| | |
|---|
| 2021 | Gesellschaftliche und psychologische Auswirkungen der Covid-19-Pandemie in Deutschland
Lingelbach, Katharina; Janssen, Doris; Maurer, Philipp; Gado, Sabrina; Piechnik, Daniela; Eichler, Martin; Hentschel, Leopold; Schuler, Markus; Sernatinger, Daniel; Knopf, Dennis
: Bauer, Wilhelm (Hrsg.); Riedel, Oliver (Hrsg.); Weisbecker, Anette (Hrsg.); Peissner, Matthias (Hrsg.) | Report |
| 2020 | Adhesive-free bonding of web-like plastic-metal combinations at low temperatures
Mann, Annika; Meyer, Hannes; Lachmann, Kristina; Lehm, Andreas; Romstedt, Diana; Eichler, Marko; Thomas, Michael | Abstract |
| 2019 | Adhesive-free bonding of web-like plastic-metal combinations at low temperatures
Lehm, A.; Romstedt, D.; Schoenberner, V.; Meyer, H.T.; Eichler, M. | Conference Paper |
| 2017 | Improved bonding behavior by plasma coating for roughened surfaces
Eichler, M.; Nagel, K.; Klages, C.-P. | Abstract |
| 2017 | Parametric studies on droplet generation reproducibility for applications with biological relevant fluids
Wiedemeier, S.; Eichler, M.; Römer, R.; Grodrian, A.; Lemke, K.; Nagel, K.; Klages, C.-P.; Gastrock, G. | Journal Article |
| 2017 | Stickstofffunktionalisierung. Sauerstofffreie Plasmajet-Vorbehandlung für die Kunststoffaktivierung bei Umgebungsdruck
Eichler, M.; Fischer, V.; Paulmann, S.; Stammen, E.; Thomas, M.; Khosravi, Z.; Hinze, A.; Grishin, A.; Lachmann, K.; Borris, J.; Dohse, A.; Nagel, K.; Dilger, K.; Klages, C.-P. | Conference Paper |
| 2016 | Ar-H2 plasma surface treatments of silicon wafers at atmospheric pressure
Hergelová, B.; Eichler, M.; Nagel, K.; Klages, C.-P. | Conference Paper |
| 2016 | Control of direct bonding behavior by interlayers
Eichler, M.; Dillmann, H.; Nagel, K.; Klages, C.-P. | Conference Paper |
| 2016 | Evaluating possibilities and limitations of liquid sorption thermal energy storage
Eichler, Mathias; Mack, Simone; Hirth, Thomas | Journal Article, Conference Paper |
| 2016 | Surface functionalization of microfluidic devices
Eichler, M.; Klages, C.-P.; Lachmann, K. | Book Article |
| 2016 | Surface preparation and eutectic wafer bonding
Heller, M.W.; Zoberbier, M.; Fujita, T.; Eichler, M. | Conference Paper |
| 2015 | Application of polyelectrolyte multilayers for temporary wafer bonding
Dillmann, H.; Eichler, M.; Klages, C.-P. | Abstract |
| 2015 | Control of surface free energy by patterned etching or coating
Eichler, M.; Nagel, K.; Reim, L.C.; Klages, C.-P. | Abstract |
| 2015 | WaferBond 2015, Conference on Wafer Bonding for Microsystems, 3D- and Wafer Level Integration. Book of Abstracts
: Knechtel, Roy (Ed.); Eichler, Marko | Conference Proceedings |
| 2014 | Temporary wafer bonding by polyelectrolyte interlayers
Eichler, M.; Dillmann, H.; Reim, L.C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2013 | Adhesion Improvement by Nitrogen Functionalization of Polymers Using DBD-Based Plasma Sources at Ambient Pressure
Thomas, M.; Eichler, M.; Lachmann, K.; Borris, J.; Hinze, A.; Klages, C.-P. | Book Article |
| 2013 | Langzeitstabile hydrophobe Oberflächenbeschichtungen für fluidische Systeme
Eichler, M. | Conference Paper |
| 2012 | Area-selective microplasma treatment in microfluidic channels for novel fluid phase separators
Eichler, M.; Nagel, K.; Hennecke, P.; Klages, C.-P. | Journal Article |
| 2012 | Formation and photocatalytic decomposition of a pellicle on anatase surfaces
Rupp, F.; Haupt, M.; Eichler, M.; Doering, C.; Klostermann, H.; Scheideler, L.; Lachmann, S.; Oehr, C.; Wendel, H.P.; Decker, E.; Geis-Gerstorfer, J.; Ohle, C. von | Journal Article |
| 2012 | Plasma activation as a pretreatment tool for low-temperature direct wafer bonding in microsystems technology
Eichler, M.; Hennecke, P.; Nagel, K.; Gabriel, M.; Klages, C.-P. | Journal Article, Conference Paper |
| 2012 | Plasma printing and related techniques - Patterning of surfaces using microplasmas at atmospheric pressure
