Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Next Generation of highly miniaturized Bulk-MEMS Fabry-Pérot Filters for infrared Microspectrometers
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Seiler, J.; Helke, C.; Meinig, M.; Kurth, S.
Conference Paper
2016MEMS tunable Fabry-Pérot filters for infrared microspectrometer applications
Neumann, N.; Ebermann, M.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2016Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers
Meinig, M.; Kurth, S.; Seifert, M.; Hiller, K.; Wecker, J.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2016Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: A review
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2015Cost-effective technologies to control indoor air quality and comfort in energy efficient building retrofitting
Revel, G.M.; Arnesano, M.; Pietroni, F.; Frick, J.; Reichert, M.; Schmitt, K.; Huber, J.; Ebermann, M.; Battista, U.; Alessi, F.
Journal Article
2015Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration
Meinig, M.; Kurth, S.; Helke, C.; Seifert, M.; Hiller, K.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper
2015A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
Ebermann, M.; Neumann, N.; Binder, S.; Meinig, M.; Seifert, M.; Kurth, S.; Hiller, K.
Conference Paper
2015Subwavelength Grating Reflectors for Fabrication Cost Reduction of Fabry-Perot Infrared Filters
Rupprecht, J.; Kurth, S.; Hiller, K.; Seifert, M.; Besser, J.; Meinig, M.; Ebermann, M.; Neumann, N.; Gessner, T.
Conference Paper, Journal Article
2014The monitoring of indoor air quality and comfort. The experience of the project Cetieb
Revel, G.M.; Arnesano, M.; Pietroni, F.; Frick, J.; Reichert, M.; Krüger, M.; Schmitt, K.; Huber, J.; Ebermann, M.; Pockele, L.
Journal Article, Conference Paper
2014Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases
Ebermann, M.; Neumann, N.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.
Conference Paper
2014Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture
Kurth, S.; Hiller, K.; Meinig, M.; Besser, J.; Seifert, M.; Ebermann, M.; Neumann, N.; Schlachter, F.; Gessner, T.
Conference Paper
2014Technology approaches for tuneable IR Fabry-Perot-Filters applied in gas sensing microspectrometers
Hiller, K.; Meinig, M.; Kurth, S.; Seifert, M.; Helke, C.; Neumann, N.; Ebermann, M.
Book Article
2013Advanced tools for the monitoring and control of indoor air quality and comfort
Revel, G.M.; Arnesano, M.; Pietroni, F.; Frick, J.; Reichert, M.; Krüger, M.; Schmitt, K.; Huber, J.; Ebermann, M.; Pockele, L.; Khanlou, A.; Ekonomakou, A.; Balau, J.; Pascale, C.; Falco, F. de; Lando, R.; Battista, U.; Stuart, J.
Journal Article, Conference Paper
2012Fabry-Perot tunable infrared filter based on structured reflectors
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Specht, H.; Meinig, M.; Gessner, T.
Conference Paper
2012Spektral abstimmbare IR-Sensoren für die industrielle Prozessmesstechnik und die medizinische Gasanalyse
Ebermann, M.; Neumann, N.; Hiller, K.; Meinig, M.
Journal Article
2012Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2011Application of sub-wavelength structures in infrared optical filters
Kurth, S.; Seifert, M.; Zajadacz, J.; Ebermann, M.; Hiller, K.; Neumann, N.; Gessner, T.
Conference Paper
2011Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers
Meinig, M.; Ebermann, M.; Neumann, N.; Kurth, S.; Hiller, K.; Gessner, T.
Conference Paper
2011Neuartiger frequenz- und amplitudenabstimmbarer Infrarotfilter
Specht, H.; Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Neumann, N.; Gittler, E.; Gessner, T.
Conference Paper
2011Tiny MID- and long-wave infrared spectrometer module with a MEMS dual-band Fabry-Pérot filter
Ebermann, M.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.; Neumann, N.
Conference Paper
2011Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
Ebermann, M.; Neumann, N.; Meinig, M.; Kurth, S.; Hiller, K.; Gittler, E.
Conference Paper
2011Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Meinig, M.; Kurth, S.; Hiller, K.; Neumann, N.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010Entwurf und Technologie eines Dualband Fabry-Pérot-Filters für den mittleren Infrarotbereich mit zwei beweglichen Reflektoren
Meinig, M.; Kurth, S.; Hiller, K.; Ebermann, M.; Gittler, E.; Gessner, T.
Conference Paper
2010Miniaturisiertes Spektrometermodul für den mittleren und langwelligen Infrarotbereich mit mikromechanischem Dual-Band Fabry-Pérot Filter
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Nanostrukturierte Breitbandreflektoren und deren Anwendung in abstimmbaren mikromechanischen Infrarot-Filtern
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadacz, J.; Gessner, T.
Conference Paper
2010Recent advances in expanding the spectral range of MEMS Fabry-Pérot filters
Ebermann, M.; Neumann, N.; Hiller, K.; Gittler, E.; Meinig, M.; Kurth, S.
Conference Paper
2010Subwavelength structures for infrared filtering
Kurth, S.; Hiller, K.; Neumann, N.; Seifert, M.; Ebermann, M.; Zajadacz, J.; Gessner, T.
Conference Paper
2010Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range
Neumann, N.; Ebermann, M.; Gittler, E.; Meinig, M.; Kurth, S.; Hiller, K.
Conference Paper
2009Design, operation and performance of a Fabry-Perot based MWIR micro spectrometer
Ebermann, M.; Neumann, N.; Hiller, K.; Kurth, S.
Conference Paper
2009Novel MWIR microspectrometer based on a tunable detector
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S.
Conference Paper
2007Tunable infrared detector with integrated micromachined Fabry-Perot filter
Neumann, N.; Ebermann, M.; Hiller, K.; Kurth, S.
Conference Paper