented evaluation of the metrological characteristics of areal surface topography measuring instruments
Eifler, M.; Ströer, F.; Hering, J.; Freymann, Georg von; Seewig, J.
Conference Paper
2018Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments
Eifler, M.; Hering, J.; Freymann, G. von; Seewig, J.
Journal Article
2018Kalibriernormal und Verfahren zu seiner Herstellung
Eifler, Matthias; Freymann, Georg; Hering, Julian; Seewig, Jörg
Patent
2018Manufacturing of the ISO 25178-70 material measures with direct laser writing: a feasibility study
Eifler, M.; Hering, J.; Freymann, G. von; Seewig, J.
Journal Article
2018Two-photon laser lithography in optical metrology
Hering, J.; Eifler, M.; Hofherr, L.; Ziegler, C.; Seewig, J.; Freymann, G. von
Conference Paper
2017Ultrafast 3D high precision print of micro structures for optical instrument calibration procedures
Ströer, F.; Hering, J.; Eifler, M.; Raid, I.; Freymann, G. von; Seewig, J.
Journal Article
2015Calibration of z-axis linearity for arbitrary optical topography measuring instruments
Eifler, Matthias; Seewig, Jörg; Hering, Julian; Freymann, Georg von
Conference Paper