Thomas, M.; Borris, J.; Dohse, A.; Eichler, M.; Hinze, A.; Lachmann, K.; Nagel, K.; Klages, C.-P. | Journal Article |
| 2011 | Anlagen- und Prozessentwicklung für das Niedrigtemperatur-Direktbonden mittels Atmosphärendruck-Plasmaaktivierung
Eichler, M. | Dissertation |
| 2011 | Fluidischer Separator für Zweiphasengemische
Eichler, M.; Nagel, K.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2011 | The impact of dendrimer-grafted modifications to model silicon surfaces on protein adsorption and bacterial adhesion
Eichler, M.; Katzur, V.; Scheideler, L.; Haupt, M.; Geis-Gerstorfer, J.; Schmalz, G.; Ruhl, S.; Müller, R.; Rupp, F. | Journal Article |
| 2011 | Mechanism and prevention of defect formation during hydrophilic silicon direct bonding at low temperatures
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2011 | Micropatterning using atmospheric pressure plasma processes
Thomas, M.; Borris, J.; Eichler, M.; Klages, C.-P. | Journal Article |
| 2011 | Niedrigtemperatur-Direktbonden von Silizium-, Borosilikat- und Quarzglaswafern und der Einfluss von Funktionsschichten
Eichler, M.; Hennecke, P.; Michel, B.; Klages, C.-P. | Conference Paper |
| 2010 | Erzeugung funktioneller Oberflächen durch plasmaunterstützte Beschichtung mittels dielektrischer Barrierenentladung (DBD-PACVD)
Thomas, M.; Eichler, M.; Borris, J.; Lachmann, K.; Barreto, M.C.; Klages, C.-P. | Conference Paper |
| 2010 | Local plasma treatment in a mask aligner for selective wafer surface modification
Eichler, M.; Gabriel, M. | Journal Article |
| 2010 | Low-temperature direct bonding of borosilicate, fused silica, and functional coatings
Eichler, M.; Michel, B.; Hennecke, P.; Gabriel, M.; Klages, C.-P. | Conference Paper |
| 2010 | Multifunctional nature of UV-irradiated nanocrystalline anatase thin films for biomedical applications
Rupp, F.; Haupt, M.; Klostermann, H.; Kim, H.-S.; Eichler, M.; Peetsch, A.; Scheideler, L.; Doering, C.; Oehr, C.; Wendel, H.-P.; Sinn, S.; Decker, E.; Ohle, C. von; Geis-Gerstorfer, J. | Journal Article |
| 2009 | Anatase surface modification of titanium implants offers clinical potential
Rupp, F.; Scheideler, L.; Haupt, M.; Decker, E.; Eichler, M.; Oehr, C.; Ohle, C. von; Sinn, S.; Wendel, H.-P.; Geis-Gerstorfer, J. | Abstract |
| 2009 | Anatase-coated titanium: Photoinduced hydrophilicity and photocatalytic biodegradation
Rupp, F.; Stephan, I.; Eichler, M.; Scheideler, L.; Decker, E.; Haupt, M.; Oehr, C.; Sinn, S.; Ohle, C. von; Wendel, H.-P.; Geis-Gerstorfer, J. | Journal Article |
| 2009 | Atmospheric-pressure plasma activation of silicon for MEMS packaging
Eichler, M.; Michel, B.; Hennecke, P.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2009 | Bondenergie-Messung in situ während des Temperns beim Direktbonden von Glas und Silizium
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2009 | Comparison of bonding kinetics for borosilicate glass and silicon wafers by in situ fracture surface energy measurements during annealing
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Conference Paper |
| 2009 | Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning, and oxidation
Michel, B.; Giza, M.; Krumrey, M.; Eichler, M.; Grundmeier, G.; Klages, C.-P. | Journal Article |
| 2009 | Effects on silanol condensation during low temperature silicon fusion bonding
Eichler, M.; Michel, B.; Hennecke, P.; Klages, C.-P. | Journal Article |
| 2009 | Einsatz von Mikroplasmen für die Herstellung von Silizium-Mehrlagenaufbauten
Eichler, M.; Michel, B.; Gabriel, M.; Klages, C.-P. | Journal Article |
| 2009 | Investigations on the effect of dielectric barrier discharge (DBD) treatment as a preconditioning method for low temperature silicon wafer bonding
Michel, B.; Eichler, M.; Klages, C.-P. | Journal Article, Conference Paper |
