Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Status report on EUV source development and EUV source applications in EUVL
Bakshi, V.; Lebert, R.; Jägle, B.; Wies, C.; Stamm, U.; Kleinschmidt, J.; Schriever, G.; Ziener, C.; Corthout, M.; Pankert, J.; Bergmann, K.; Neff, W.; Egbert, A.; Gustafson, D.
Conference Paper
2005Progress on EUV-source development, tool integration and applications
Lebert, R.; Jaegle, B.; Wies, C.; Stamm, U.; Kleinschmidt, J.; Gaebel, K.; Schriever, G.; Pankert, J.; Bergmann, K.; Neff, W.; Egbert, A.
Conference Paper
2003Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics
Serbin, J.; Egbert, A.; Ostendorf, A.; Chichkov, B.N.; Houbertz, R.; Domann, G.; Schulz, J.; Cronauer, C.; Fröhlich, L.; Popall, M.
Journal Article