| 2009 | Investigations on the plasma-surface interaction during DBD-treatment for low-temperature direct silicon wafer bonding
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | Lokale Plasma-Behandlung in einem Mask Aligner zur selektiven Veränderung der Oberfläche von Wafern
Gabriel, M.; Milde, S.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | Low temperature bonding of hetero-materials using ambient pressure plasma activation
Wiemer, M.; Wünsch, D.; Bräuer, J.; Eichler, M.; Hennecke, P.; Gessner, T. | Conference Paper |
| 2009 | Multipin ac corona treatment - a new surface activation method for low temperature direct bonding
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | Plasmagestützte Oberflächenmodifizierung in fluidischen Systemen mit gedeckelten Kavitäten
Eichler, M.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2009 | Surface reactions controlled by dielectric barrier discharge at atmospheric pressure for high performance large-scale production
Eichler, M.; Thomas, M.; Borris, J.; Michel, B.; Klages, C.-P. | Conference Paper |
| 2009 | Untersuchung der Aktivierungseffekte durch DBD bei Atmosphärendruck für das Tieftemperatur-Direktbonden
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2009 | Verfahren zum zwischenschichtfreien Verbinden von Substraten, Vorrichtung zur Durchfuehrung einer Plasmabehandlung sowie deren Verwendung
Klages, C.-P.; Michel, B.; Eichler, M. | Patent |
| 2008 | Allseitige Innenbeschichtung von fluidischen Systemen
Eichler, M.; Berger, C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2008 | Atmospheric-pressure plasma pretreatment for direct bonding of silicon wafers at low temperatures
Eichler, M.; Michel, B.; Thomas, M.; Gabriel, M.; Klages, C.-P. | Journal Article, Conference Paper |
| 2008 | Kinetics of silanol condensation for low-temperature direct bonding
Eichler, M.; Michel, B.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2007 | Atmosphärendruck-Mikroplasmen in der Oberflächentechnik
Thomas, M.; Klages, C.-P.; Eichler, M.; Borris, J. | Conference Paper |
| 2007 | Beschichtung der inneren Oberflächen in gedeckelten mikrofluidischen Systemen
Eichler, M.; Berger, C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2007 | Bonding and reliability for 3D mechanical, optical and fluidic systems
Wiemer, M.; Bagdahn, J.; Beckert, E.; Eichler, M.; Hollaender, A.; Vogel, D. | Conference Paper |
| 2007 | Effects of dielectric barrier discharge treatment on the surface of silicon wafers
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2007 | Einsatz von Atmosphärendruck-Mikroplasmen für die Aufbau- und Verbindungstechnik
Eichler, M.; Michel, B.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2007 | Microplasma-based treatment of inner surfaces in microfluidic devices
Klages, C.-P.; Berger, C.; Eichler, M.; Thomas, M. | Journal Article |
| 2007 | Silizium-Aktivierung für das Tieftemperatur-Waferbonden mit Barrierenentladung
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2007 | Surface technology with cold microplasmas
Klages, C.-P.; Hinze, A.; Lachmann, K.; Berger, C.; Borris, J.; Eichler, M.; Hausen, M. von; Zänker, A.; Thomas, M. | Conference Paper, Journal Article |
| 2006 | Ambient pressure plasma activation for low temperature bonding
Eichler, M.; Michel, B.; Thomas, M.; Klages, C.-P.; Ruddy, C.; Reinecke, H.; Reiche, M.; Radu, I.; Gabriel, M. | Conference Paper |
| 2006 | Anodic and direct bonding of Si and glass - Similarities and distinctions in applications
Gabriel, M.; Cetin, V.; Ludewig, T.; Eichler, M. | Conference Paper |
| 2006 | Atmospheric-pressure plasma deposition of coating in microchannels
Klages, C.-P.; Berger, C.; Eichler, M.; Nagel, K.; Thomas, M. | Conference Paper |
| 2006 | Coating on the inside of microfluidic systems with DBD based atmospheric pressure PA-CVD
Eichler, M.; Berger, C.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2006 | Coating with atmospheric pressure plasma processes
Thomas, M.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2006 | Effects of dielectric barrier discharge treatment on surface chemistry of silicon wafers
Michel, B.; Eichler, M.; Klages, C.-P. | Conference Paper |
| 2006 | Investigation of ignition conditions of atmospheric pressure discharges in sealed microfluidic systems
Eichler, M.; Dziubek, A.; Berger, C.; Kurrat, M.; Klages, C.-P. | Conference Paper |
| 2006 | Patterned DBD pretreatment at ambient pressure for low temperature wafer bonding
Eichler, M.; Michel, B.; Thomas, M.; Ruddy, C.; Reinecke, H.; Reiche, M.; Gabriel, M.; Klages, C.-P. | Conference Paper |
| 2006 | Patterned surface modification using ambient pressure plasma processes for enhanced wafer packaging by low temperature bonding
Eichler, M.; Mewes, H.; Thomas, M.; Klages, C.-P.; Ruddy, C.; Reinecke, H.; Reiche, M.; Gabriel, M. | Conference Paper |
| 2006 | Verfahren zum Herstellen eines Bauteils mit einem Hohlraum und Vorrichtung mit einem zur Führung eines Fluids geeigneten Hohlraum
Thomas, M.; Klages, C.; Eichler, M.; Berger, C. | Patent |
| 2006 | Wafer direct bonding with ambient pressure plasma activation
Gabriel, M.; Johnson, B.; Suss, R.; Reiche, M.; Eichler, M. | Journal Article |
| 2005 | Capabilities of an ambient pressure plasma for activation in LT wafer bonding processes
Gabriel, M.; Cetin, V.; Hansen, S.; Reiche, M.; Radu, I.; Eichler, M. | Conference Paper |
| 2005 | Functional coatings deposition in microfluidic systems by dbd-based PA-CVD
Eichler, M.; Thomas, M.; Hacker, J.; Klages, C.-P. | Conference Paper |
| 2005 | Innenbehandlung und -beschichtung von gedeckelten mikrofluidischen Systemen
Eichler, M.; Hacker, J.; Thomas, M.; Klages, C.-P. | Conference Paper |
| 2005 | Mechanisms of low-temperature wafer bonding
Reiche, M.; Radu, I.; Gabriel, M.; Zoberbier, M.; Hansen, S.; Eichler, M. | Conference Paper |
| 2005 | Oberflächenbeschichtung bei Atmosphärendruck
Thomas, M.; Eichler, M.; Klages, C.-P. | Journal Article |
| 2005 | Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden bei niedrigen Temperaturen
Eichler, M.; Thomas, M.; Mewes, H.; Klages, C.-P. | Conference Paper |
| 2004 | Beschichtungsanlage und Verfahren zur Beschichtung
Klages, C.; Eichler, M. | Patent |
| 2004 | Möglichkeiten und Grenzen der Oberflächentechnik mit Barrierenentladung
Klages, C.-P.; Eichler, M.; Penache, C.; Thomas, M. | Conference Paper |
| 2003 | Atmosphärendruck-Plasmaverfahren im Korrosionsschutz
Eichler, M.; Klages, C.-P.; Gessner, C. | Conference Paper |
| 2003 | Atmospheric pressure PA-CVD of silicon- and carbon-based coatings using dielectric barrier discharges
Klages, C.-P.; Eichler, M.; Thyen, R. | Journal Article |
| 2003 | Effects of discharge pulsing on the cleaning of surfaces using a dielectric barrier discharge at atmospheric pressure
Kim, Y.-K.; Eichler, M.; Klages, C.-P. | Journal Article |
| 2003 | Der Funke springt über
Eichler, M. | Journal Article |
| 2003 | Verfahren und Vorrichtung zur plasmagestuetzten Oberflaechenbehandlung und Verwendung des Verfahrens
Klages, C.P.; Thyen, R.; Eichler, M.; Lindmayer, M. | Patent |
| 2002 | Beschichtung und Reinigung von Oberflächen mit Atmosphärendruck-Plasmen
Klages, C.-P.; Eichler, M. | Journal Article |
| 2002 | Plasmabeschichtung ohne Vakuum
Eichler, M. | Journal Article |
| 2002 | Probing magnetism of nanosized single-domain particle- systems
Hesse, J.; Pütter, S.; Michele, O.; Bremers, H.; Hupe, O.; Hartung, H.; Eichler, M. | Journal Article |
| 2001 | Chemische Funktionalisierung von Oberflächen mit Atmosphärendruck-Plasmen
Klages, C.-P.; Eichler, M.; Steen, N. | Conference Paper |
| 2000 | Herstellung und Charakterisierung von Eisen-Carbid-Schichten zur Bestimmung der magnetischen Eigenschaften
Eichler, M. | Thesis |